Abstract: The present disclosure provides a double-vacuum four-cavity hermeticity detecting method and machine for a square housing battery. The method may include a loading device, four cavity devices, four cavity cover devices, four load transferring devices, two vacuum devices, a detecting device, and a discharging device, the cavity devices and the cavity cover devices may make a sealed cavity, and each of the vacuum devices predetermine two sealed cavities. While operating at the same time, four sealed cavities may be loaded for 8 s, vacuumed for 10 s and detected for a hermeticity for 5 s in a total of 15 s, and discharged for 8 s, a cycle time may be shortened to 8 s and a production period may be shortened to 32 s, and a productivity of a hermeticity detection may be improved to 15 PPM according to two batteries per cavity.

Abstract: A method of removing a photoresist layer is provided. An ion implantation process has been performed on the photoresist layer to transform a surface of the photoresist layer to a crust and a soft photoresist layer remains within the crust. The method includes performing a first removing step to remove the crust, such that the soft photoresist layer is exposed. Thereafter, a second removing step is performed to remove the soft photoresist layer. The first and the second removing steps are performed in difference chambers, and a temperature for performing the first removing step is lower than that for performing the second removing step and lower than a gasification temperature of a solvent in the soft photoresist layer.