Abstract: The present application discloses a method for manufacturing semiconductor devices having gate dielectric layers at different thickness. The gate dielectric layers having other than the minimum thickness are respectively formed by the following steps: step 1: forming a first mask layer; step 2: etching the first mask layer to form a first opening; step 3: etching a semiconductor substrate at the bottom of the first opening to form a second groove; step 4: filling the second groove and the first opening with the second material layer; step 5: etching back the second material layer to form the gate dielectric layer, such that the second material layer is flush with the top surface of the semiconductor substrate; and step 6: removing the first mask layer.

Abstract: The present application discloses a method for manufacturing semiconductor devices having gate dielectric layers at different thickness. The gate dielectric layers having other than the minimum thickness are respectively formed by the following steps: step 1: forming a first mask layer; step 2: etching the first mask layer to form a first opening; step 3: etching a semiconductor substrate at the bottom of the first opening to form a second groove; step 4: filling the second groove and the first opening with the second material layer; step 5: etching back the second material layer to form the gate dielectric layer, such that the second material layer is flush with the top surface of the semiconductor substrate; and step 6: removing the first mask layer.

Abstract: The invention discloses a treatment process for a semiconductor, comprising providing a substrate, the substrate comprises silicon material; defining a trench region; removing the trench region using a plasma etching process and exposing a trench surface, the trench surface comprising surface defects; forming an oxidation layer overlaying the trench surface; removing the oxidation layer and at least a portion of the surface defects; expositing a treated trench surface, the treated trench surface being substantially free from surface defects; and forming a layer of silicon germanium material overlaying the treated trench surface. The invention further provides a semiconductor processing technique used to eliminate or reduce dislocation defect on the semiconductor device and improve device performance. In the treatment process, a substrate is subjected to at least one oxidation-deoxidation processes, where an oxidation layer is formed and then removed.

Abstract: A process is used to form a protective layer to cover a divot between two regions of a semiconductor material. During etching processes, the protective layer protects the divot to be etched away and reduces material loss of a Silicon (Si)-shallow trench isolation (STI) substrate. A selective coverage is provided to protect the height of the Si-STI substrate and an Si-STI interface. A desirable geometry can be obtained for forming a silicon germanium (SiGe)layer with uniform thickness near the divot.

Abstract: A process is used to form a protective layer to cover a divot between two regions of a semiconductor material. During etching processes, the protective layer protects the divot to be etched away and reduces material loss of a Silicon (Si)-shallow trench isolation (STI) substrate. A selective coverage is provided to protect the height of the Si-STI substrate and an Si-STI interface. A desirable geometry can be obtained for forming a silicon germanium (SiGe)layer with uniform thickness near the divot.

Abstract: The invention discloses a treatment process for a semiconductor, comprising providing a substrate, the substrate comprises silicon material; defining a trench region; removing the trench region using a plasma etching process and exposing a trench surface, the trench surface comprising surface defects; forming an oxidation layer overlaying the trench surface; removing the oxidation layer and at least a portion of the surface defects; expositing a treated trench surface, the treated trench surface being substantially free from surface defects; and forming a layer of silicon germanium material overlaying the treated trench surface. The invention further provides a semiconductor processing technique used to eliminate or reduce dislocation defect on the semiconductor device and improve device performance. In the treatment process, a substrate is subjected to at least one oxidation-deoxidation processes, where an oxidation layer is formed and then removed.