Patents by Inventor Xiang J. Ning

Xiang J. Ning has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Isotropic etch to form MIM capacitor top plates
    Publication number: 20020123008
    Abstract: A method of fabricating a metal-insulator-metal capacitor (MIMcap) (230), including forming a bottom capacitor plate (210), and depositing a capacitor dielectric (212) over the bottom plate (210). A conductive layer (213) is deposited over the capacitor dielectric (212). A photoresist (216) is deposited over the conductive layer (213). The conductive layer (213) is exposed to an isotropic etchant (224) to form a top capacitor plate (214). Portions (226) of the conductive layer (213) are undercut from beneath the photoresist (216) when forming the top plate (214).
    Type: Application
    Filed: December 21, 2000
    Publication date: September 5, 2002
    Inventor: Xiang J. Ning