Abstract: A vapor deposition structure includes: a vapor deposition crucible, a nozzle and a floating plate. The vapor deposition crucible is configured to receive a vapor deposition source material, and the vapor deposition source material transitions from a liquid state to a gaseous state after being heated. The nozzle is disposed at an outlet of the vapor deposition crucible. The nozzle is configured to spray the vapor deposition source material in the gaseous state onto a surface of a substrate under vapor deposition. The floating plate is configured to float on a surface of the vapor deposition source material in the liquid state. The floating plate is provided with a plurality of hollowed-out structures. The plurality of hollowed-out structures are configured to allow the vapor deposition source material in the gaseous state to pass through.

Abstract: A drive control unit in which a drive control system for a motor is made redundant so that a motor having two coil sets is individually driven and controlled for each coil set includes an inverter substrate on which a first inverter circuit that drives each coil of a first coil set, and a second inverter circuit that drives each coil of a second coil set are formed; a control substrate on which a first control circuit that includes a microcomputer which controls the first inverter circuit, and a second control circuit that includes a microcomputer which controls the second inverter circuit are formed; and a housing in which the inverter substrate and the control substrate are arranged in parallel to each other. The first control circuit is positioned on the front surface side, and the second control circuit is positioned on the rear surface side of the control substrate.

Abstract: A drive control unit in which a drive control system for a motor is made redundant so that a motor having two coil sets is individually driven and controlled for each coil set includes an inverter substrate on which a first inverter circuit that drives each coil of a first coil set, and a second inverter circuit that drives each coil of a second coil set are formed; a control substrate on which a first control circuit that includes a microcomputer which controls the first inverter circuit, and a second control circuit that includes a microcomputer which controls the second inverter circuit are formed; and a housing in which the inverter substrate and the control substrate are arranged in parallel to each other. The first control circuit is positioned on the front surface side, and the second control circuit is positioned on the rear surface side of the control substrate.