Patents by Inventor Xiangyu Guo

Xiangyu Guo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240125757
    Abstract: A device for detecting soil nutrients on site, including an extracting grid, an on-site real-time detection assembly and a transfer assembly for transferring a soil extract from the extracting grid to the on-site real-time detection assembly. A soil nutrient detection method using the device and a microfluidic chip are also provided. The microfluidic chip includes a cover plate and a base plate. The base plate includes a soil extract feeding groove, a quantitative feeding groove, a reagent storage groove, and a serpentine groove.
    Type: Application
    Filed: December 26, 2023
    Publication date: April 18, 2024
    Inventors: Rujing WANG, Yongjia CHANG, Xiangyu CHEN, Qinwen LU, Jiangning CHEN, Qiao CAO, Yang LIU, Xiaoyu ZHANG, Jiahao XIAO, Hongyan GUO, Dapeng WANG
  • Publication number: 20240112920
    Abstract: Cyclic etch methods comprise the steps of: i) exposing a SiN layer covering a structure on a substrate in a reaction chamber to a plasma of hydrofluorocarbon (HFC) to form a polymer layer deposited on the SiN layer that modifies the surface of the SiN layer, the HFC having a formula CxHyFz where x=2-5, y>z, the HFC being a saturated or unsaturated, linear or cyclic HFC; ii) exposing the polymer layer deposited on the SiN layer to a plasma of an inert gas, the plasma of the inert gas removing the polymer layer deposited on the SiN layer and the modified surface of the SiN layer on an etch front; and iii) repeating the steps of i) and ii) until the SiN layer on the etch front is selectively removed, thereby forming a substantially vertically straight SiN spacer comprising the SiN layer on the sidewall of the structure.
    Type: Application
    Filed: October 25, 2023
    Publication date: April 4, 2024
    Applicant: AMERICAN AIR LIQUIDE, INC.
    Inventors: Xiangyu GUO, James ROYER, Venkateswara R. PALLEM, Nathan STAFFORD
  • Patent number: 11837474
    Abstract: Cyclic etch methods comprise the steps of: i) exposing a SiN layer covering a structure on a substrate in a reaction chamber to a plasma of hydrofluorocarbon (HFC) to form a polymer layer deposited on the SiN layer that modifies the surface of the SiN layer, the HFC having a formula CxHyFz where x=2-5, y>z, the HFC being a saturated or unsaturated, linear or cyclic HFC; ii) exposing the polymer layer deposited on the SiN layer to a plasma of an inert gas, the plasma of the inert gas removing the polymer layer deposited on the SiN layer and the modified surface of the SiN layer on an etch front; and iii) repeating the steps of i) and ii) until the SiN layer on the etch front is selectively removed, thereby forming a substantially vertically straight SiN spacer comprising the SiN layer on the sidewall of the structure.
    Type: Grant
    Filed: September 15, 2022
    Date of Patent: December 5, 2023
    Assignee: American Air Liquide, Inc.
    Inventors: Xiangyu Guo, James Royer, Venkateswara R. Pallem, Nathan Stafford
  • Publication number: 20230253212
    Abstract: This disclosure describes an improved etch selectivity of a-C mask during HAR etch processes by using a cyclic etch process. The process has two principle steps: 1) A partial etch using a polymerizing etching recipe with lower O2 and extra polymer generation where a-C mask selectivity to dielectric (e.g. for SiO2 or ONON layers) is high; and 2) A polymer cleaning step using Kr sputter, Xe sputter, NF3, SF6, IF7, IF5, CF4, or other F based etching process, with or without bias, to etch the polymer. The polymer cleaning step may include addition of O containing molecules such as O2, CO, CO2, NO, NO2, N2O, SO2, and/or COS. These steps are repeated between a partial etch process (polymer creating) and polymer cleaning step (cycle etching).
    Type: Application
    Filed: February 8, 2022
    Publication date: August 10, 2023
    Inventors: Xiangyu GUO, Nathan STAFFORD
  • Publication number: 20230193460
    Abstract: A method for depositing an iodine-containing film on a substrate material comprises: exposing the substrate material to a vapor of a film-forming composition comprising an iodine-containing precursor having a formula of CaHxIyFz, wherein a=1-10, x?0, y?1, z?0, x+y+z=a, 2a or 2a+2; provided that when a=1, x=2 and z=0, y is not equal to 2, and depositing the iodine-containing film formed by the iodine-containing precursor on the substrate material through a vapor deposition method. The method further comprises exposing the substrate material to a vapor of a co-reactant nitrogen-containing molecule having a general formula CxHyFzNH, where x=1-6, y=0-13, z=0-13, and a=1-2 or CxHyFzN—R1, where x=1-6, y=0-13, z=0-13, and R1 is a C1-C5 hydrocarbon.
    Type: Application
    Filed: December 17, 2021
    Publication date: June 22, 2023
    Inventors: Phong NGUYEN, Fabrizio MARCHEGIANI, Nathan STAFFORD, Xiangyu GUO
  • Patent number: 11602526
    Abstract: Disclosed are pyrazole compounds, as well as pharmaceutical compositions and methods of use thereof. One embodiment is a compound having the structure and pharmaceutically acceptable salts and N-oxides thereof, wherein X1, X2, Z1, Z2, the ring system denoted by “a”, R1, A1A, L1B, A1B, L1A, L2, Q, L3, R3, A4A, L4B, A4B, L4A, R4, L5, and R5 are as described herein. In certain embodiments, compounds disclosed herein disrupt the eIF4E/eiF4G interaction, and can be used to treat hyperproliferative disorder, a neurological disease or disorder, or autism.
    Type: Grant
    Filed: January 21, 2020
    Date of Patent: March 14, 2023
    Assignee: Bantam Pharmaceutical, LLC
    Inventors: M. Arshad Siddiqui, Stephane Ciblat, Martin Dery, Lea Constantineau-Forget, Chantal Grand-Maitre, Xiangyu Guo, Sanjay Srivastava, Gerald W. Shipps, Alan B. Cooper, Nicolas Bruneau-Latour, Vu Linh Ly
  • Publication number: 20230026743
    Abstract: Cyclic etch methods comprise the steps of: i) exposing a SiN layer covering a structure on a substrate in a reaction chamber to a plasma of hydrofluorocarbon (HFC) to form a polymer layer deposited on the SiN layer that modifies the surface of the SiN layer, the HFC having a formula CxHyFz where x=2-5, y>z, the HFC being a saturated or unsaturated, linear or cyclic HFC; ii) exposing the polymer layer deposited on the SiN layer to a plasma of an inert gas, the plasma of the inert gas removing the polymer layer deposited on the SiN layer and the modified surface of the SiN layer on an etch front; and iii) repeating the steps of i) and ii) until the SiN layer on the etch front is selectively removed, thereby forming a substantially vertically straight SiN spacer comprising the SiN layer on the sidewall of the structure.
    Type: Application
    Filed: September 15, 2022
    Publication date: January 26, 2023
    Inventors: Xiangyu GUO, James Royer, Venkateswara R. Pallem, Nathan Stafford
  • Publication number: 20230015987
    Abstract: The present invention discloses a method for rapid on-site detection of fentanyl analogs using a miniature mass spectrometer, comprising the following steps: (1) selecting a spotting plate; (2) loading a sample: depositing the sample and 3-nitrobenzonitrile solution in acetonitrile on the spotting plate to form a crystalline mixture; (3) carrying out analysis and detection: setting the parameters of the miniature mass spectrometer, placing the crystalline mixture on the spotting plate in close proximity to the inlet of the miniature mass spectrometer, and facilitating the ionization of the crystalline mixture for the analysis and detection of fentanyl analogs. The method for rapid on-site detection of fentanyl analogs using a miniature mass spectrometer provided by the present invention requires no extraction solvent, no voltage, no laser, no gas, and the method is simple, rapid, and suitable for rapid on-site detection of fentanyl analogs.
    Type: Application
    Filed: September 9, 2022
    Publication date: January 19, 2023
    Inventors: Qiang Ma, Xiangyu GUO, Hua BAI, Wentao LI
  • Patent number: 11469110
    Abstract: Cyclic etch methods comprise the steps of: i) exposing a SiN layer covering a structure on a substrate in a reaction chamber to a plasma of hydrofluorocarbon (HFC) to form a polymer layer deposited on the SiN layer that modifies the surface of the SiN layer, the HFC having a formula CxHyFz where x=2-5, y>z, the HFC being a saturated or unsaturated, linear or cyclic HFC; ii) exposing the polymer layer deposited on the SiN layer to a plasma of an inert gas, the plasma of the inert gas removing the polymer layer deposited on the SiN layer and the modified surface of the SiN layer on an etch front; and iii) repeating the steps of i) and ii) until the SiN layer on the etch front is selectively removed, thereby forming a substantially vertically straight SiN spacer comprising the SiN layer on the sidewall of the structure.
    Type: Grant
    Filed: March 17, 2020
    Date of Patent: October 11, 2022
    Assignee: American Air Liquide, Inc.
    Inventors: Xiangyu Guo, James Royer, Venkateswara R. Pallem, Nathan Stafford
  • Publication number: 20220223431
    Abstract: Disclosed are methods for forming a high aspect ratio (HAR) structure during a HAR etch process in a substrate in a reaction chamber, the method comprising: sequentially or simultaneously exposing the substrate to a vapor of an etchant including a hydrofluorocarbon or fluorocarbon compound and an additive compound, the substrate having a film disposed thereon and a pattered mask layer disposed on the film; activating a plasma to produce an activated hydrofluorocarbon or fluorocarbon compound and an activated additive compound; and allowing an etching reaction to proceed between the film uncovered by the patterned mask layer and the activated hydrofluorocarbon or fluorocarbon compound and the activated additive compound to selectively etch the film from the patterned mask layer, thereby forming the HAR patterned structure.
    Type: Application
    Filed: December 28, 2020
    Publication date: July 14, 2022
    Inventors: Xiangyu GUO, Kayla Diemoz, Nathan Stafford
  • Publication number: 20200261424
    Abstract: Disclosed are pyrazole compounds, as well as pharmaceutical compositions and methods of use thereof. One embodiment is a compound having the structure and pharmaceutically acceptable salts and N-oxides thereof, wherein X1, X2, Z1, Z2, the ring system denoted by “a”, R1, A1A, L1B, A1B, L1A, L2, Q, L3, R3, A4A, L4B, A4B, L4A, R4, L5, and R5 are as described herein. In certain embodiments, compounds disclosed herein disrupt the eIF4E/eiF4G interaction, and can be used to treat hyperproliferative disorder, a neurological disease or disorder, or autism.
    Type: Application
    Filed: January 21, 2020
    Publication date: August 20, 2020
    Inventors: M. Arshad Siddiqui, Stephane Ciblat, Martin Dery, Lea Constantineau-Forget, Chantal Grand-Maitre, Xiangyu Guo, Sanjay Srivastava, Gerald W. Shipps, Alan B. Cooper, Nicolas Bruneau-Latour, Vu Linh Ly
  • Publication number: 20200251346
    Abstract: Cyclic etch methods comprise the steps of: i) exposing a SiN layer covering a structure on a substrate in a reaction chamber to a plasma of hydrofluorocarbon (HFC) to form a polymer layer deposited on the SiN layer that modifies the surface of the SiN layer, the HFC having a formula CxHyFz where x=2-5, y>z, the HFC being a saturated or unsaturated, linear or cyclic HFC; ii) exposing the polymer layer deposited on the SiN layer to a plasma of an inert gas, the plasma of the inert gas removing the polymer layer deposited on the SiN layer and the modified surface of the SiN layer on an etch front; and iii) repeating the steps of i) and ii) until the SiN layer on the etch front is selectively removed, thereby forming a substantially vertically straight SiN spacer comprising the SiN layer on the sidewall of the structure.
    Type: Application
    Filed: March 17, 2020
    Publication date: August 6, 2020
    Inventors: Xiangyu GUO, James ROYER, Venkateswara R. PALLEM, Nathan STAFFORD
  • Patent number: 10629451
    Abstract: Cyclic etch methods comprise the steps of: i) exposing a SiN layer covering a structure on a substrate in a reaction chamber to a plasma of hydrofluorocarbon (HFC) to form a polymer layer deposited on the SiN layer that modifies the surface of the SiN layer, the HFC having a formula CxHyFz where x=2-5, y>z, the HFC being a saturated or unsaturated, linear or cyclic HFC; ii) exposing the polymer layer deposited on the SiN layer to a plasma of an inert gas, the plasma of the inert gas removing the polymer layer deposited on the SiN layer and the modified surface of the SiN layer on an etch front; and iii) repeating the steps of i) and ii) until the SiN layer on the etch front is selectively removed, thereby forming a substantially vertically straight SiN spacer comprising the SiN layer on the sidewall of the structure.
    Type: Grant
    Filed: February 1, 2019
    Date of Patent: April 21, 2020
    Assignee: American Air Liquide, Inc.
    Inventors: Xiangyu Guo, James Royer, Venkateswara R. Pallem, Nathan Stafford
  • Publication number: 20200069656
    Abstract: Disclosed are methods of treating hyperproliferative disorders such as cancer, methods of arresting the cell cycle in cancer cells, methods of inhibiting glutathione synthesis in cancer cells, and associated compounds for use and uses in medicaments. In certain embodiments, the methods, uses and compounds are provided with reference to compounds of the structural formula (I), in which X1, X2, Z1, Z2, the ring system denoted by “a”, R1, L1, L2, Q, L3, R3, L4, R4, L5, and R5 are as described herein. In certain embodiments, compounds disclosed herein are especially active against cancers having a mutant KRAS gene.
    Type: Application
    Filed: November 29, 2017
    Publication date: March 5, 2020
    Inventors: Arshad M. Siddiqui, Stephane Ciblat, Lea Constantineau-Forget, Chantal Grand-Maitre, Xiangyu Guo, Jr., Sanjay Srivastava, Gerald W. Shipps, Alan B. Cooper, Vibha Oza, Matthew W. Kostura, Michael Luther, Jedd Levine
  • Patent number: 10537558
    Abstract: Disclosed are pyrazole compounds, as well as pharmaceutical compositions and methods of use thereof. One embodiment is a compound having the structure (I) and pharmaceutically acceptable salts and/V-oxides thereof, wherein X1, X2, Z1, Z2, the ring system denoted by “a”, R1, A1A, L1B, A1B, L1A, L2, Q, L3, R3, A4A, L4B, A4B, L4A, R4, L5, and R5 are as described herein. In certain embodiments, compounds disclosed herein disrupt the eIF4E/eiF4G interaction, and can be used to treat hyperproliferative disorder, a neurological disease or disorder, or autism.
    Type: Grant
    Filed: June 1, 2016
    Date of Patent: January 21, 2020
    Assignee: Bantam Pharmaceutical, LLC
    Inventors: M. Arshad Siddiqui, Stephane Ciblat, Martin Dery, Lea Constantineau-Forget, Chantal Grand-Maitre, Xiangyu Guo, Sanjay Srivastava, Gerald W. Shipps, Alan B. Cooper, Nicolas Bruneau-Latour, Vu Linh Ly
  • Publication number: 20180311218
    Abstract: Disclosed are pyrazole compounds, as well as pharmaceutical compositions and methods of use thereof. One embodiment is a compound having the structure (I) and pharmaceutically acceptable salts and/V-oxides thereof, wherein X1, X2, Z1, Z2, the ring system denoted by “a”, R1, A1A, L1B, A1B, L1A, L2, Q, L3, R3, A4A, L4B, A4B, L4A, R4, L5, and R5 are as described herein. In certain embodiments, compounds disclosed herein disrupt the elF4E/eiF4G interaction, and can be used to treat hyperproliferative disorder, a neurological disease or disorder, or autism.
    Type: Application
    Filed: June 1, 2016
    Publication date: November 1, 2018
    Inventors: M. Arshad Siddiqui, Stephane Ciblat, Martin Dery, Lea Constantineau-Forget, Chantal Grand-Maitre, Xiangyu Guo, Sanjay Srivastava, Gerald W. Shipps, Alan B. Cooper, Nicolas Bruneau-Latour, Vu Linh Ly
  • Patent number: 10090150
    Abstract: A method of forming a low dielectric constant (low-k) dielectric is disclosed. The method includes providing a substrate and forming a dielectric including porogens over the substrate. While subjecting the dielectric to a first pressure, the dielectric is exposed to ultraviolet (UV) radiation. The dielectric is also subject to a second pressure less than 1×10?3 Torr. While subjecting the dielectric to the second pressure, the dielectric is exposed to vacuum UV (VUV) radiation having one or more photon energies greater than 7 eV. Since it is difficult for VUV radiation to travel through a medium at a pressure greater than 10 Torr without being absorbed by intermittent materials, subjecting the dielectric to the second pressure creates a medium wherein the dielectric can be exposed to the VUV radiation. By exposing the dielectric to UV and VUV radiation, the dielectric can achieve a reduced dielectric constant and increased mechanical properties.
    Type: Grant
    Filed: September 6, 2017
    Date of Patent: October 2, 2018
    Assignee: Wisconsin Alumni Research Foundation
    Inventors: J. Leon Shohet, Huifeng Zheng, Xiangyu Guo, Weiyi Li, Joshua Blatz, Dongfei Pei
  • Publication number: 20180068848
    Abstract: A method of forming a low dielectric constant (low-k) dielectric is disclosed. The method includes providing a substrate and forming a dielectric including porogens over the substrate. While subjecting the dielectric to a first pressure, the dielectric is exposed to ultraviolet (UV) radiation. The dielectric is also subject to a second pressure less than 1×10?3 Torr. While subjecting the dielectric to the second pressure, the dielectric is exposed to vacuum UV (VUV) radiation having one or more photon energies greater than 7 eV. Since it is difficult for VUV radiation to travel through a medium at a pressure greater than 10 Torr without being absorbed by intermittent materials, subjecting the dielectric to the second pressure creates a medium wherein the dielectric can be exposed to the VUV radiation. By exposing the dielectric to UV and VUV radiation, the dielectric can achieve a reduced dielectric constant and increased mechanical properties.
    Type: Application
    Filed: September 6, 2017
    Publication date: March 8, 2018
    Inventors: J. Leon Shohet, Huifeng Zheng, Xiangyu Guo, Weiyi Li, Joshua Blatz, Dongfei Pei