Abstract: A remote controlling apparatus to provide a plurality of control modes includes a communicating unit which performs communication with an external display apparatus which provides a user interface screen, a detecting unit which detects a movement of the remote controlling apparatus, a mode change button unit which receives a user command to change control mode, and a control unit which controls a display status of the user interface screen according to the movement of the remote controlling apparatus as detected through the detecting unit, and which operates in a pointing mode if the mode change button unit is released from pressed state, or operates in a gesture mode while the mode change button unit is in pressed state. The mode change button unit is arranged on a rear surface of the remote controlling apparatus for a user to grip.

Abstract: Provided is a spin head for supporting a substrate. The spin head includes a rotatable body, and chuck pins protruding upward from the body and configured to support an edge of a substrate placed at the body when the body is rotated. Each of the chuck pins includes a vertical rod vertically disposed at the body, and a support rod extending from a side of the vertical rod and configured to make contact with the edge of the substrate placed at the body when the body is rotated. When the substrate is rotated, the vertical rod is spaced apart from the edge of the substrate. The contact portion includes a streamlined side surface. The support rod includes a contact portion. The contact portion tapers toward the end of the support rod when viewed from the top of the support rod.

Abstract: A wafer spin chuck and an etcher using the same are provided. According to an aspect of the present invention, there is provide a wafer spin chuck device comprising: a spin body which spins a wafer; and a stationary body which holds the spin body and is under the spin body with a space between the spin body and the stationary body, wherein the stationary body includes a blocking unit which blocks the space with a fluid.

Abstract: A pointing device is provided. A sensor generates a motion detection signal by sensing motion. A calculator receives the motion detection signal, calculates a motion value based on the motion detection signal, calculates a conversion motion value base on an angle of the motion value, and outputs the conversion motion value. An interface outputs the motion conversion value inputted from the calculator. By limiting a motion angle, the pointing device can provide a positioning operation suitable for a motion intended by a user. The user can optionally use a motion control method in all directions according to need.