Patents by Inventor Xianshu Luo

Xianshu Luo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11662519
    Abstract: A tunable element for an optical waveguide device, such as an Optical Phased Array (OPA), is described. Tunable element comprises three waveguide sections arranged such that light propagates through the first waveguide section, then through the second waveguide section and then through the third waveguide section, with light being either evanescently or directly coupled from one waveguide section to the next. The tunable element further comprises one or more resistive heating pad formed proximate to the second waveguide section. The first and third waveguide sections are formed from a first material and the second waveguide section is formed from a second, different material and the second material is more thermo-optically sensitive than the first material.
    Type: Grant
    Filed: October 18, 2019
    Date of Patent: May 30, 2023
    Assignee: ADVANCED MICRO FOUNDRY PTE. LTD.
    Inventors: Xianshu Luo, Guo-Qiang Lo
  • Publication number: 20220043205
    Abstract: A method of fabricating a semiconductor device, the method comprising: forming a substrate; forming a support layer from a first type of material which is not susceptible to an etch process having a predetermined thickness that is related to a required thickness of the semiconductor device; forming a device on the support layer; forming at least one layer of cladding material on the device; forming a plurality of trenches in the layers that extend at least down to the substrate; applying a film over the cladding material; removing the substrate at least in part using an etching process to separate the device from others on a wafer.
    Type: Application
    Filed: December 26, 2019
    Publication date: February 10, 2022
    Inventors: Xianshu LUO, Guo-Qiang LO
  • Publication number: 20210356664
    Abstract: A tunable element for an optical waveguide device, such as an Optical Phased Array (OPA), is described. Tunable element comprises three waveguide sections arranged such that light propagates through the first waveguide section, then through the second waveguide section and then through the third waveguide section, with light being either evanescently or directly coupled from one waveguide section to the next. The tunable element further comprises one or more resistive heating pad formed proximate to the second waveguide section. The first and third waveguide sections are formed from a first material and the second waveguide section is formed from a second, different material and the second material is more thermo-optically sensitive than the first material.
    Type: Application
    Filed: October 18, 2019
    Publication date: November 18, 2021
    Inventors: Xianshu LUO, Guo-Qiang LO
  • Patent number: 10133145
    Abstract: According to embodiments of the present invention, an optical device is provided. The optical device includes a waveguide structure including a floating gate, and an optical waveguide arranged spaced apart from the floating gate, wherein the optical waveguide overlaps with the floating gate, a carrier injection portion arranged spaced apart from the floating gate, and an electrode arrangement, wherein, in response to a first voltage difference applied to the electrode arrangement, the optical device is configured to inject charge carriers from the carrier injection portion to the floating gate to cause a change in refractive index of the waveguide structure, and wherein, in response to a second voltage difference applied to the electrode arrangement, the optical device is configured to drive the charge carriers from the floating gate to the optical waveguide to deplete the charge carriers.
    Type: Grant
    Filed: January 11, 2016
    Date of Patent: November 20, 2018
    Assignee: Agency for Science, Technology and Research
    Inventors: Junfeng Song, Xianshu Luo, Patrick Guo-Qiang Lo
  • Publication number: 20170371226
    Abstract: According to embodiments of the present invention, an optical device is provided. The optical device includes a waveguide structure including a floating gate, and an optical waveguide arranged spaced apart from the floating gate, wherein the optical waveguide overlaps with the floating gate, a carrier injection portion arranged spaced apart from the floating gate, and an electrode arrangement, wherein, in response to a first voltage difference applied to the electrode arrangement, the optical device is configured to inject charge carriers from the carrier injection portion to the floating gate to cause a change in refractive index of the waveguide structure, and wherein, in response to a second voltage difference applied to the electrode arrangement, the optical device is configured to drive the charge carriers from the floating gate to the optical waveguide to deplete the charge carriers.
    Type: Application
    Filed: January 11, 2016
    Publication date: December 28, 2017
    Inventors: Junfeng Song, Xianshu Luo, Patrick Guo-Qiang Lo
  • Patent number: 9666736
    Abstract: According to embodiments of the present invention, a photodetector arrangement is provided. The photodetector arrangement includes a plurality of germanium-based photodetectors, each germanium-based photodetector configured to receive an optical signal and to generate an electrical signal in response to the received optical signal, and an electrode arrangement arranged to conduct the electrical signals.
    Type: Grant
    Filed: January 27, 2014
    Date of Patent: May 30, 2017
    Assignee: Agency for Science, Technology and Research
    Inventors: Xianshu Luo, Junfeng Song, Guo-Qiang Patrick Lo
  • Patent number: 9581545
    Abstract: An optical sensing system may include a light separation element configured to separate an input light into a plurality of sliced lights and a first resonator configured to receive one sliced light of the plurality of sliced lights. An effective refractive index of the first resonator may be changeable in response to a change in a refractive index of a cladding of the first resonator, a second resonator coupled to the first resonator and a detector configured to measure an intensity of the sliced light, the intensity of the sliced light based on a difference between a resonant wavelength of the first resonator and a resonant wavelength of the second resonator. The difference between a resonant wavelength of the first resonator and a resonant wavelength of the second resonator may be based on the effective refractive index of the first resonator.
    Type: Grant
    Filed: October 8, 2013
    Date of Patent: February 28, 2017
    Assignee: Agency for Science, Technology and Research
    Inventors: Junfeng Song, Xianshu Luo, Xiaoguang Tu, Qing Fang, Guo-Qiang Patrick Lo, Mingbin Yu
  • Patent number: 9329415
    Abstract: According to embodiments of the present invention, a method for forming an optical modulator is provided. The method includes providing a substrate, implanting dopants of a first conductivity type into the substrate to form a first doped region, implanting dopants of a second conductivity type into the substrate to form a second doped region, wherein a portion of the second doped region is formed over and overlaps with a portion of the first doped region to form a junction between the respective portions of the first doped region and the second doped region, and wherein a remaining portion of the second doped region is located outside of the junction, and forming a ridge waveguide, wherein the ridge waveguide overlaps with at least a part of the junction.
    Type: Grant
    Filed: November 5, 2013
    Date of Patent: May 3, 2016
    Assignee: Agency for Science, Technology and Research
    Inventors: Jun-Feng Song, Xianshu Luo, Xiaoguang Tu, Patrick Guo-Qiang Lo, Mingbin Yu
  • Publication number: 20150372164
    Abstract: According to embodiments of the present invention, a photodetector arrangement is provided. The photodetector arrangement includes a plurality of germanium-based photodetectors, each germanium-based photodetector configured to receive an optical signal and to generate an electrical signal in response to the received optical signal, and an electrode arrangement arranged to conduct the electrical signals.
    Type: Application
    Filed: January 27, 2014
    Publication date: December 24, 2015
    Inventors: Xianshu Luo, Junfeng Song, Guo-Qiang Patrick Lo
  • Publication number: 20150268161
    Abstract: An optical sensing system may include a light separation element configured to separate an input light into a plurality of sliced lights and a first resonator configured to receive one sliced light of the plurality of sliced lights. An effective refractive index of the first resonator may be changeable in response to a change in a refractive index of a cladding of the first resonator, a second resonator coupled to the first resonator and a detector configured to measure an intensity of the sliced light, the intensity of the sliced light based on a difference between a resonant wavelength of the first resonator and a resonant wavelength of the second resonator. The difference between a resonant wavelength of the first resonator and a resonant wavelength of the second resonator may be based on the effective refractive index of the first resonator.
    Type: Application
    Filed: October 8, 2013
    Publication date: September 24, 2015
    Inventors: Junfeng Song, Xianshu Luo, Xiaoguang Tu, Qing Fang, Guo-Qiang Patrick Lo, Mingbin Yu
  • Patent number: 9136672
    Abstract: An optical light source is provided. The optical light source includes a waveguide including two reflectors arranged spaced apart from each other to define an optical cavity therebetween, an optical gain medium, and a coupling structure arranged to couple light between the optical cavity and the optical gain medium.
    Type: Grant
    Filed: November 26, 2013
    Date of Patent: September 15, 2015
    Assignee: Agency for Science, Technology and Research
    Inventors: Xianshu Luo, Junfeng Song, Haifeng Zhou, Tsung-Yang Liow, Mingbin Yu, Patrick Guo-Qiang Lo
  • Patent number: 9046494
    Abstract: According to embodiments of the present invention, an optical sensing system is provided. The optical sensing system includes a resonator arrangement including a first resonator, wherein an effective refractive index of the first resonator is changeable in response to a change in a refractive index of a cladding of the first resonator, and a second resonator to which a current or voltage being adjustable in response to a change in the effective refractive index of the first resonator is applied, wherein the optical sensing system is configured to determine the change in the effective refractive index of the first resonator based on a change in the current or voltage applied to the second resonator. Further embodiments provide a method of determining a change in an effective refractive index of a resonator of an optical sensing system.
    Type: Grant
    Filed: December 28, 2011
    Date of Patent: June 2, 2015
    Assignee: Agency for Science, Technology and Research
    Inventors: Junfeng Song, Xianshu Luo, Qing Fang, Mingbin Yu, Guo Qiang Patrick Lo
  • Publication number: 20140153600
    Abstract: An optical light source is provided. The optical light source includes a waveguide including two reflectors arranged spaced apart from each other to define an optical cavity therebetween, an optical gain medium, and a coupling structure arranged to couple light between the optical cavity and the optical gain medium.
    Type: Application
    Filed: November 26, 2013
    Publication date: June 5, 2014
    Applicant: Agency for Science, Technology and Research
    Inventors: Xianshu LUO, Junfeng SONG, Haifeng ZHOU, Tsung-Yang LIOW, Mingbin YU, Patrick Guo-Qiang LO
  • Publication number: 20140127842
    Abstract: According to embodiments of the present invention, a method for forming an optical modulator is provided. The method includes providing a substrate, implanting dopants of a first conductivity type into the substrate to form a first doped region, implanting dopants of a second conductivity type into the substrate to form a second doped region, wherein a portion of the second doped region is formed over and overlaps with a portion of the first doped region to form a junction between the respective portions of the first doped region and the second doped region, and wherein a remaining portion of the second doped region is located outside of the junction, and forming a ridge waveguide, wherein the ridge waveguide overlaps with at least a part of the junction.
    Type: Application
    Filed: November 5, 2013
    Publication date: May 8, 2014
    Applicant: Agency for Science, Technology and Research
    Inventors: Jun-Feng Song, Xianshu Luo, Xiaoguang Tu, Patrick Guo-Qiang Lo, Mingbin Yu
  • Publication number: 20120194803
    Abstract: According to embodiments of the present invention, an optical sensing system is provided. The optical sensing system includes a resonator arrangement including a first resonator, wherein an effective refractive index of the first resonator is changeable in response to a change in a refractive index of a cladding of the first resonator, and a second resonator to which a current or voltage being adjustable in response to a change in the effective refractive index of the first resonator is applied, wherein the optical sensing system is configured to determine the change in the effective refractive index of the first resonator based on a change in the current or voltage applied to the second resonator. Further embodiments provide a method of determining a change in an effective refractive index of a resonator of an optical sensing system.
    Type: Application
    Filed: December 28, 2011
    Publication date: August 2, 2012
    Inventors: Junfeng SONG, Xianshu Luo, Qing Fang, Mingbin Yu, Guo Qiang Patrick Lo