Patents by Inventor Xia feng Yang

Xia feng Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fluidic MEMS device
    Patent number: 8039205
    Abstract: A method includes depositing a sacrificial material on a substrate, and depositing a polymer layer on the substrate and the sacrificial material. The method further includes removing the sacrificial material to at least partially define boundaries of at least one fluidic channel of a fluidic micro electromechanical system (MEM) device, the at least one fluidic channel is at least partially defined by a portion of the polymer layer and a portion of the substrate.
    Type: Grant
    Filed: November 30, 2007
    Date of Patent: October 18, 2011
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Chien-Hua Chen, Xia feng Yang
  • Fluidic MEMS Device
    Publication number: 20080128390
    Abstract: A method includes depositing a sacrificial material on a substrate, and depositing a polymer layer on the substrate and the sacrificial material. The method further includes removing the sacrificial material to at least partially define boundaries of at least one fluidic channel of a fluidic micro electromechanical system (MEM) device, the at least one fluidic channel is at least partially defined by a portion of the polymer layer and a portion of the substrate.
    Type: Application
    Filed: November 30, 2007
    Publication date: June 5, 2008
    Inventors: Chien-Hua Chen, Xia feng Yang
  • Fluidic MEMS device
    Patent number: 7309467
    Abstract: A fluidic micro electro-mechanical system (MEMS) device is described. In one aspect, at least one at least partially covered fluidic channel is formed between a polymer layer and a polymer substrate as the polymer layer is deposited on the substrate. The partially covered fluidic channel is fabricated as a unitary polymer layer structure. In one implementation, a strong exposure process is applied to the polymer layer to create a deep cross-linked polymer region. A weak exposure process is applied to the polymer layer to create a shallow cross-linked polymer region.
    Type: Grant
    Filed: June 24, 2003
    Date of Patent: December 18, 2007
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Chien-Hua Chen, Xia feng Yang
  • Fluidic MEMS device
    Publication number: 20040265182
    Abstract: A fluidic micro electro-mechanical system (MEMS) device is described. In one aspect, at least one at least partially covered fluidic channel is formed between a polymer layer and a polymer substrate as the polymer layer is deposited on the substrate. The partially covered fluidic channel is fabricated as a unitary polymer layer structure. In one implementation, a strong exposure process is applied to the polymer layer to create a deep cross-linked polymer region. A weak exposure process is applied to the polymer layer to create a shallow cross-linked polymer region.
    Type: Application
    Filed: June 24, 2003
    Publication date: December 30, 2004
    Inventors: Chien-Hua Chen, Xia feng Yang