Abstract: A system for reducing printable defects on a pattern mask is disclosed. The system includes a controller configured to be communicatively coupled to a characterization sub-system, the controller including one or more processors configured to execute program instructions causing the one or more processors to: direct the characterization sub-system to perform inspection of a mask blank; generate a cost function based on a first characteristic and a second characteristic, the first characteristic comprising areas of defect regions exposed by mask patterns, the second characteristic comprising pattern complexity of a design pattern; determine one or more values indicative of a minimum of the cost function via a non-linear optimization procedure; and generate one or more control signals to adjust rotation and translation of the mask blank relative to the design pattern based on the determined one or more values indicative of the minimum of the cost function.

Abstract: A system for reducing printable defects on a pattern mask is disclosed. The system includes a controller configured to be communicatively coupled to a characterization sub-system, the controller including one or more processors configured to execute program instructions causing the one or more processors to: direct the characterization sub-system to perform inspection of a mask blank; generate a cost function based on a first characteristic and a second characteristic, the first characteristic comprising areas of defect regions exposed by mask patterns, the second characteristic comprising pattern complexity of a design pattern; determine one or more values indicative of a minimum of the cost function via a non-linear optimization procedure; and generate one or more control signals to adjust rotation and translation of the mask blank relative to the design pattern based on the determined one or more values indicative of the minimum of the cost function.

Abstract: A three-dimensional image of an object scanned with a plurality of cone-beam projections from a number of source positions is reconstructed using a method wherein intermediate transform functions are obtained from two-dimensional images of radiation attenuation in the scanned object. The intermediate transform functions are then filtered over the two-dimensional attenuation images using a moving-frame technique. The second-order radial derivative of the Radon transform can then be backprojected to generate an intermediate, locally-reconstructed, three-dimensional image. After repetition of this process, the plurality of intermediate, locally reconstructed, three-dimensional images are summed to obtain an ultimate, reconstructed, three-dimensional image of the object.

Abstract: A three-dimensional image of an object scanned with a plurality of cone-beam projections from a number of source positions is reconstructed using a method wherein intermediate transform functions are obtained from two-dimensional images of radiation attenuation in the scanned object. The intermediate transform functions are then filtered over a set of parallel planes using a moving-frame technique. The second-order radial derivative of the Radon transform can then be backprojected to generate an intermediate, locally-reconstructed, three-dimensional image. After repetition of this process, the plurality of intermediate, locally reconstructed, three-dimensional images are summed to obtain an ultimate, reconstructed, three-dimensional image of the object. In particular embodiments, the source and detector are displaced along helical paths and radiation scans of the object are taken at multiple positions along the paths.

Abstract: A three-dimensional image of an object scanned with a plurality of cone-beam projections from a number of source positions is reconstructed using a method wherein intermediate transform functions are obtained from two-dimensional images of radiation attenuation in the scanned object. The intermediate transform functions are then filtered over the two-dimensional attenuation images using a moving-frame technique. The second-order radial derivative of the Radon transform can then be backprojected to generate an intermediate, locally-reconstructed, three-dimensional image. After repetition of this process, the plurality of intermediate, locally reconstructed, three-dimensional images are summed to obtain an ultimate, reconstructed, three-dimensional image of the object. In particular embodiments, the source and detector are displaced along helical paths and radiation scans of the object are taken at multiple positions along the paths.

Abstract: A three-dimensional image of an object scanned with a plurality of cone-beam projections from a number of source positions is reconstructed using a method wherein intermediate transform functions are obtained from two-dimensional images of radiation attenuation in the scanned object. The intermediate transform functions are then filtered over the two-dimensional attenuation images using a moving-frame technique. The second-order radial derivative of the Radon transform can then be backprojected to generate an intermediate, locally-reconstructed, three-dimensional image. After repetition of this process, the plurality of intermediate, locally reconstructed, three-dimensional images are summed to obtain an ultimate, reconstructed, three-dimensional image of the object.