Abstract: Some embodiments of the present disclosure relate to a processing tool. The tool includes a housing enclosing a processing chamber, and an input/output port configured to pass a wafer through the housing into and out of the processing chamber. A back-side macro-inspection system is arranged within the processing chamber and is configured to image a back side of the wafer. A front-side macro-inspection system is arranged within the processing chamber and is configured to image a front side of the wafer according to a first image resolution. A front-side micro-inspection system is arranged within the processing chamber and is configured to image the front side of the wafer according to a second image resolution which is higher than the first image resolution.

Abstract: A mouse pad is provided, including a glass substrate and a surface layer made from a ceramic material and formed on the glass substrate, wherein the ceramic surface layer has many pores with a surface roughness of 1˜20 ?m, such that the ceramic surface layer has a strong resistance to abrasion and deformity. Therefore, the sensitivity of the mouse is maintained and the mouse pad is more durable.