Abstract: An ophthalmic imaging system including an ocular lens and an optical coherence tomography (OCT) imaging module is provided. The OCT imaging module is able to image both retina and anterior segment of eyes by switching a lens group into and out of the OCT light path. The OCT imaging module includes a retina imaging mode and an anterior segment imaging mode. In the retina imaging mode, there exists an intermediate image plane located between the ocular lens and the OCT imaging module. From the retina imaging mode, anterior segment imaging is achieved by inserting a switching lens group into the optical path inside the OCT imaging module or replacing the whole OCT imaging module of the retina mode, wherein, after the insertion, there exist a new intermediate image plane located inside the OCT imaging module and a conjugate of the entrance pupil of the OCT imaging module located between the ocular lens and the OCT imaging module.

Abstract: A confocal scanning laser ophthalmoscope (cSLO) includes an illumination module, an acquisition module, a scanning element and an imaging lens group. With the scanning element at the nominal position and the illumination beam passing through the centers of the lenses, by controlling the deviation angle between the incident marginal rays and the reflected rays on each surface of the lenses in the illumination path to no less than 0.5 degree.

Abstract: An optical coherence tomography system, includes a swept-source laser, a Mach-Zehnder interferometer and a balanced detector. The interferometer includes a first fiber coupler, a second fiber coupler, a sample arm and a reference arm. The reference arm includes a reference arm front section, a reference arm rear section and a delay line. A tail end of the reference arm front section is connected to the reference arm rear section through the delay line. The first fiber coupler is configured to split the output light of the swept-source into a sample light and a reference light and distribute the returned sample light to the second fiber coupler. A difference between the optical path length of a parasitic reflected signal of the delay line reaching the second fiber coupler and the optical path length of the sample light is greater than 8 times the cavity length of the swept-source laser.

Abstract: A confocal scanning laser ophthalmoscope (cSLO) includes an illumination module, an acquisition module, a scanning element and an imaging lens group. With the scanning element at the nominal position and the illumination beam passing through the centers of the lenses, by controlling the deviation angle between the incident marginal rays and the reflected rays on each surface of the lenses in the illumination path to no less than 0.5 degree.

Abstract: An ophthalmic imaging system including an ocular lens and an optical coherence tomography (OCT) imaging module is provided. The OCT imaging module is able to image both retina and anterior segment of eyes by switching a lens group into and out of the OCT light path. The OCT imaging module includes a retina imaging mode and an anterior segment imaging mode. In the retina imaging mode, there exists an intermediate image plane located between the ocular lens and the OCT imaging module. From the retina imaging mode, anterior segment imaging is achieved by inserting a switching lens group into the optical path inside the OCT imaging module or replacing the whole OCT imaging module of the retina mode, wherein, after the insertion, there exist a new intermediate image plane located inside the OCT imaging module and a conjugate of the entrance pupil of the OCT imaging module located between the ocular lens and the OCT imaging module.

Abstract: An optical coherence tomography system, includes a swept-source laser, a Mach-Zehnder interferometer and a balanced detector. The interferometer includes a first fiber coupler, a second fiber coupler, a sample arm and a reference arm. The reference arm includes a reference arm front section, a reference arm rear section and a delay line. A tail end of the reference arm front section is connected to the reference arm rear section through the delay line. The first fiber coupler is configured to split the output light of the swept-source into a sample light and a reference light and distribute the returned sample light to the second fiber coupler. A difference between the optical path length of a parasitic reflected signal of the delay line reaching the second fiber coupler and the optical path length of the sample light is greater than 8 times the cavity length of the swept-source laser.

Abstract: Methods and systems for variable polarization wafer inspection are provided. One system includes one or more polarizing components position in one or more paths of light scattered from a wafer and detected by one or more channels of an inspection system. The polarizing component(s) are configured to have detection polarization(s) that are selected from two or more polarization settings for the polarizing component(s).

Abstract: Methods and systems for variable polarization wafer inspection are provided. One system includes one or more polarizing components position in one or more paths of light scattered from a wafer and detected by one or more channels of an inspection system. The polarizing component(s) are configured to have detection polarization(s) that are selected from two or more polarization settings for the polarizing component(s).