Patents by Inventor Xavier Pagès

Xavier Pagès has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7691750
    Abstract: A method of self-aligned silicidation involves interruption of the silicidation process prior to complete reaction of the blanket material (e.g., metal) in regions directly overlying patterned and exposed other material (e.g., silicon). Diffusion of excess blanket material from over other regions (e.g., overlying insulators) is thus prevented. Control and uniformity are insured by use of conductive rapid thermal annealing in hot wall reactors, with massive heated plates closely spaced from the substrate surfaces. Interruption is particularly facilitated by forced cooling, preferably also by conductive thermal exchange with closely spaced, massive plates.
    Type: Grant
    Filed: November 9, 2006
    Date of Patent: April 6, 2010
    Assignee: ASM International N.V.
    Inventors: Ernest H. A. Granneman, Vladimir Kuznetsov, Xavier Pages, Cornelius A. van der Jeugd
  • Publication number: 20090299053
    Abstract: The invention relates to a product resulting from the grafting, by esterification or transesterification, onto at least a part of the hydroxyl functions of an ulvan-type polysaccharide in the form of an acid or in the form of a mono- or divalent salt, in particular a sodium salt, of fatty chains or of mixtures of fatty chains containing 8 to 28 carbon atoms, said fatty chains being saturated or unsaturated, and linear or branched. It also relates to the method for preparing this product. It also relates to uses of this product, in particular as surfactant.
    Type: Application
    Filed: October 18, 2006
    Publication date: December 3, 2009
    Applicants: JAVENECH, ENVIRONMENTAL PROTECTION ENGINEERING S.A., ICP INSTITUTE FOR CELLULAR PHARMACOLOGY
    Inventors: Michèle Ranson, Gilles Guitierrez, Dominique Brault, Herve Le Deit, Xavier Pages-Xatart-Pares, Carine Alfos
  • Patent number: 7410355
    Abstract: A substrate undergoes a semiconductor fabrication process at different temperatures in a reactor without changing the temperature of the reactor. The substrate is held suspended by flowing gas between two heated surfaces of the reactor. Moving the two heated surfaces in close proximity with the substrate for a particular time duration heats the substrate to a desired temperature. The desired temperature is then maintained by distancing the heated surfaces from the substrate and holding the heated surface at the increased distance to minimize further substrate heating.
    Type: Grant
    Filed: February 17, 2006
    Date of Patent: August 12, 2008
    Assignee: ASM International N.V.
    Inventors: Ernst H. A. Granneman, Vladimir I. Kuznetsov, Xavier Pages, Pascal G. Vermont, Herbert Terhorst, Gert-Jan Snijders
  • Publication number: 20070059932
    Abstract: A method of self-aligned silicidation involves interruption of the silicidation process prior to complete reaction of the blanket material (e.g., metal) in regions directly overlying patterned and exposed other material (e.g., silicon). Diffusion of excess blanket material from over other regions (e.g., overlying insulators) is thus prevented. Control and uniformity are insured by use of conductive rapid thermal annealing in hot wall reactors, with massive heated plates closely spaced from the substrate surfaces. Interruption is particularly facilitated by forced cooling, preferably also by conductive thermal exchange with closely spaced, massive plates.
    Type: Application
    Filed: November 9, 2006
    Publication date: March 15, 2007
    Inventors: Ernst Granneman, Vladimir Kuznetsov, Xavier Pages, Cornelius van der Jeugd
  • Patent number: 7153772
    Abstract: A method of self-aligned silicidation involves interruption of the silicidation process prior to complete reaction of the blanket material (e.g., metal) in regions directly overlying patterned and exposed other material (e.g., silicon). Diffusion of excess blanket material from over other regions (e.g., overlying insulators) is thus prevented. Control and uniformity are insured by use of conductive rapid thermal annealing in hot wall reactors, with massive heated plates closely spaced from the substrate surfaces. Interruption is particularly facilitated by forced cooling, preferably also by conductive thermal exchange with closely spaced, massive plates.
    Type: Grant
    Filed: June 10, 2004
    Date of Patent: December 26, 2006
    Assignee: ASM International N.V.
    Inventors: Ernst H. A. Granneman, Vladimir Kuznetsov, Xavier Pages, Cornelius A. van der Jeugd
  • Publication number: 20060141808
    Abstract: A substrate undergoes a semiconductor fabrication process at different temperatures in a reactor without changing the temperature of the reactor. The substrate is held suspended by flowing gas between two heated surfaces of the reactor. Moving the two heated surfaces in close proximity with the substrate for a particular time duration heats the substrate to a desired temperature. The desired temperature is then maintained by distancing the heated surfaces from the substrate and holding the heated surface at the increased distance to minimize further substrate heating.
    Type: Application
    Filed: February 17, 2006
    Publication date: June 29, 2006
    Inventors: Ernst Granneman, Vladimir Kuznetsov, Xavier Pages, Pascal Vermont, Herbert Terhorst, Gert-Jan Snijders
  • Patent number: 7022627
    Abstract: A substrate undergoes a semiconductor fabrication process at different temperatures in a reactor without changing the temperature of the reactor. The substrate is held suspended by flowing gas between two heated surfaces of the reactor. Moving the two heated surfaces in close proximity with the substrate for a particular time duration heats the substrate to a desired temperature. The desired temperature is then maintained by distancing the heated surfaces from the substrate and holding the heated surface at the increased distance to minimize further substrate heating.
    Type: Grant
    Filed: October 31, 2003
    Date of Patent: April 4, 2006
    Assignee: ASM International N.V.
    Inventors: Ernst H. A. Granneman, Vladimir I. Kuznetsov, Xavier Pagès, Pascal G. Vermont
  • Publication number: 20050095873
    Abstract: A substrate undergoes a semiconductor fabrication process at different temperatures in a reactor without changing the temperature of the reactor. The substrate is held suspended by flowing gas between two heated surfaces of the reactor. Moving the two heated surfaces in close proximity with the substrate for a particular time duration heats the substrate to a desired temperature. The desired temperature is then maintained by distancing the heated surfaces from the substrate and holding the heated surface at the increased distance to minimize further substrate heating.
    Type: Application
    Filed: October 31, 2003
    Publication date: May 5, 2005
    Inventors: Ernst Granneman, Vladimir Kuznetsov, Xavier Pages, Pascal Vermont
  • Publication number: 20050017310
    Abstract: A method of self-aligned silicidation involves interruption of the silicidation process prior to complete reaction of the blanket material (e.g., metal) in regions directly overlying patterned and exposed other material (e.g., silicon). Diffusion of excess blanket material from over other regions (e.g., overlying insulators) is thus prevented. Control and uniformity are insured by use of conductive rapid thermal annealing in hot wall reactors, with massive heated plates closely spaced from the substrate surfaces. Interruption is particularly facilitated by forced cooling, preferably also by conductive thermal exchange with closely spaced, massive plates.
    Type: Application
    Filed: June 10, 2004
    Publication date: January 27, 2005
    Inventors: Ernst Granneman, Vladimir Kuznetsov, Xavier Pages, Cornelius van der Jeugd
  • Patent number: 6131858
    Abstract: A compact single-propellant unitary propulsion system for placing a satellite into an orbit and subsequently correcting the orbit so that the satellite is stabilized on three axes comprises a liquid propellant tank secured to a satellite platform and having a reinforced bottom wall with an outlet and filter element, a distribution block welded to the reinforced bottom wall, at least one filling/emptying value mounted on the distribution block, and a set of at least two thrusters mounted on the distribution block and fed directly from the distribution block without additional pipework. The set of at least two thrusters point substantially along the axis of the tank, which is aligned with the axis of the satellite. The propulsion system may be fully assembled before it is integrated with the satellite.
    Type: Grant
    Filed: July 23, 1998
    Date of Patent: October 17, 2000
    Assignee: Societe Nationale d'Etude et de Construction deMoteurs d'Aviation
    Inventors: Nathalie Dethienne, Xavier Pages
  • Patent number: 5679393
    Abstract: A process for preparation of a fat fraction of vegetable origin enriched with unsaponifiable materials. A fat of vegetable origin is treated with a hot polar solvent of the ketone type to obtain a first fraction insoluble in the hot ketone solvent which is rich in unsaponifiable materials, and a second fraction which is a solution of hot soluble materials. The first fraction is then separated from the second fraction, and the second fraction is subjected to a crystallization in a crystallization solvent at a temperature below 0.degree. C., followed by filtering to obtain a filtrate. The crystallization solvent is then evaporated from the filtrate to obtain a further fraction rich and unsaponifiable materials.
    Type: Grant
    Filed: October 25, 1995
    Date of Patent: October 21, 1997
    Assignee: Deslog
    Inventors: Joel Laur, Anne Castera, Fran.cedilla.ois Mordret, Xavier Pages-Xatart-Pares, Jean-Michel Guichard