Abstract: The invention relates to a microelectromechanical system (MEMS) component or microfluidic component comprising a free-hanging or free-standing microchannel (1), as well as methods for manufacturing such a microchannel, as well as a flow sensor, e.g. a thermal flow sensor or a Coriolis flow sensor, pressure sensor or multi-parameter sensor, valve, pump or microheater, comprising such a microelectromechanical system component or microfluidic component. The MEMS component allows to increase the flow range and/or decrease the pressure drop of for instance a micro Coriolis mass flow meter by increasing the channel diameter, while maintaining its advantages.

Abstract: The invention relates to a flow measurement system for determining a flow of a medium, comprising a Coriolis flow sensor, a thermal flow sensor and a processing unit connected thereto. According to the invention, the processing unit is arranged for determining, based on the output signals of both the Coriolis flow sensor and the thermal sensor, at least one of the thermal conductivity and the specific heat capacity of a medium in the flow measurement system. The invention further relates to a method of determining at least one of the thermal conductivity and the specific heat capacity of a medium.

Abstract: The invention relates to a method and a system for determining the fractions of a flowing gaseous medium that comprises a known plurality N of known components. The method comprises the steps for determining at least N?1 parameters of a flowing gaseous medium. The N?1 parameters are chosen from a group of quantities comprising mass flow, density, viscosity, and heat capacity. At least N?1 reference values are provided for each of the known N components relating to each of the determined N?1 quantities. The fraction of each of the known components of the supplied gaseous medium is determined through solving of at least N equations. The N equations comprise N?1 equations which describe each determined parameter as a function of the fraction and the reference values, plus an equation that sets the sum of the fractions so as to be equal to 100%.