Abstract: The present disclosure provides an electrode fixing assembly and a dry etching device. The electrode fixing assembly includes a first fixing element and a second fixing element, wherein a hardness of a material of the first fixing element is greater than a hardness of a material of the second fixing element. The electrode fixing assembly is configured to be arranged in the dry etching device to fix an upper electrode on a device body, a generation of particles is reduced or eliminated, and then problems such as poor etching or the like caused by a substrate to be etched covered by the particles are avoided.

Abstract: The invention relates to the technical field of filtering equipment, and discloses a dust removal filter cartridge. The dust removal filter cartridge includes a filter material and a filter net arranged in the filter material. A top cover is arranged on a top end of the filter material, and an air outlet is provided in the top cover. A bottom end of the filter material is sealed with a bottom cover. An inner side of the filter material is provided with binding tapes which are adhesively fixed on the filter material. An outer surface of the filter material is an effective filtering surface for dust removal, and the binding tapes are arranged on the inner side of the filter material. During the dust removal process, filtering area of an outer surface of a filter paper increases, and the filtering effect is good.

Abstract: The invention relates to the technical field of filtering equipment, and discloses a dust removal filter cartridge. The dust removal filter cartridge includes a filter material and a filter net arranged in the filter material. A top cover is arranged on a top end of the filter material, and an air outlet is provided in the top cover. A bottom end of the filter material is sealed with a bottom cover. An inner side of the filter material is provided with binding tapes which are adhesively fixed on the filter material. An outer surface of the filter material is an effective filtering surface for dust removal, and the binding tapes are arranged on the inner side of the filter material. During the dust removal process, filtering area of an outer surface of a filter paper increases, and the filtering effect is good.