Patents by Inventor Xiaodi Huo

Xiaodi Huo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Pattern of a film layer including aluminum, and manufacturing method and aftertreatment method thereof
    Patent number: 10508346
    Abstract: Disclosed is a pattern of a film layer including aluminum, and a manufacturing method and an aftertreatment method thereof. In the manufacturing method, a patterned photoresist layer (320) which covers on a to-be-patterned film layer (310) including aluminum is taken as a mask, and a dry etching process is performed on the to-be-patterned film layer (310) by using a gas including Cl2 to form a patterned film layer; and then the formed patterned film layer (310) including aluminum is subjected to dechlorination treatment and uninstalling of a bearing substrate (200) simultaneously. The method can improve the productivity and save the cost.
    Type: Grant
    Filed: August 10, 2017
    Date of Patent: December 17, 2019
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.
    Inventors: Xiaodi Huo, Guote Wu, Soondong Lee, Jihoon Lee
  • PATTERN OF A FLIM LAYER INCLUDING ALUMINUM, AND MANUFACTURING METHOD AND AFTERTREATMENT METHOD THEREOF
    Publication number: 20190062925
    Abstract: Disclosed is a pattern of a film layer including aluminum, and a manufacturing method and an aftertreatment method thereof. In the manufacturing method, a patterned photoresist layer (320) which covers on a to-be-patterned film layer (310) including aluminum is taken as a mask, and a dry etching process is performed on the to-be-patterned film layer (310) by using a gas including Cl2 to form a patterned film layer; and then the formed patterned film layer (310) including aluminum is subjected to dechlorination treatment and uninstalling of a bearing substrate (200) simultaneously. The method can improve the productivity and save the cost.
    Type: Application
    Filed: August 10, 2017
    Publication date: February 28, 2019
    Inventors: Xiaodi Huo, Guote Wu, Soondong Lee, Jihoon Lee