Patents by Inventor Wu Y. Han

Wu Y. Han has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspection of substrates
    Patent number: 10553504
    Abstract: Concepts presented herein relate to approaches for performing substrate inspection. In one aspect, the concepts relate to detecting anomalies or candidate defects on the substrate based on contrast in images obtained of the substrate.
    Type: Grant
    Filed: March 22, 2018
    Date of Patent: February 4, 2020
    Assignee: Rudolph Technologies, Inc.
    Inventors: Gurvinder Singh, Wu Y. Han, John Thornell, Chetan Suresh, Wayne Fitzgerald
  • Semiconductor device inspection of metallic discontinuities
    Patent number: 10466179
    Abstract: Concepts presented herein relate to approaches for performing substrate inspection. In one aspect, the concepts relate to detecting anomalies or candidate defects on the substrate based on contrast in images obtained of the substrate.
    Type: Grant
    Filed: March 22, 2018
    Date of Patent: November 5, 2019
    Assignee: Rudoplh Technologies, Inc.
    Inventors: Gurvinder Singh, Wu Y. Han, John Thornell, Chetan Suresh, Wayne Fitzgerald
  • SEMICONDUCTOR DEVICE INSPECTION OF METALLIC DISCONTINUITIES
    Publication number: 20180275063
    Abstract: Concepts presented herein relate to approaches for performing substrate inspection. In one aspect, the concepts relate to detecting anomalies or candidate defects on the substrate based on contrast in images obtained of the substrate.
    Type: Application
    Filed: March 22, 2018
    Publication date: September 27, 2018
    Inventors: Gurvinder Singh, Wu Y. Han, John Thornell, Chetan Suresh, Wayne Fitzgerald
  • INSPECTION OF SUBSTRATES
    Publication number: 20180277452
    Abstract: Concepts presented herein relate to approaches for performing substrate inspection. In one aspect, the concepts relate to detecting anomalies or candidate defects on the substrate based on contrast in images obtained of the substrate.
    Type: Application
    Filed: March 22, 2018
    Publication date: September 27, 2018
    Inventors: Gurvinder Singh, Wu Y. Han, John Thornell, Chetan Suresh, Wayne Fitzgerald