Patents by Inventor Xiao-Ming He

Xiao-Ming He has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240400461
    Abstract: Disclosed are methods of forming a chamber component for a process chamber. The methods may include filling a mold with nanoparticles or plasma spraying nanoparticles, where at least a portion of the nanoparticles include a core particle and a thin film coating over the core particle. The core particle and thin film are formed of, independently, a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride, or combinations thereof. The nanoparticles may have a donut-shape having a spherical form with indentations on opposite sides. The methods also may include sintering the nanoparticles to form the chamber component and materials. Further described are chamber components and coatings formed from the described nanoparticles.
    Type: Application
    Filed: August 13, 2024
    Publication date: December 5, 2024
    Inventors: Guodong Zhan, Xiaowei Wu, Xiao Ming He, Jennifer Y. Sun
  • Publication number: 20240403181
    Abstract: A computer-implemented method, a system and a computer program product for device failure detection are disclosed. In the method, phase-based predictions may be performed on a plurality of storage devices to determine a plurality of sampling scopes and corresponding sampling ratios. The respective sampling scopes may comprise at least one storage device of the plurality of storage devices. A sampling dataset may be obtained by selecting a group of storage devices from the respective sampling scopes with the corresponding sampling ratios. Device failure may be detected for the group of storage devices based on the sampling dataset.
    Type: Application
    Filed: June 1, 2023
    Publication date: December 5, 2024
    Inventors: Fan Jing Meng, Hua Ye, Hong Xin Hou, Ze Ming Zhao, Xiao Tian Xu, Jin Chi He, Peng Li
  • Patent number: 12098107
    Abstract: Disclosed are methods of forming a chamber component for a process chamber. The methods may include filling a mold with nanoparticles or plasma spraying nanoparticles, where at least a portion of the nanoparticles include a core particle and a thin film coating over the core particle. The core particle and thin film are formed of, independently, a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride, or combinations thereof. The nanoparticles may have a donut-shape having a spherical form with indentations on opposite sides. The methods also may include sintering the nanoparticles to form the chamber component and materials. Further described are chamber components and coatings formed from the described nanoparticles.
    Type: Grant
    Filed: April 27, 2023
    Date of Patent: September 24, 2024
    Assignee: Applied Materials, Inc.
    Inventors: Guodong Zhan, Xiaowei Wu, Xiao Ming He, Jennifer Y. Sun
  • Publication number: 20230322628
    Abstract: Disclosed are methods of forming a chamber component for a process chamber. The methods may include filling a mold with nanoparticles or plasma spraying nanoparticles, where at least a portion of the nanoparticles include a core particle and a thin film coating over the core particle. The core particle and thin film are formed of, independently, a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride, or combinations thereof. The nanoparticles may have a donut-shape having a spherical form with indentations on opposite sides. The methods also may include sintering the nanoparticles to form the chamber component and materials. Further described are chamber components and coatings formed from the described nanoparticles.
    Type: Application
    Filed: April 27, 2023
    Publication date: October 12, 2023
    Inventors: Guodong Zhan, Xiaowei Wu, Xiao Ming He, Jennifer Y. Sun
  • Patent number: 11667578
    Abstract: Methods of forming nanoceramic materials and components. The methods may include performing atomic layer deposition to form a plurality of nanoparticles, including forming a thin film coating over core particles, or sintering the nanoparticles in a mold. The nanoparticles can include a first material selected from a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride or combinations thereof.
    Type: Grant
    Filed: March 3, 2022
    Date of Patent: June 6, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Guodong Zhan, Xiaowei Wu, Xiao Ming He, Jennifer Y. Sun
  • Patent number: 11658014
    Abstract: Methods and apparatus for depositing a coating on a semiconductor manufacturing apparatus component are provided herein. In some embodiments, a method of depositing a coating on a semiconductor manufacturing apparatus component includes: sequentially exposing a semiconductor manufacturing apparatus component including nickel or nickel alloy to an aluminum precursor and a reactant to form an aluminum containing layer on a surface of the semiconductor manufacturing apparatus component by a deposition process.
    Type: Grant
    Filed: April 11, 2020
    Date of Patent: May 23, 2023
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Pingyan Lei, Dien-Yeh Wu, Xiao Ming He, Jennifer Y. Sun, Lei Zhou, Takashi Kuratomi, Avgerinos V. Gelatos, Mei Chang, Steven D. Marcus
  • Publication number: 20230122695
    Abstract: A ground shield of a processing chamber includes a ceramic body including a ground shield plate, a raised edge extending from an upper surface of the ground shield plate, and a hollow shaft that extends from a lower surface of the ground shield plate. An electrically conductive layer is formed on and conforms to at least the upper surface of the ground shield plate and an interior surface of the hollow shaft. A first protective layer is formed on at least the electrically conductive layer. A heater plate of a heater first within the raised edge and on the ground shield plate such that the heater plate is disposed on top of the first protective layer, the electrically conductive layer, and the upper surface of the ground shield plate.
    Type: Application
    Filed: December 16, 2022
    Publication date: April 20, 2023
    Inventors: Dmitry Lubomirsky, Xiao Ming He, Jennifer Y. Sun, Xiaowei Wu, Laksheswar Kalita, Soonam Park
  • Patent number: 11562890
    Abstract: A substrate support assembly includes a ground shield and a heater that is surrounded by the ground shield. The ground shield includes a plate. In one embodiment, the ground shield is composed of a ceramic body and includes an electrically conductive layer, a first protective layer on the upper surface of the plate. In another embodiment, the ground shield is composed of an electrically conductive body and a first protective layer on the upper surface of the plate.
    Type: Grant
    Filed: December 6, 2018
    Date of Patent: January 24, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Dmitry Lubomirsky, Xiao Ming He, Jennifer Y. Sun, Xiaowei Wu, Laksheswar Kalita, Soonam Park
  • Publication number: 20220349041
    Abstract: Disclosed are rare earth metal containing silicate coatings, coated articles (e.g., heaters and susceptors) or bodies of articles and methods of coating such articles with a rare earth metal containing silicate coating.
    Type: Application
    Filed: July 14, 2022
    Publication date: November 3, 2022
    Inventors: Xiao-Ming He, Cheng-Hsuan Chou, Jennifer Y. Sun
  • Patent number: 11401599
    Abstract: Disclosed are rare earth metal containing silicate coatings, coated articles (e.g., heaters and susceptors) or bodies of articles and methods of coating such articles with a rare earth metal containing silicate coating.
    Type: Grant
    Filed: June 18, 2019
    Date of Patent: August 2, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Xiao-Ming He, Cheng-Hsuan Chou, Jennifer Y. Sun
  • Publication number: 20220234959
    Abstract: Methods of forming nanoceramic materials and components. The methods may include performing atomic layer deposition to form a plurality of nanoparticles, including forming a thin film coating over core particles, or sintering the nanoparticles in a mold. The nanoparticles can include a first material selected from a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride or combinations thereof.
    Type: Application
    Filed: March 3, 2022
    Publication date: July 28, 2022
    Inventors: Guodong Zhan, Xiaowei Wu, Xiao Ming He, Jennifer Y. Sun
  • Patent number: 11279656
    Abstract: Nanopowders containing nanoparticles having a core particle with a thin film coating. The core particles and thin film coatings are, independently, formed from at least one of a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride or combinations thereof. The thin film coating may be formed using a non-line of sight technique such as atomic layer deposition (ALD). Also disclosed herein are nanoceramic materials formed from the nanopowders and methods of making and using the nanopowders.
    Type: Grant
    Filed: October 23, 2018
    Date of Patent: March 22, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Guodong Zhan, Xiaowei Wu, Xiao Ming He, Jennifer Y. Sun
  • Publication number: 20210319983
    Abstract: Methods and apparatus for depositing a coating on a semiconductor manufacturing apparatus component are provided herein. In some embodiments, a method of depositing a coating on a semiconductor manufacturing apparatus component includes: sequentially exposing a semiconductor manufacturing apparatus component including nickel or nickel alloy to an aluminum precursor and a reactant to form an aluminum containing layer on a surface of the semiconductor manufacturing apparatus component by a deposition process.
    Type: Application
    Filed: April 11, 2020
    Publication date: October 14, 2021
    Inventors: Pingyan LEI, Dien-Yeh WU, Xiao Ming HE, Jennifer Y. SUN, Lei ZHOU, Takashi KURATOMI, Avgerinos V. GELATOS, Mei CHANG, Steven D. MARCUS
  • Publication number: 20210123143
    Abstract: Embodiments of the present disclosure relate to articles, coated articles, and methods of coating such articles with a corrosion resistant coating. The corrosion resistant coating can comprise hafnium aluminum oxide. The corrosion resistant coating may be deposited by a non-line of sight deposition, such as atomic layer deposition. Articles that may be coated may include chamber components, such as gas lines.
    Type: Application
    Filed: October 16, 2020
    Publication date: April 29, 2021
    Inventors: David Fenwick, Jennifer Y. Sun, Cheng-Hsuan Chou, Xiao-Ming He
  • Patent number: 10858741
    Abstract: Disclosed herein is an article comprising one or more channels and a multi-layer protective coating on the one or more channels. The multi-layer protective coating includes an anodization layer comprising a plurality of cracks and a plurality of pores, a sealing layer on the anodization layer, and a top layer on the sealing layer. The sealing layer comprises a metal oxide, the seals the plurality of cracks and the plurality of pores, and has a porosity of approximately 0%. The top layer comprises a rare earth oxide, a rare earth fluoride, or a rare earth oxyfluoride, has a different material composition than the sealing layer, and has a porosity of approximately 0%.
    Type: Grant
    Filed: March 11, 2019
    Date of Patent: December 8, 2020
    Assignee: Applied Materials, Inc.
    Inventors: Xiao-Ming He, Jennifer Y. Sun
  • Publication number: 20200291528
    Abstract: Disclosed herein is an article comprising one or more channels and a multi-layer protective coating on the one or more channels. The multi-layer protective coating includes an anodization layer comprising a plurality of cracks and a plurality of pores, a sealing layer on the anodization layer, and a top layer on the sealing layer. The sealing layer comprises a metal oxide, the seals the plurality of cracks and the plurality of pores, and has a porosity of approximately 0%. The top layer comprises a rare earth oxide, a rare earth fluoride, or a rare earth oxyfluoride, has a different material composition than the sealing layer, and has a porosity of approximately 0%.
    Type: Application
    Filed: March 11, 2019
    Publication date: September 17, 2020
    Inventors: Xiao-Ming He, Jennifer Y. Sun
  • Patent number: 10766824
    Abstract: Methods comprise performing two or more thermal cycles on an article comprising a body and a ceramic coating. Each thermal cycle of the two or more thermal cycles comprise heating the ceramic article to a target temperature at a first ramping rate. Each thermal cycle further comprises maintaining the article at the target temperature for a first duration of time and then cooling the article to a second target temperature at a second ramping rate. The method further comprises submerging the article in a bath for a second duration of time to remove the particles from the ceramic coating.
    Type: Grant
    Filed: November 8, 2017
    Date of Patent: September 8, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Kaushal Gangakhedkar, Jennifer Y. Sun, Xiao-Ming He
  • Patent number: 10755900
    Abstract: A method of applying a multi-layer plasma resistant coating on an article comprises performing plating or ALD to form a conformal first plasma resistant layer on an article, wherein the conformal first plasma resistant layer is formed on a surface of the article and on walls of high aspect ratio features in the article. The conformal first plasma resistant coating has a porosity of approximately 0% and a thickness of approximately 200 nm to approximately 1 micron. One of electron beam ion assisted deposition (EB-IAD), plasma enhanced chemical vapor deposition (PECVD), aerosol deposition or plasma spraying is then performed to form a second plasma resistant layer that covers the conformal first plasma resistant layer at a region of the surface but not at the walls of the high aspect ratio features.
    Type: Grant
    Filed: April 27, 2018
    Date of Patent: August 25, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Toan Tran, Laksheswar Kalita, Tae Won Kim, Dmitry Lubomirsky, Xiaowei Wu, Xiao-Ming He, Cheng-Hsuan Chou, Jennifer Y. Sun
  • Publication number: 20200185203
    Abstract: A substrate support assembly includes a ground shield and a heater that is surrounded by the ground shield. The ground shield includes a plate. In one embodiment, the ground shield is composed of a ceramic body and includes an electrically conductive layer, a first protective layer on the upper surface of the plate. In another embodiment, the ground shield is composed of an electrically conductive body and a first protective layer on the upper surface of the plate.
    Type: Application
    Filed: December 6, 2018
    Publication date: June 11, 2020
    Inventors: Dmitry Lubomirsky, Xiao Ming He, Jennifer Y. Sun, Xiaowei Wu, Laksheswar Kalita, Soonam Park
  • Patent number: 10596789
    Abstract: A method for labeling fabrics, such as fabric garments, and a heat-transfer label well-suited for use in the method. In one embodiment, the heat-transfer label includes (a) a support portion; and (b) a transfer portion, the transfer portion being positioned over the support portion for transfer of the transfer portion from the support portion to an article of fabric under conditions of heat and pressure, the transfer portion including (i) an ink design layer; (ii) a heat-activatable adhesive layer; and (iii) an RFID device.
    Type: Grant
    Filed: September 22, 2010
    Date of Patent: March 24, 2020
    Assignee: AVERY DENNISON CORPORATION
    Inventors: Kuolih Tsai, Dong-Tsai Hseih, Li Shu, David N. Edwards, Alan Morgenthau, Yi-Hung Chiao, Yukihiko Sasaki, Xiao-Ming He, Scott Wayne Ferguson