Abstract: Examples are disclosed that relate to pixel-shifting devices for increasing display resolution. An example pixel-shifting device comprises an outer frame, an inner frame coupled to the outer frame via a flexure, a path-shifting optical element mounted to the inner frame, and one or more piezoelectric actuators configured to drive motion of the inner frame.

Abstract: A strain sensor that has an associated temperature compensation circuit. The strain sensor is temperature-compensated as it has a temperature compensation circuit that, when powered, applies an applied voltage across the applied voltage terminals of the strain sensor that has a compensating temperature dependency. That is, the applied voltage has a temperature dependency of one polarity that is opposite a temperature dependency of the strain sensor. Because of this temperature compensation, the signal representing strain has a more stable scale factor between the endured strain and the signal representing the strain. Thus, the accuracy of the strain sensor is improved.

Abstract: Examples are disclosed that relate to scanning mirror systems for display devices. One example provides a scanning mirror system comprising a mirror portion, a flexure arm extending from the mirror portion, and a piezoelectric actuator support portion supporting a piezoelectric actuator comprising a piezoelectric film. The scanning mirror system further comprises a transmission arm extending between the flexure arm and the piezoelectric actuator support portion to transmit motion of the piezoelectric film to the flexure arm, the transmission arm separated at least partially from the piezoelectric actuator support portion by a first gap. The scanning mirror system further comprises an anchor portion separated at least partially from the piezoelectric actuator support portion by a second gap, the anchor portion configured to anchor the scanning mirror system to another structure.

Abstract: A flip chip micromirror assembly comprising a micromirror chip that is flip chip mounted onto the circuit board via a bonding layer. The micromirror chip has a micromirror layer in which a micromirror is formed. The micromirror chip has a flip chip surface facing the electrode surface of the circuit board. The bonding layer includes conductive region(s) that electrically couples corresponding board electrodes with corresponding chip electrodes. However, the bonding layer is not interposed between the electrode surface of the circuit board and the micromirror itself. In other words, the bonding layer spaces the micromirror chip from the circuit board, and provides a gap underneath the micromirror between the micromirror chip and the circuit board. This gap is of sufficient thickness that the micromirror can be actuated with full movement without being mechanically obstructed by the circuit board.

Abstract: A device includes a mirror coupled via a pair of flexible beams supported by a block of semiconductor material that has a cavity about the mirror and beams to allow the mirror to rotate about an axis along the beams. A piezoresistive sensor is coupled to one of the beams to provide information representative of an angle of rotation of the mirror. A light blocking shield covers exposed portions of the block of semiconductor material about the mirror.

Abstract: Examples are disclosed herein relating to reducing strain in a resonant scanning mirror system. One example provides a thin film piezoelectric-actuated resonant scanning mirror system, comprising a body comprising an anchor portion, a scanning mirror portion, a piezoelectric film support portion, a transmission beam extending from the piezoelectric thin film support portion, and a torsion beam extending between the scanning mirror portion and the transmission beam, and a piezoelectric film formed on the piezoelectric film support portion, the piezoelectric film support portion comprising an area of a surface of the body in which a stress on the piezoelectric film does not exceed a yield stress of the piezoelectric film during oscillation of the scanning mirror portion.

Abstract: A microelectromechanical systems (MEMS) scanning device comprising a torsional beam flexure that has a variable width in relation to a rotational axis for a scanning mirror. The geometric properties of the torsional beam vary along the rotational axis to increase a desired mode of mechanical strain at a location where a strain sensor is operating within the MEMS scanning device to generate a feedback signal. The torsional beam flexure mechanically suspends the scanning mirror from a frame structure. During operation of the MEMS scanning device, actuators induce torsional deformation into the torsional beam flexure to cause rotation of the scanning mirror about the rotational axis. The degree or amount of this torsional deformation is directly related to the angular position of the scanning mirror and, therefore, the desired mode of mechanical strain may be this torsional deformation strain component.

Abstract: Examples are disclosed that relate to pixel-shifting devices for increasing display resolution. One example provides a pixel-shifting device comprising an outer frame, an inner frame coupled to the outer frame via a flexure, a path-shifting optical element mounted to the inner frame, and one or more piezoelectric actuators configured to drive motion of the inner frame.

Abstract: A display device includes a light source, a support structure, and a scanning mirror system. The scanning mirror system includes a mirror, a first anchor located at a first lateral side of the scanning mirror system, a second anchor located at a second lateral side of the scanning mirror system, and a flexure. A first portion of the flexure extends from the first anchor toward a first longitudinal end and turns to meet a first end of the mirror. A second portion extends from the second anchor toward a second longitudinal end and turns to meet to a second end of the mirror opposite the first end. An actuator system is configured to actuate the flexure to thereby vary a scan angle of the mirror.

Abstract: A MEMS scanner may include a first flexible arm extending substantially in a forward direction and a base connected to a proximal end of the first flexible arm, the base being thicker than the first flexible arm in a vertical direction. The MEMS scanner may further include a second flexible arm connected to a distal end of the first flexible arm, the second flexible arm extending substantially in a reverse direction. The MEMS scanner may further include a mirror coupled to a distal end of the second flexible arm. In one implementation, the MEMS scanner may be a non-resonant scanner.

Abstract: A MEMS scanner may include a first flexible arm extending substantially in a forward direction and a base connected to a proximal end of the first flexible arm, the base being thicker than the first flexible arm in a vertical direction. The MEMS scanner may further include a second flexible arm connected to a distal end of the first flexible arm, the second flexible arm extending substantially in a reverse direction. The MEMS scanner may further include a mirror coupled to a distal end of the second flexible arm. In one implementation, the MEMS scanner may be a non-resonant scanner.

Abstract: A microelectromechanical systems (MEMS) scanning device comprising a torsional beam flexure that has a variable width in relation to a rotational axis for a scanning mirror. The geometric properties of the torsional beam vary along the rotational axis to increase a desired mode of mechanical strain at a location where a strain sensor is operating within the MEMS scanning device to generate a feedback signal. The torsional beam flexure mechanically suspends the scanning mirror from a frame structure. During operation of the MEMS scanning device, actuators induce torsional deformation into the torsional beam flexure to cause rotation of the scanning mirror about the rotational axis. The degree or amount of this torsional deformation is directly related to the angular position of the scanning mirror and, therefore, the desired mode of mechanical strain may be this torsional deformation strain component.

Abstract: A system that includes a substrate for microelectromechanical system (MEMS) scanning mirror systems is provided. The MEMS scanning mirror system includes a substrate that includes a ceramic body. An actuator frame is mounted on the ceramic body of the substrate. The actuator frame includes at least one moveable member. At least one actuator is operatively connected to the at least one moveable member such that the actuator is configured to move the at least one moveable member. A scanning mirror assembly is mounted to the at least one moveable member such that movement of the at least one moveable member moves the scanning mirror assembly.

Abstract: Examples are disclosed that relate to scanning display systems. One example provides a display device comprising a controller, a light source, and a scanning mirror system. The scanning mirror system comprises a scanning mirror configured to scan light from the light source in at least one direction at a resonant frequency of the scanning mirror, and an electromechanical actuator system coupled with the scanning mirror and being controllable by the controller to adjust the resonant frequency of the scanning mirror.

Abstract: A system that includes a substrate for microelectromechanical system (MEMS) scanning mirror systems is provided. The MEMS scanning mirror system includes a substrate that includes a ceramic body. An actuator frame is mounted on the ceramic body of the substrate. The actuator frame includes at least one moveable member. At least one actuator is operatively connected to the at least one moveable member such that the actuator is configured to move the at least one moveable member. A scanning mirror assembly is mounted to the at least one moveable member such that movement of the at least one moveable member moves the scanning mirror assembly.

Abstract: Examples are disclosed that relate to actuator frames for scanning mirror systems. In one example an actuator frame for a scanning mirror assembly comprises a mounting member comprising a first side and an opposite second side. A first moveable member comprises a first interior side that defines a first gap and a second gap with the first side of the mounting member. A second moveable member comprises a second interior side that defines a third gap and a fourth gap with the second side of the mounting member. A first hinge connects a central portion of the mounting member with the first moveable member, and a second hinge connects the central portion of the mounting member with the second moveable member.

Abstract: A MEMS scanner may include a first flexible arm extending substantially in a forward direction and a base connected to a proximal end of the first flexible arm, the base being thicker than the first flexible arm in a vertical direction. The MEMS scanner may further include a second flexible arm connected to a distal end of the first flexible arm, the second flexible arm extending substantially in a reverse direction. The MEMS scanner may further include a mirror coupled to a distal end of the second flexible arm. In one implementation, the MEMS scanner may be a non-resonant scanner.

Abstract: An integrated optical beam steering system is configured in three stages to provide beam steering for image light from an imager (e.g., laser, light emitting diode, or other light source) to downstream elements in a display system such as an exit pupil expander (EPE) in a mixed-reality computing device. The first stage includes a multi-level cascaded array of optical switches that are configurable to spatially route image light over a first dimension of a two-dimensional (2D) field of view (FOV) of the display system. The second waveguiding stage transfers the image light along preformed waveguides to a collimator in the third stage which is configured to collimate the image light along the first dimension of the FOV (e.g., horizontal). The waveguiding and collimating stages may be implemented using lightweight photonic crystal nanostructures.

Abstract: Examples are disclosed that relate to scanning mirror systems for display devices. One example provides a display device comprising a light source, a support structure, and a scanning mirror system comprising a mirror, a first anchor located at a first lateral side of the scanning mirror system, a second anchor located at a second lateral side of the scanning mirror system, and a flexure. The flexure comprises a first portion extending from the first anchor toward a first longitudinal end and turning to meet a first end of the mirror, and a second portion extending from the second anchor toward a second longitudinal end and turning to meet to a second end of the mirror opposite the first end. The scanning mirror system further comprises an actuator system configured to actuate the flexure to thereby vary a scan angle of the mirror.

Abstract: An integrated optical beam steering system is configured in three stages to provide beam steering for image light from an imager (e.g., laser, light emitting diode, or other light source) to downstream elements in a display system such as an exit pupil expander (EPE) in a mixed-reality computing device. The first stage includes a multi-level cascaded array of optical switches that are configurable to spatially route image light over a first dimension of a two-dimensional (2D) field of view (FOV) of the display system. The second waveguiding stage transfers the image light along preformed waveguides to a collimator in the third stage which is configured to collimate the image light along the first dimension of the FOV (e.g., horizontal). The waveguiding and collimating stages may be implemented using lightweight photonic crystal nanostructures.