Patents by Inventor Wook-Jung Hwang

Wook-Jung Hwang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same
    Patent number: 7866341
    Abstract: An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve there between, and being alternately under a vacuum condition and under an atmospheric condition.
    Type: Grant
    Filed: February 25, 2010
    Date of Patent: January 11, 2011
    Assignee: Jusung Engineering Co., Ltd.
    Inventors: Hong-Seub Kim, Hyun-Soo Park, Soon-Bin Jung, Sung-Ho Cha, Dong-Jin Kim, Wook-Jung Hwang, Jin-Hyuk Yoo
  • VACUUM PUMPING SYSTEM, DRIVING METHOD THEREOF, APPARATUS HAVING THE SAME, AND METHOD OF TRANSFERRING SUBSTRATE USING THE SAME
    Publication number: 20100215513
    Abstract: An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve there between, and being alternately under a vacuum condition and under an atmospheric condition.
    Type: Application
    Filed: February 25, 2010
    Publication date: August 26, 2010
    Applicant: JUSUNG ENGINEERING CO., LTD.
    Inventors: Hong-Seub KIM, Hyun-Soo PARK, Soon-Bin JUNG, Sung-Ho CHA, Dong-Jin KIM, Wook-Jung HWANG, Jin-Hyuk YOO
  • Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same
    Patent number: 7695231
    Abstract: An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve there between, and being alternately under a vacuum condition and under an atmospheric condition.
    Type: Grant
    Filed: March 8, 2005
    Date of Patent: April 13, 2010
    Assignee: JUSUNG Engineering Co., Ltd.
    Inventors: Hong-Seub Kim, Hyun-Soo Park, Soon-Bin Jung, Sung-Ho Cha, Dong-Jin Kim, Wook-Jung Hwang, Jin-Hyuk Yoo
  • Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same
    Publication number: 20050196254
    Abstract: An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve there between, and being alternately under a vacuum condition and under an atmospheric condition.
    Type: Application
    Filed: March 8, 2005
    Publication date: September 8, 2005
    Applicant: JUSUNG Engineering Co., Ltd.
    Inventors: Hong-Seub Kim, Hyun-Soo Park, Soon-Bin Jung, Sung-Ho Cha, Dong-Jin Kim, Wook-Jung Hwang, Jin-Hyuk Yoo