Patents by Inventor Woon Y. Toh

Woon Y. Toh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process recipe modification in an integrated circuit fabrication apparatus
    Patent number: 6694210
    Abstract: One embodiment of the present invention is a method for modifying process recipe information utilized by a wafer processing system having a controller with permanent rewritable storage, memory, a first and a second communication interface, and a user interface; and one or more process cells to process a wafer; which method comprises steps of: (a) storing baseline process recipe information in permanent rewritable storage; (b) retrieving baseline process recipe information from permanent rewritable storage for a wafer in a group of wafers to be processed and storing it in memory; (c) receiving process recipe modification information utilizing the second communication interface and storing the process recipe modification information in memory; (d) overwriting at least portions of the baseline recipe information in memory with the process recipe modification information to form new recipe information; and (e) processing the wafer utilizing the new recipe information.
    Type: Grant
    Filed: August 8, 2002
    Date of Patent: February 17, 2004
    Assignee: Applied Materials, Inc.
    Inventor: Woon Y. Toh
  • PROCESS RECIPE MODIFICATION IN AN INTEGRATED CIRCUIT FABRICATION APPARATUS
    Publication number: 20040030437
    Abstract: One embodiment of the present invention is a method for modifying process recipe information utilized by a wafer processing system having a controller with permanent rewritable storage, memory, a first and a second communication interface, and a user interface; and one or more process cells to process a wafer; which method comprises steps of: (a) storing baseline process recipe information in permanent rewritable storage; (b) retrieving baseline process recipe information from permanent rewritable storage for a wafer in a group of wafers to be processed and storing it in memory; (c) receiving process recipe modification information utilizing the second communication interface and storing the process recipe modification information in memory; (d) overwriting at least portions of the baseline recipe information in memory with the process recipe modification information to form new recipe information; and (e) processing the wafer utilizing the new recipe information.
    Type: Application
    Filed: August 8, 2002
    Publication date: February 12, 2004
    Applicant: Applied Materials, Inc.
    Inventor: Woon Y. Toh