Abstract: A substrate processing method is provided. The substrate processing method comprises loading a substrate onto a substrate support inside a chamber, forming a plasma inside the chamber, providing a first DC pulse signal to an electromagnet that generates a magnetic field inside the chamber and processing the substrate with the plasma, wherein the first DC pulse signal is repeated at a first period including a first section and a second section subsequent to the first section, the first DC pulse signal has a first level during the first section, and the first DC pulse signal has a second level different from the first level during the second section.

Abstract: An electric power steering apparatus includes: a pinion shaft connected to a steering shaft coupled to a steering wheel, the pinion shaft being configured to transmit an operation of the steering wheel by a driver; a rack bar elongated along a lateral direction of a vehicle, having a first screw recess defined with a predetermined length in a portion of an outer circumferential surface of the rack bar, and including, on one side, a rack gear coupled to and interlocked with the pinion shaft; a motor configured to generate a steering assist power in proportion to a steering torque applied to the steering wheel; and a roller screw unit rotatably engaged with and coupled to the first screw recess to transmit the steering assist power generated from the motor to the rack bar.

Abstract: According to the present embodiments, it is easy to be drawn in or out balls between the sliding bar and the ball nut. Thus, it is possible to easily replace the balls. Therefore, it is possible to easily compensate for the gap between the sliding bar and the ball nut.

Abstract: According to the present embodiments, it is easy to be drawn in or out balls between the sliding bar and the ball nut. Thus, it is possible to easily replace the balls. Therefore, it is possible to easily compensate for the gap between the sliding bar and the ball nut.

Abstract: A terminal holder and a terminal case are disclosed. A terminal holder according to an embodiment may comprise: a holding plate which can be attached to a terminal; a fixing part which is disposed in the holding plate; and a support plate which is selectively connected to the fixing part and supports the holding plate on the ground in a state where the support plate is connected to the fixing part.

Abstract: A terminal support stand, according to one embodiment, may comprise: a fixed plate capable of being attached to a terminal; a support plate selectively coupled with the fixed plate, wherein at least a part of the support plate makes contact with the ground when the support plate is spaced apart from the fixed plate; and a magnetic body that connects the fixed plate and the support plate and is attached to a compressible resilient body and the fixed plate or support plate, wherein the magnetic body selectively couples the fixed plate and the support plate.