Abstract: The present disclosure provides a method for measuring a concentration of a per- and polyfluoroalkyl substance and a liquid chromatography-tandem mass spectrometry system. The method includes: measuring concentrations of a plurality of per-and polyfluoroalkyl substances in a sample by liquid chromatography-tandem mass spectrometry in a primary measurement process of eluting the sample with an alkaline mobile phase, in which the plurality of per- and polyfluoroalkyl substances at least include one or more perfluoroalkyl phosphonic acids/phosphinic acids or polyfluoroalkyl phosphate esters. According to the method, by using the alkaline mobile phase to elute the sample, the rapid analysis on 93 PFASs including perfluoroalkyl phosphonic acids/phosphinic acids and polyfluoroalkyl phosphate esters can be completed by single injection. Additionally, the present disclosure also provides a method to rapidly analyze 10 PFASs by GC-MS/MS.

Abstract: A system for reducing printable defects on a pattern mask is disclosed. The system includes a controller configured to be communicatively coupled to a characterization sub-system, the controller including one or more processors configured to execute program instructions causing the one or more processors to: direct the characterization sub-system to perform inspection of a mask blank; generate a cost function based on a first characteristic and a second characteristic, the first characteristic comprising areas of defect regions exposed by mask patterns, the second characteristic comprising pattern complexity of a design pattern; determine one or more values indicative of a minimum of the cost function via a non-linear optimization procedure; and generate one or more control signals to adjust rotation and translation of the mask blank relative to the design pattern based on the determined one or more values indicative of the minimum of the cost function.

Abstract: A system for reducing printable defects on a pattern mask is disclosed. The system includes a controller configured to be communicatively coupled to a characterization sub-system, the controller including one or more processors configured to execute program instructions causing the one or more processors to: direct the characterization sub-system to perform inspection of a mask blank; generate a cost function based on a first characteristic and a second characteristic, the first characteristic comprising areas of defect regions exposed by mask patterns, the second characteristic comprising pattern complexity of a design pattern; determine one or more values indicative of a minimum of the cost function via a non-linear optimization procedure; and generate one or more control signals to adjust rotation and translation of the mask blank relative to the design pattern based on the determined one or more values indicative of the minimum of the cost function.

Abstract: A three-dimensional image of an object scanned with a plurality of cone-beam projections from a number of source positions is reconstructed using a method wherein intermediate transform functions are obtained from two-dimensional images of radiation attenuation in the scanned object. The intermediate transform functions are then filtered over the two-dimensional attenuation images using a moving-frame technique. The second-order radial derivative of the Radon transform can then be backprojected to generate an intermediate, locally-reconstructed, three-dimensional image. After repetition of this process, the plurality of intermediate, locally reconstructed, three-dimensional images are summed to obtain an ultimate, reconstructed, three-dimensional image of the object.

Abstract: A three-dimensional image of an object scanned with a plurality of cone-beam projections from a number of source positions is reconstructed using a method wherein intermediate transform functions are obtained from two-dimensional images of radiation attenuation in the scanned object. The intermediate transform functions are then filtered over a set of parallel planes using a moving-frame technique. The second-order radial derivative of the Radon transform can then be backprojected to generate an intermediate, locally-reconstructed, three-dimensional image. After repetition of this process, the plurality of intermediate, locally reconstructed, three-dimensional images are summed to obtain an ultimate, reconstructed, three-dimensional image of the object. In particular embodiments, the source and detector are displaced along helical paths and radiation scans of the object are taken at multiple positions along the paths.

Abstract: A three-dimensional image of an object scanned with a plurality of cone-beam projections from a number of source positions is reconstructed using a method wherein intermediate transform functions are obtained from two-dimensional images of radiation attenuation in the scanned object. The intermediate transform functions are then filtered over the two-dimensional attenuation images using a moving-frame technique. The second-order radial derivative of the Radon transform can then be backprojected to generate an intermediate, locally-reconstructed, three-dimensional image. After repetition of this process, the plurality of intermediate, locally reconstructed, three-dimensional images are summed to obtain an ultimate, reconstructed, three-dimensional image of the object. In particular embodiments, the source and detector are displaced along helical paths and radiation scans of the object are taken at multiple positions along the paths.

Abstract: A three-dimensional image of an object scanned with a plurality of cone-beam projections from a number of source positions is reconstructed using a method wherein intermediate transform functions are obtained from two-dimensional images of radiation attenuation in the scanned object. The intermediate transform functions are then filtered over the two-dimensional attenuation images using a moving-frame technique. The second-order radial derivative of the Radon transform can then be backprojected to generate an intermediate, locally-reconstructed, three-dimensional image. After repetition of this process, the plurality of intermediate, locally reconstructed, three-dimensional images are summed to obtain an ultimate, reconstructed, three-dimensional image of the object.