Patents by Inventor Xiaobei Pang

Xiaobei Pang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Switchable matching network and an inductively coupled plasma processing apparatus having such network
    Patent number: 10685811
    Abstract: A switchable matching network and an inductively coupled plasma processing apparatus having such network are disclosed. The switchable matching network enables selection between two bias power frequencies. The network is particularly suitable for an inductively-coupled plasma processing apparatus. The switchable matching network comprises: a first match circuit having a first input port connected to a first signal source and a first output port coupled to a load; a second match circuit having a second input port connected to a second signal source and a second output port coupled to the load; a switching device having a first connection port, a second connection port and a third connection port, the first connection port connected to the first input port and the second connection port connected to the second output port; a variable capacitor connected between ground and the third connection port of the switching device.
    Type: Grant
    Filed: April 17, 2019
    Date of Patent: June 16, 2020
    Assignee: ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
    Inventors: Kui Zhao, Hiroshi Iizuka, Tuqiang Ni, Xiaobei Pang
  • SWITCHABLE MATCHING NETWORK AND AN INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS HAVING SUCH NETWORK
    Publication number: 20200090908
    Abstract: A switchable matching network and an inductively coupled plasma processing apparatus having such network are disclosed. The switchable matching network enables selection between two bias power frequencies. The network is particularly suitable for an inductively-coupled plasma processing apparatus. The switchable matching network comprises: a first match circuit having a first input port connected to a first signal source and a first output port coupled to a load; a second match circuit having a second input port connected to a second signal source and a second output port coupled to the load; a switching device having a first connection port, a second connection port and a third connection port, the first connection port connected to the first input port and the second connection port connected to the second output port; a variable capacitor connected between ground and the third connection port of the switching device.
    Type: Application
    Filed: April 17, 2019
    Publication date: March 19, 2020
    Inventors: Kui Zhao, Hiroshi Iizuka, Tuqiang Ni, Xiaobei Pang