Patents by Inventor Xiangfeng Chu

Xiangfeng Chu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ELECTROLYTE FORMULATION FOR ELECTROCHEMICAL MECHANICAL PLANARIZATION
    Publication number: 20080142375
    Abstract: Compositions and methods suitable for the electrochemical mechanical planarization of a conductive material layer on a semiconductor workpiece. Compositions contain a phosphonic acid based electrolyte, a corrosion inhibitor, a chelating agent, a pH adjusting agent, and a solvent as the remainder.
    Type: Application
    Filed: September 28, 2007
    Publication date: June 19, 2008
    Inventors: Francois Doniat, Matthew L. Fisher, Alan D. Zdunek, Alexandro A. Barajas, Ian Suni, Xiangfeng Chu, Abhinav Tripathi, Yuzhuo Li