Abstract: A method of forming a contactless nonvolatile memory device includes preparing a semiconductor substrate including a cell array region, forming a plurality of mask patterns being parallel to each other on the semiconductor substrate in the cell array region, etching the semiconductor substrate using the mask patterns as an etch mask to form a plurality of recess regions, forming a gate insulating layer on sidewalls and bottoms of the recess regions, forming a floating gate layer on an upper surface of the semiconductor substrate to fill the recess regions, planarizing the floating gate layer to expose upper surfaces of the mask patterns and to form floating gate patterns in the recess regions, forming buried impurity diffusion regions in the semiconductor substrate under the mask patterns, forming an intergate dielectric layer, forming a control gate layer, and patterning the control gate layer, the intergate dielectric layer and the floating gate pattern to form a plurality of parallel word lines crossing th

Abstract: Embodiments of the present invention are directed to methods for forming non-volatile memory devices. A substrate is provided that has a cell region, a first peripheral region, and second peripheral region. A tunnel insulating layer is formed on the substrate in the cell region. A preliminary floating gate is formed on the tunnel insulating layer in the cell region. A blocking insulating layer is formed on the substrate in the cell region, the first peripheral region, and the second peripheral region. A conductive layer is formed on the blocking insulating layer in the cell region, the first peripheral region, and the second peripheral region. The conductive layer and the blocking insulating layer in the first and second peripheral regions are removed to expose at least a portion of the substrate in the first and second peripheral regions. First and second gate insulating layers are respectively formed on the exposed substrate of the first and second peripheral regions.

Abstract: A NAND-type non-volatile memory device includes a substrate and a device isolation layer disposed on the substrate to define an active region. First and second selection transistors are disposed in the active region, such that each of the first and second selection transistors has a recessed channel. A plurality of memory transistors is disposed in the active region between the first selection transistor and the second selection transistor.

Abstract: Selective erase method for a flash memory device including a group of memory cells arranged in rows and columns include performing an erase operation on the group of memory cells and verifying the erase operation on the group of memory cells to determine threshold voltages of the memory cells. At least one row of memory cells including memory cells having a threshold voltage lower than a desired erase threshold voltage is identified. A further erase operation is performed on the group of memory cells excluding memory cells of the at least one row of memory cells including memory cells having a threshold voltage lower than a desired erase threshold voltage.

Abstract: A non-volatile memory device includes a floating gate formed over a semiconductor substrate. At one end of the floating gate, there is a tapered protrusion having a horn-like or bird's beak shape. A control gate covers the floating gate except for the tapered protrusion. Sidewall spacers are formed adjacent to the floating gate and the control gate. An erasing gate is formed over the tapered protrusion of the floating gate.

Abstract: A non-volatile memory device includes a floating gate formed over a semiconductor substrate. At one end of the floating gate, there is a tapered protrusion having a horn-like or bird's beak shape. A control gate covers the floating gate except for the tapered protrusion. Sidewall spacers are formed adjacent to the floating gate and the control gate. An erasing gate is formed over the tapered protrusion of the floating gate.

Abstract: A non-volatile memory device includes a floating gate formed over a semiconductor substrate. At one end of the floating gate, there is a tapered protrusion having a horn-like or bird's beak shape. A control gate covers the floating gate except for the tapered protrusion. Sidewall spacers are formed adjacent to the floating gate and the control gate. An erasing gate is formed over the tapered protrusion of the floating gate.

Abstract: In a flash memory device, electrical connections between segment transistors and memory cells are accurately achieved by forming the segment transistors before forming the memory cells. When forming the segment transistors, a first impurity is implanted into a substrate to form a first source and a first drain. A second impurity is then implanted into the substrate to form a conductive line to be used as a common bit line for the memory cells, and simultaneously form a second source below the first source and a second drain below the first drain of the segment transistor. As such, the common bit lines of the memory cells and the second sources of the segment transistors are formed to be electrically connected together with more reliability.

Abstract: Nonvolatile memory, cell array thereof, and method for sensing a data therefrom, the method including the steps of: selecting a flash memory cell having a first floating gate and a second floating gate, a first control gate and a second control gate, and a drain and a source; flowing a current through a first channel under the first floating gate and detecting a current flow through a second channel under the second floating gate, thereby sensing a color state of the second floating gate; flowing a current through the second channel and conducting level writings on the first floating gate, thereby forming different threshold voltages; measuring a cell current of the first channel under the first floating gate; comparing the measured cell current to a reference current, thereby sensing a level state of the first floating gate; and sensing information bits stored in the flash memory cell according to a color state of the second floating gate and a level state of the first floating gate.

Abstract: Nonvolatile memory, cell array thereof, and method for sensing a data therefrom, the method including the steps of: selecting a flash memory cell having a first floating gate and a second floating gate, a first control gate and a second control gate, and a drain and a source; flowing a current through a first channel under the first floating gate and detecting a current flow through a second channel under the second floating gate, thereby sensing a color state of the second floating gate; flowing a current through the second channel and conducting level writings on the first floating gate, thereby forming different threshold voltages; measuring a cell current of the first channel under the first floating gate; comparing the measured cell current to a reference current, thereby sensing a level state of the first floating gate; and sensing information bits stored in the flash memory cell according to a color state of the second floating gate and a level state of the first floating gate.

Abstract: Nonvolatile memory, cell array thereof, and method for sensing a data therefrom, the method including the steps of: selecting a flash memory cell having a first floating gate and a second floating gate, a first control gate and a second control gate, and a drain and a source; flowing a current through a first channel under the first floating gate and detecting a current flow through a second channel under the second floating gate, thereby sensing a color state of the second floating gate; flowing a current through the second channel and conducting level writings on the first floating gate, thereby forming different threshold voltages; measuring a cell current of the first channel under the first floating gate; comparing the measured cell current to a reference current, thereby sensing a level state of the first floating gate; and sensing information bits stored in the flash memory cell according to a color state of the second floating gate and a level state of the first floating gate.

Abstract: Nonvolatile memory, cell array thereof, and method for sensing a data therefrom, the method including the steps of: selecting a flash memory cell having a first floating gate and a second floating gate, a first control gate and a second control gate, and a drain and a source; flowing a current through a first channel under the first floating gate and detecting a current flow through a second channel under the second floating gate, thereby sensing a color state of the second floating gate; flowing a current through the second channel and conducting level writings on the first floating gate, thereby forming different threshold voltages; measuring a cell current of the first channel under the first floating gate; comparing the measured cell current to a reference current, thereby sensing a level state of the first floating gate; and sensing information bits stored in the flash memory cell according to a color state of the second floating gate and a level state of the first floating gate.

Abstract: In a flash memory device, electrical connections between segment transistors and memory cells are accurately achieved by forming the segment transistors before forming the memory cells. When forming the segment transistors, a first impurity is implanted into a substrate to form a first source and a first drain. A second impurity is then implanted into the substrate to form a conductive line to be used as a common bit line for the memory cells, and simultaneously form a second source below the first source and a second drain below the first drain of the segment transistor. As such, the common bit lines of the memory cells and the second sources of the segment transistors are formed to be electrically connected together with more reliability.

Abstract: A non-volatile memory device includes a floating gate formed over a semiconductor substrate. At one end of the floating gate, there is a tapered protrusion having a horn-like or bird's beak shape. A control gate covers the floating gate except for the tapered protrusion. Sidewall spacers are formed adjacent to the floating gate and the control gate. An erasing gate is formed over the tapered protrusion of the floating gate.

Abstract: Nonvolatile memory, cell array thereof, and method for sensing a data therefrom, the method including the steps of: selecting a flash memory cell having a first floating gate and a second floating gate, a first control gate and a second control gate, and a drain and a source; flowing a current through a first channel under the first floating gate and detecting a current flow through a second channel under the second floating gate, thereby sensing a color state of the second floating gate; flowing a current through the second channel and conducting level writings on the first floating gate, thereby forming different threshold voltages; measuring a cell current of the first channel under the first floating gate; comparing the measured cell current to a reference current, thereby sensing a level state of the first floating gate; and sensing information bits stored in the flash memory cell according to a color state of the second floating gate and a level state of the first floating gate.

Abstract: A fabrication method of triple polysilicon flash EEPROM arrays according to the present invention includes forming a gate oxide layer on a semiconductor substrate having a source and a drain, forming a first polysilicon strip on said gate oxide layer in a first direction, forming a dielectric layer on said first polysilicon strip, forming second polysilicon strips on said dielectric layer in a second direction which is perpendicular to the first direction, forming oxide strips respectively on said second polysilicon strips, forming spacers at both side-walls of said oxide strips and said second polysilicon strips respectively formed thereon, forming a third polysilicon layer over the resultant structure, forming in the second direction masking strips which define erase gate regions on said third polysilicon layer, and forming individual erase gates and floating gates by sequentially etching the third polysilicon layer, the dielectric layer and the first polysilicon strip.