Abstract: A monolithic fabrication method of parallel-plate electrowetting-on-dielectric (EWOD) chips for digital microfluidics of picoliter droplets is disclosed. Instead of assembling a second substrate to form a top plate, the top plate is generated in situ as a thin-film membrane that forms a monolithic cavity having a gap height on the order of micrometers with excellent accuracy and uniformity. The membrane is embedded with EWOD driving electrodes and confines droplets against the device substrate to perform digital microfluidic operations. Two main attributes of the monolithic architecture that distinguish it from tradition methods are: (i) it enables excellent control of droplet dimensions down to the micrometer scale, and (ii) it does not require the typical alignment and assembly steps of the two plates.

Abstract: A microfluidic device for droplet manipulation includes a substrate, a plurality of electrically addressable thin-film electrodes disposed on the substrate, at least one of the plurality of electrodes comprising a heating element in the form of a patterned electrode. A hydrophilic region is disposed in or above a portion of the heating element. The hydrophilic region may be permanent or electronically actuable. The thin-film electrodes have multi-function capabilities including, for instance, heating, temperature sensing, and/or sample actuation.

Abstract: A monolithic fabrication method of parallel-plate electrowetting-on-dielectric (EWOD) chips for digital microfluidics of picoliter droplets is disclosed. Instead of assembling a second substrate to form a top plate, the top plate is generated in situ as a thin-film membrane that forms a monolithic cavity having a gap height on the order of micrometers with excellent accuracy and uniformity. The membrane is embedded with EWOD driving electrodes and confines droplets against the device substrate to perform digital microfluidic operations. Two main attributes of the monolithic architecture that distinguish it from tradition methods are: (i) it enables excellent control of droplet dimensions down to the micrometer scale, and (ii) it does not require the typical alignment and assembly steps of the two plates.

Abstract: A microfluidic device for droplet manipulation includes a substrate, a plurality of electrically addressable thin-film electrodes disposed on the substrate, at least one of the plurality of electrodes comprising a heating element in the form of a patterned electrode. A hydrophilic region is disposed in or above a portion of the heating element. The hydrophilic region may be permanent or electronically actuable. The thin-film electrodes have multi-function capabilities including, for instance, heating, temperature sensing, and/or sample actuation.