Patents by Inventor Xianshu Luo
Xianshu Luo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11662519Abstract: A tunable element for an optical waveguide device, such as an Optical Phased Array (OPA), is described. Tunable element comprises three waveguide sections arranged such that light propagates through the first waveguide section, then through the second waveguide section and then through the third waveguide section, with light being either evanescently or directly coupled from one waveguide section to the next. The tunable element further comprises one or more resistive heating pad formed proximate to the second waveguide section. The first and third waveguide sections are formed from a first material and the second waveguide section is formed from a second, different material and the second material is more thermo-optically sensitive than the first material.Type: GrantFiled: October 18, 2019Date of Patent: May 30, 2023Assignee: ADVANCED MICRO FOUNDRY PTE. LTD.Inventors: Xianshu Luo, Guo-Qiang Lo
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Publication number: 20220043205Abstract: A method of fabricating a semiconductor device, the method comprising: forming a substrate; forming a support layer from a first type of material which is not susceptible to an etch process having a predetermined thickness that is related to a required thickness of the semiconductor device; forming a device on the support layer; forming at least one layer of cladding material on the device; forming a plurality of trenches in the layers that extend at least down to the substrate; applying a film over the cladding material; removing the substrate at least in part using an etching process to separate the device from others on a wafer.Type: ApplicationFiled: December 26, 2019Publication date: February 10, 2022Inventors: Xianshu LUO, Guo-Qiang LO
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Publication number: 20210356664Abstract: A tunable element for an optical waveguide device, such as an Optical Phased Array (OPA), is described. Tunable element comprises three waveguide sections arranged such that light propagates through the first waveguide section, then through the second waveguide section and then through the third waveguide section, with light being either evanescently or directly coupled from one waveguide section to the next. The tunable element further comprises one or more resistive heating pad formed proximate to the second waveguide section. The first and third waveguide sections are formed from a first material and the second waveguide section is formed from a second, different material and the second material is more thermo-optically sensitive than the first material.Type: ApplicationFiled: October 18, 2019Publication date: November 18, 2021Inventors: Xianshu LUO, Guo-Qiang LO
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Patent number: 10133145Abstract: According to embodiments of the present invention, an optical device is provided. The optical device includes a waveguide structure including a floating gate, and an optical waveguide arranged spaced apart from the floating gate, wherein the optical waveguide overlaps with the floating gate, a carrier injection portion arranged spaced apart from the floating gate, and an electrode arrangement, wherein, in response to a first voltage difference applied to the electrode arrangement, the optical device is configured to inject charge carriers from the carrier injection portion to the floating gate to cause a change in refractive index of the waveguide structure, and wherein, in response to a second voltage difference applied to the electrode arrangement, the optical device is configured to drive the charge carriers from the floating gate to the optical waveguide to deplete the charge carriers.Type: GrantFiled: January 11, 2016Date of Patent: November 20, 2018Assignee: Agency for Science, Technology and ResearchInventors: Junfeng Song, Xianshu Luo, Patrick Guo-Qiang Lo
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Publication number: 20170371226Abstract: According to embodiments of the present invention, an optical device is provided. The optical device includes a waveguide structure including a floating gate, and an optical waveguide arranged spaced apart from the floating gate, wherein the optical waveguide overlaps with the floating gate, a carrier injection portion arranged spaced apart from the floating gate, and an electrode arrangement, wherein, in response to a first voltage difference applied to the electrode arrangement, the optical device is configured to inject charge carriers from the carrier injection portion to the floating gate to cause a change in refractive index of the waveguide structure, and wherein, in response to a second voltage difference applied to the electrode arrangement, the optical device is configured to drive the charge carriers from the floating gate to the optical waveguide to deplete the charge carriers.Type: ApplicationFiled: January 11, 2016Publication date: December 28, 2017Inventors: Junfeng Song, Xianshu Luo, Patrick Guo-Qiang Lo
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Patent number: 9666736Abstract: According to embodiments of the present invention, a photodetector arrangement is provided. The photodetector arrangement includes a plurality of germanium-based photodetectors, each germanium-based photodetector configured to receive an optical signal and to generate an electrical signal in response to the received optical signal, and an electrode arrangement arranged to conduct the electrical signals.Type: GrantFiled: January 27, 2014Date of Patent: May 30, 2017Assignee: Agency for Science, Technology and ResearchInventors: Xianshu Luo, Junfeng Song, Guo-Qiang Patrick Lo
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Patent number: 9581545Abstract: An optical sensing system may include a light separation element configured to separate an input light into a plurality of sliced lights and a first resonator configured to receive one sliced light of the plurality of sliced lights. An effective refractive index of the first resonator may be changeable in response to a change in a refractive index of a cladding of the first resonator, a second resonator coupled to the first resonator and a detector configured to measure an intensity of the sliced light, the intensity of the sliced light based on a difference between a resonant wavelength of the first resonator and a resonant wavelength of the second resonator. The difference between a resonant wavelength of the first resonator and a resonant wavelength of the second resonator may be based on the effective refractive index of the first resonator.Type: GrantFiled: October 8, 2013Date of Patent: February 28, 2017Assignee: Agency for Science, Technology and ResearchInventors: Junfeng Song, Xianshu Luo, Xiaoguang Tu, Qing Fang, Guo-Qiang Patrick Lo, Mingbin Yu
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Patent number: 9329415Abstract: According to embodiments of the present invention, a method for forming an optical modulator is provided. The method includes providing a substrate, implanting dopants of a first conductivity type into the substrate to form a first doped region, implanting dopants of a second conductivity type into the substrate to form a second doped region, wherein a portion of the second doped region is formed over and overlaps with a portion of the first doped region to form a junction between the respective portions of the first doped region and the second doped region, and wherein a remaining portion of the second doped region is located outside of the junction, and forming a ridge waveguide, wherein the ridge waveguide overlaps with at least a part of the junction.Type: GrantFiled: November 5, 2013Date of Patent: May 3, 2016Assignee: Agency for Science, Technology and ResearchInventors: Jun-Feng Song, Xianshu Luo, Xiaoguang Tu, Patrick Guo-Qiang Lo, Mingbin Yu
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Publication number: 20150372164Abstract: According to embodiments of the present invention, a photodetector arrangement is provided. The photodetector arrangement includes a plurality of germanium-based photodetectors, each germanium-based photodetector configured to receive an optical signal and to generate an electrical signal in response to the received optical signal, and an electrode arrangement arranged to conduct the electrical signals.Type: ApplicationFiled: January 27, 2014Publication date: December 24, 2015Inventors: Xianshu Luo, Junfeng Song, Guo-Qiang Patrick Lo
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Publication number: 20150268161Abstract: An optical sensing system may include a light separation element configured to separate an input light into a plurality of sliced lights and a first resonator configured to receive one sliced light of the plurality of sliced lights. An effective refractive index of the first resonator may be changeable in response to a change in a refractive index of a cladding of the first resonator, a second resonator coupled to the first resonator and a detector configured to measure an intensity of the sliced light, the intensity of the sliced light based on a difference between a resonant wavelength of the first resonator and a resonant wavelength of the second resonator. The difference between a resonant wavelength of the first resonator and a resonant wavelength of the second resonator may be based on the effective refractive index of the first resonator.Type: ApplicationFiled: October 8, 2013Publication date: September 24, 2015Inventors: Junfeng Song, Xianshu Luo, Xiaoguang Tu, Qing Fang, Guo-Qiang Patrick Lo, Mingbin Yu
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Patent number: 9136672Abstract: An optical light source is provided. The optical light source includes a waveguide including two reflectors arranged spaced apart from each other to define an optical cavity therebetween, an optical gain medium, and a coupling structure arranged to couple light between the optical cavity and the optical gain medium.Type: GrantFiled: November 26, 2013Date of Patent: September 15, 2015Assignee: Agency for Science, Technology and ResearchInventors: Xianshu Luo, Junfeng Song, Haifeng Zhou, Tsung-Yang Liow, Mingbin Yu, Patrick Guo-Qiang Lo
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Patent number: 9046494Abstract: According to embodiments of the present invention, an optical sensing system is provided. The optical sensing system includes a resonator arrangement including a first resonator, wherein an effective refractive index of the first resonator is changeable in response to a change in a refractive index of a cladding of the first resonator, and a second resonator to which a current or voltage being adjustable in response to a change in the effective refractive index of the first resonator is applied, wherein the optical sensing system is configured to determine the change in the effective refractive index of the first resonator based on a change in the current or voltage applied to the second resonator. Further embodiments provide a method of determining a change in an effective refractive index of a resonator of an optical sensing system.Type: GrantFiled: December 28, 2011Date of Patent: June 2, 2015Assignee: Agency for Science, Technology and ResearchInventors: Junfeng Song, Xianshu Luo, Qing Fang, Mingbin Yu, Guo Qiang Patrick Lo
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Publication number: 20140153600Abstract: An optical light source is provided. The optical light source includes a waveguide including two reflectors arranged spaced apart from each other to define an optical cavity therebetween, an optical gain medium, and a coupling structure arranged to couple light between the optical cavity and the optical gain medium.Type: ApplicationFiled: November 26, 2013Publication date: June 5, 2014Applicant: Agency for Science, Technology and ResearchInventors: Xianshu LUO, Junfeng SONG, Haifeng ZHOU, Tsung-Yang LIOW, Mingbin YU, Patrick Guo-Qiang LO
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Publication number: 20140127842Abstract: According to embodiments of the present invention, a method for forming an optical modulator is provided. The method includes providing a substrate, implanting dopants of a first conductivity type into the substrate to form a first doped region, implanting dopants of a second conductivity type into the substrate to form a second doped region, wherein a portion of the second doped region is formed over and overlaps with a portion of the first doped region to form a junction between the respective portions of the first doped region and the second doped region, and wherein a remaining portion of the second doped region is located outside of the junction, and forming a ridge waveguide, wherein the ridge waveguide overlaps with at least a part of the junction.Type: ApplicationFiled: November 5, 2013Publication date: May 8, 2014Applicant: Agency for Science, Technology and ResearchInventors: Jun-Feng Song, Xianshu Luo, Xiaoguang Tu, Patrick Guo-Qiang Lo, Mingbin Yu
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Publication number: 20120194803Abstract: According to embodiments of the present invention, an optical sensing system is provided. The optical sensing system includes a resonator arrangement including a first resonator, wherein an effective refractive index of the first resonator is changeable in response to a change in a refractive index of a cladding of the first resonator, and a second resonator to which a current or voltage being adjustable in response to a change in the effective refractive index of the first resonator is applied, wherein the optical sensing system is configured to determine the change in the effective refractive index of the first resonator based on a change in the current or voltage applied to the second resonator. Further embodiments provide a method of determining a change in an effective refractive index of a resonator of an optical sensing system.Type: ApplicationFiled: December 28, 2011Publication date: August 2, 2012Inventors: Junfeng SONG, Xianshu Luo, Qing Fang, Mingbin Yu, Guo Qiang Patrick Lo