Patents by Inventor Wu Liao

Wu Liao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of fabricating shallow trench isolation structures
    Patent number: 6153479
    Abstract: A method of fabricating shallow trench isolation structures. A substrate is provided and a masking layer and an oxide layer are formed respectively on the substrate. The masking layer, the oxide layer and the substrate are defined and an opening is formed within the substrate. A portion of masking layer and the oxide layer are removed and an insulating material is later formed to fill with the opening. The masking layer is removed and the shallow trench isolation structure of this invention is therefore achieved.
    Type: Grant
    Filed: May 7, 1998
    Date of Patent: November 28, 2000
    Assignee: United Microelectronics Corp.
    Inventors: Wei-Wu Liao, Andy Chuang, Chien-Li Kuo