Abstract: An optical coherence tomography microscopy apparatus (1) is presented for detecting a three-dimensional image of an optically translucent or reflective sample object (OS), the apparatus comprising an interferometric optical setup including a photo sensor unit (20). A sense signal Si from the photo sensor unit (20) is detected using a detection reference signal. The detection reference signal is derived from a signal indicative for a relative displacement of the sample object (OS) with respect to a reference object.

Abstract: An optical coherence tomography microscopy apparatus (1) is presented for detecting a three-dimensional image of an optically translucent or reflective sample object (OS), the apparatus comprising an interferometric optical setup including a photo sensor unit (20). A sense signal Si from the photo sensor unit (20) is detected using a detection reference signal. The detection reference signal is derived from a signal indicative for a relative displacement of the sample object (OS) with respect to a reference object.

Abstract: The invention relates to a radiation dose meter for measuring radiation dose in a strong external magnetic field (100 m T-10 T) by means of charged particles generated in the radiation dose meter, the radiation dose meter provided with an alignment unit capable of auto aligning the radiation dose meter in the external magnetic field so that a path of the said charged particles inside the radiation dose meter is substantially parallel to a direction of the external magnetic field.

Abstract: A method of reducing contamination generated by a hydrogen radical generator and deposited on an optical element of a lithographic apparatus includes passing molecular hydrogen over a first part of a metal filament of the hydrogen radical generator, the first part including a metal-oxide, when the temperature of the first part of the metal filament is at a reduction temperature less than or equal to an evaporation temperature of the metal-oxide.

Abstract: A humidity measurement system for use in, for example, a lithographic apparatus. The humidity measurement system includes a tunable laser diode configured to emit a measurement radiation beam having a wavelength in a wavelength range. The wavelength range includes a first wavelength associated with an absorption peak of water molecules. A signal processing unit is connected to a radiation detector. The signal processing unit is configured to measure an intensity of the measurement radiation beam of the tunable laser diode subjected to absorption. The signal processing unit is also connected to the tunable laser diode for obtaining wavelength information. The signal processing unit is arranged to detect an extreme value in a measured intensity as function of the wavelength and to calculate a humidity value from the detected extreme value.