Abstract: Some embodiments of the present disclosure relate to a processing tool. The tool includes a housing enclosing a processing chamber, and an input/output port configured to pass a wafer through the housing into and out of the processing chamber. A back-side macro-inspection system is arranged within the processing chamber and is configured to image a back side of the wafer. A front-side macro-inspection system is arranged within the processing chamber and is configured to image a front side of the wafer according to a first image resolution. A front-side micro-inspection system is arranged within the processing chamber and is configured to image the front side of the wafer according to a second image resolution which is higher than the first image resolution.

Abstract: The biochip apparatus device of the invention is capable of ensuring accuracy of direction and location of the sampling needle thereof regardless of whether a single or a plurality of sampling needles are being disposed. Each sampling needle thereof is provided with sampling circulation of biochemical materials for taking quantitative samples, wherein the biochemical materials, using capillarity in circulation paths as well as an XYZ triaxial servo robot, sample and array biochemical samples onto glass slides or membrane slides quantitatively and successively at a high speed for making protein, DNA or Oligo chips, thereby ensuring the sampling quantity of the biochips.

Abstract: The quantitative collecting and depositing device for very small fluids of the invention, through precise controls of an XYZ triaxial AC servo controller and quantitative depositing valves through a main PC base controller or a program logic controller (PLC), is able to simultaneously control movements of the XYZ triaxial AC servo controller 4 and the open-and-shut of the quantitative depositing valves. Therefore the invention may be applied in non-contact, high-speed and high-accuracy sampling and precise fluid dividing in biochips. In addition, a cleaning device and a drying device provided by the invention are capable of preventing congestions of the pipelines and cross-contaminations thereof, such that cross-contaminations are not incurred in biochips during sampling (such as protein and DNA) and precise fluid dividing (such as protein, DNA and enzymes).