Patents by Inventor Wu-Han Liu
Wu-Han Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11961770Abstract: Some embodiments of the present disclosure relate to a processing tool. The tool includes a housing enclosing a processing chamber, and an input/output port configured to pass a wafer through the housing into and out of the processing chamber. A back-side macro-inspection system is arranged within the processing chamber and is configured to image a back side of the wafer. A front-side macro-inspection system is arranged within the processing chamber and is configured to image a front side of the wafer according to a first image resolution. A front-side micro-inspection system is arranged within the processing chamber and is configured to image the front side of the wafer according to a second image resolution which is higher than the first image resolution.Type: GrantFiled: November 4, 2021Date of Patent: April 16, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chia-Han Lin, Chien-Fa Lee, Hsu-Shui Liu, Jiun-Rong Pai, Sheng-Hsiang Chuang, Surendra Kumar Soni, Shou-Wen Kuo, Wu-An Weng, Gary Tsai, Chien-Ko Liao, Ya Hsun Hsueh, Becky Liao, Ethan Yu, Ming-Chi Tsai, Kuo-Yi Liu
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Patent number: 11643715Abstract: A composite structure with an aluminum-based alloy layer containing boron carbide and a manufacturing method thereof are provided. The composite structure includes a substrate with an open hole in that surface and the aluminum-based alloy layer containing boron carbide. The aluminum-based alloy layer is disposed in the open hole and contains aluminum, boron, carbon, and oxygen, wherein the content of aluminum is between 4 at. % and 55 at. %, the content of boron is between 9 at. % and 32 at. %, the content of carbon is between 13 at. % and 32 at. %, the content of oxygen is between 2 at. % and 38 at. %, and the ratio of the content of boron to carbon is between 0.3 and 2.7.Type: GrantFiled: October 5, 2021Date of Patent: May 9, 2023Assignee: Industrial Technology Research InstituteInventors: Wu-Han Liu, Yi-Liang Liao, Tai-Sheng Chen, Wei-Tien Hsiao, Chang-Chih Hsu
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Patent number: 11624104Abstract: A multicomponent alloy coating is provided. The multicomponent alloy coating includes a hard layer and a plurality of nickel-based particles dispersed in the hard layer. The composition of the multicomponent alloy coating is represented by the following formula (I): AldCoeCrgFehNiiSijCkOm??formula (I), wherein 1<d<2, 0.5<e<0.8, 2<g<3.2, 0.05<h<0.3, 2<i<3, j=1, k?0, m?0, and iron is present in the amount of less than 3 wt % of the composition of the multicomponent alloy coating.Type: GrantFiled: May 24, 2019Date of Patent: April 11, 2023Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Wu-Han Liu, Wei-Tien Hsiao, Chang-Chih Hsu, Mao-Shin Liu, Zhong-Ren Wu, Shih-Hsiang Chou, Chin-An Wang
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Publication number: 20230074335Abstract: A composite structure with an aluminum-based alloy layer containing boron carbide and a manufacturing method thereof are provided. The composite structure includes a substrate with an open hole in that surface and the aluminum-based alloy layer containing boron carbide. The aluminum-based alloy layer is disposed in the open hole and contains aluminum, boron, carbon, and oxygen, wherein the content of aluminum is between 4 at. % and 55 at. %, the content of boron is between 9 at. % and 32 at. %, the content of carbon is between 13 at. % and 32 at. %, the content of oxygen is between 2 at. % and 38 at. %, and the ratio of the content of boron to carbon is between 0.3 and 2.7.Type: ApplicationFiled: October 5, 2021Publication date: March 9, 2023Applicant: Industrial Technology Research InstituteInventors: Wu-Han Liu, Yi-Liang Liao, Tai-Sheng Chen, Wei-Tien Hsiao, Chang-Chih Hsu
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Patent number: 10894288Abstract: A surface-treated ceramic powder includes a plurality of ceramic particles and a surface-treating material. Each of the ceramic particles is at least partially coated by the surface-treating material, wherein the ceramic particles have an average particle diameter ranging from 10 micrometer (?m) to 100 ?m, and the surface-treating material is made of metal, metal oxide or the combination thereof.Type: GrantFiled: December 29, 2016Date of Patent: January 19, 2021Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Tai-Sheng Chen, Ming-Sheng Leu, Hong-Jen Lai, Wu-Han Liu
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Publication number: 20200208242Abstract: A multicomponent alloy coating is provided. The multicomponent alloy coating includes a hard layer and a plurality of nickel-based particles dispersed in the hard layer. The composition of the multicomponent alloy coating is represented by the following formula (I): AldCoeCrgFehNiiSijCkOm ??formula (I), wherein 1<d<2, 0.5<e<0.8, 2<g<3.2, 0.05<h<0.3, 2<i<3, j=1, k?0, m?0, and iron is present in the amount of less than 3 wt % of the composition of the multicomponent alloy coating.Type: ApplicationFiled: May 24, 2019Publication date: July 2, 2020Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Wu-Han LIU, Wei-Tien HSIAO, Chang-Chih HSU, Mao-Shin LIU, Zhong-Ren WU, Shih-Hsiang CHOU, Chin-An WANG
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Patent number: 10428413Abstract: A hydrophobic alloy film and a manufacturing method thereof are provided. The hydrophobic alloy film includes Al, Cu, O, and at least one selected from the group consisting of Fe, Co, Ni, and Cr, or Ti, Zr, O, and at least one selected from the group consisting of Fe, Co, Ni, and Cr. The content of each of Al and Ti is in the range of 40 at. % to 70 at. %. The content of each of Cu and Zr is in the range of 10 at. % to 40 at. %. The total content of at least one selected from the group consisting of Fe, Co, Ni, and Cr is in the range of 10 at. % to 30 at. %. The content of O is in the range of 10 at. % to 30 at. %. The hydrophobic alloy film has a quasicrystal structure and nanoparticles.Type: GrantFiled: December 29, 2015Date of Patent: October 1, 2019Assignee: Industrial Technology Research InstituteInventors: Tai-Sheng Chen, Ming-Sheng Leu, Wu-Han Liu, Jia-Jen Chang
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Publication number: 20190255607Abstract: A hollow sphere structure of metal-containing tungsten carbide (WC-based cermet contains one or two metal elements to form a pseudo binary eutectic) is provided, which includes a porous shell of metal-containing metal carbide surrounding a hollow core. The hollow sphere structure has a diameter of 5 micrometers to 45 micrometers, and the porous shell has a thickness of 0.1 micrometers to 12 micrometers.Type: ApplicationFiled: April 29, 2019Publication date: August 22, 2019Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Wu-Han LIU, Wei-Tien HSIAO, Chang-Chih HSU
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Patent number: 10280499Abstract: A composition and a coating structure applying with the same are provided. The composition includes 3 wt % to less than 15 wt % of Al, 10 wt % to less than 30 wt % of Cr, higher than 0 wt % to 15 wt % of O, higher than 0 wt % to 15 wt % of Y, and the remainder being at least one of Co or Ni.Type: GrantFiled: November 30, 2015Date of Patent: May 7, 2019Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Zhong-Ren Wu, Mao-Shin Liu, Wu-Han Liu, Wei-Tien Hsiao, Ming-Sheng Leu
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Publication number: 20180161870Abstract: A surface-treated ceramic powder includes a plurality of ceramic particles and a surface-treating material. Each of the ceramic particles is at least partially coated by the surface-treating material, wherein the ceramic particles have an average particle diameter ranging from 10 micrometer (?m) to 100 ?m, and the surface-treating material is made of metal, metal oxide or the combination thereof.Type: ApplicationFiled: December 29, 2016Publication date: June 14, 2018Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Tai-Sheng Chen, Ming-Sheng Leu, Hong-Jen Lai, Wu-Han Liu
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Publication number: 20180161868Abstract: A hollow sphere structure of metal-containing tungsten carbide is provided, which includes a porous shell of metal-containing metal carbide surrounding a hollow core. The hollow sphere structure has a diameter of 5 micrometers to 45 micrometers, and the porous shell has a thickness of 0.1 micrometers to 12 micrometers. The metal is cobalt, nickel, or a combination thereof.Type: ApplicationFiled: March 9, 2017Publication date: June 14, 2018Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Wu-Han LIU, Wei-Tien HSIAO, Chang-Chih HSU
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Publication number: 20170175242Abstract: A hydrophobic alloy film and a manufacturing method thereof are provided. The hydrophobic alloy film includes Al, Cu, O, and at least one selected from the group consisting of Fe, Co, Ni, and Cr, or Ti, Zr, O, and at least one selected from the group consisting of Fe, Co, Ni, and Cr. The content of each of Al and Ti is in the range of 40 at. % to 70 at. %. The content of each of Cu and Zr is in the range of 10 at. % to 40 at. %. The total content of at least one selected from the group consisting of Fe, Co, Ni, and Cr is in the range of 10 at. % to 30 at. %. The content of O is in the range of 10 at. % to 30 at. %. The hydrophobic alloy film has a quasicrystal structure and nanoparticles.Type: ApplicationFiled: December 29, 2015Publication date: June 22, 2017Inventors: Tai-Sheng Chen, Ming-Sheng Leu, Wu-Han Liu, Jia-Jen Chang
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Patent number: 9381494Abstract: A photocatalytic film structure is provided. The photocatalytic film includes a plurality of micron particles; a plurality of nano particles; and a plurality of block bodies, wherein the volume of each of the block bodies is greater than that of each of the nano particles, and each of the micron particles, the nano particles and the block bodies contains zinc oxide and a doping metal, and wherein the amount of the doping metal is 1 to 5 wt % of the photocatalytic film, and the plurality of micron particles and micron particles take up 10 to 50% of the volume of the photocatalytic film.Type: GrantFiled: April 9, 2014Date of Patent: July 5, 2016Assignee: Industrial Technology Research InstituteInventors: Wu-Han Liu, Wei-Tien Hsiao, Mao-Shin Liu, Ming-Sheng Leu, Cherng-Yuh Su, Fuh-Sheng Shieu, Chin-Te Lu
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Publication number: 20160186330Abstract: A composition and a coating structure applying with the same are provided. The composition includes 3 wt % to less than 15 wt % of Al, 10 wt % to less than 30 wt % of Cr, higher than 0 wt % to 15 wt % of O, higher than 0 wt % to 15 wt % of Y, and the remainder being at least one of Co or Ni.Type: ApplicationFiled: November 30, 2015Publication date: June 30, 2016Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Zhong-Ren WU, Mao-Shin LIU, Wu-Han LIU, Wei-Tien HSIAO, Ming-Sheng LEU
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Publication number: 20150284833Abstract: A coating layer with well protection and thermal conductivity has a workpiece; and a coating layer with a thickness ranged between 160˜500 micrometer deposited on the workpiece; wherein, the coating layer is formed by the feedstock material, the feedstock material is Al—Cu—Mo—W, Al/B4C, CoCrAlY/Al2O3, Cr3C2—NiCr/SiC—Ni, Cr3C2—NiCr/SiC—Ni treated with Ball mill or Ni—Al—Mo—W. The coating layer is able to avoid wear of the surface of the workpiece, and has well protection and thermal conductivity, to avoid the situation of damage or mechanical property changing occurred due to the temperature of the surface rising caused by the friction.Type: ApplicationFiled: June 22, 2015Publication date: October 8, 2015Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Wei-Tien HSIAO, Mao-Shin LIU, Wu-Han LIU, Ming-Sheng LEU
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Publication number: 20150182950Abstract: A photocatalytic film structure is provided. The photocatalytic film includes a plurality of micron particles; a plurality of nano particles; and a plurality of block bodies, wherein the volume of each of the block bodies is greater than that of each of the nano particles, and each of the micron particles, the nano particles and the block bodies contains zinc oxide and a doping metal, and wherein the amount of the doping metal is 1 to 5 wt % of the photocatalytic film, and the plurality of micron particles and micron particles take up 10 to 50% of the volume of the photocatalytic film.Type: ApplicationFiled: April 9, 2014Publication date: July 2, 2015Applicant: Industrial Technology Research InstituteInventors: Wu-Han Liu, Wei-Tien Hsiao, Mao-Shin Liu, Ming-Sheng Leu, Cherng-Yuh Su, Fuh-Sheng Shieu, Chin-Te Lu
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Patent number: 8740007Abstract: A cooking utensil and a manufacturing method thereof are provided. The cooking utensil includes a cooking body, a first metal-ceramic composite layer having an electromagnetic property and a second metal-ceramic composite layer having a heat conductive property. The cooking body has an external bottom surface. The first metal-ceramic composite layer is disposed on the external bottom surface of the cooking body. The second metal-ceramic composite layer is disposed on the first metal-ceramic composite layer. The cooking utensil is suitable for both an induction cooker and a gas burner.Type: GrantFiled: December 21, 2010Date of Patent: June 3, 2014Assignee: Industrial Technology Research InstituteInventors: Ming-Sheng Leu, Wu-Han Liu, Wei-Tien Hsiao, Chang-Chih Hsu, Mao-Shin Liu, Zhong-Ren Wu
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Publication number: 20130224392Abstract: A method for providing a coating layer with well protection and thermal conductivity, providing a coating layer material, the coating layer material set on a workpiece to form a coating layer with thickness 160˜500 micrometer. The coating layer is able to avoid wear of the surface of the workpiece, and has well protection and thermal conductivity, to avoid the situation of damage or mechanical property changing occurred due to the temperature of the surface rising caused by the friction.Type: ApplicationFiled: May 7, 2012Publication date: August 29, 2013Inventors: Wei-Tien HSIAO, Mao-Shin Liu, Wu-Han Liu, Ming-Sheng Leu
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Publication number: 20120111872Abstract: A cooking utensil and a manufacturing method thereof are provided. The cooking utensil includes a cooking body, a first metal-ceramic composite layer having an electromagnetic property and a second metal-ceramic composite layer having a heat conductive property. The cooking body has an external bottom surface. The first metal-ceramic composite layer is disposed on the external bottom surface of the cooking body. The second metal-ceramic composite layer is disposed on the first metal-ceramic composite layer. The cooking utensil is suitable for both an induction cooker and a gas burner.Type: ApplicationFiled: December 21, 2010Publication date: May 10, 2012Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Ming-Sheng Leu, Wu-Han Liu, Wei-Tien Hsiao, Chang-Chih Hsu, Mao-Shin Liu, Zhong-Ren Wu
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Publication number: 20110100975Abstract: A carrier for heating and keeping warm used for directly carrying food to-be kept warm is provided. The carrier for heating and keeping warm includes a carrier and at least a high melt point-electric heating alloy pattern. The carrier has a first surface and a second surface opposite to the first surface. The food is suitable for being directly placed on the first surface. A material of the second surface is ceramics or glass so that the second surface 114 and the first surface 112 can respectively have a characteristic of ceramic or glass. The high melt point-electric heating alloy pattern is coated on the second surface. A resistance of the high melt point-electric heating alloy pattern is substantially 0.5 ohm to 50 ohm, and a melt point of the high melt point-electric heating alloy pattern is equal to or higher than 1100° C.Type: ApplicationFiled: November 2, 2010Publication date: May 5, 2011Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Wu-Han Liu, Wei-Tien Hsiao, Mao-Shin Liu, Zhong-Ren Wu, Ming-Sheng Leu, Chang-Chih Hsu