Patents by Inventor WRICKE Sandro

WRICKE Sandro has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • A LITHOGRAPHIC APPARATUS COMPRISING AN OBJECT WITH AN UPPER LAYER HAVING IMPROVED RESISTANCE TO PEELING OFF
    Publication number: 20210132517
    Abstract: A lithographic apparatus has an object, the object includes: a substrate and optionally a lower layer on the substrate; an upper layer; and an intermediate layer between the upper layer and the substrate, wherein a bond strength between the intermediate layer and the substrate or lower layer is greater than a bond strength between the intermediate layer and the upper layer and the intermediate layer has a Young's Modulus and/or a Poisson ratio within 20% of that of the upper layer.
    Type: Application
    Filed: November 27, 2017
    Publication date: May 6, 2021
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Andrey NIKIPELOV, Vadim Yevgenyevich BANINE, Joost André KLUGKIST, Maxim Aleksandrovich NASALEVICH, Roland Johannes Wilhelmus STAS, WRICKE Sandro