Patents by Inventor Xiaohan LI

Xiaohan LI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11966156
    Abstract: A system for mask design repair may develop a simulation-based model of a layer thickness after one or more process steps for fabricating features on a sample, develop a transformed model of the fabrication process that emulates the simulation-based model and has a faster evaluation speed than the simulation-based model, and where the inputs to the transformed model include the input mask design, and where the outputs of the transformed model include one or more output parameters associated with fabrication of the input mask design as well as one or more sensitivity metrics describing sensitivities of the one or more output parameters to variations of the input mask design. The system may further receive a candidate mask design and generate a repaired mask design based on the transformed model and the candidate mask design.
    Type: Grant
    Filed: August 8, 2023
    Date of Patent: April 23, 2024
    Assignee: KLA Corporation
    Inventors: Pradeep Vukkadala, Guy Parsey, Kunlun Bai, Xiaohan Li, Anatoly Burov, Cao Zhang, John S. Graves, John Biafore
  • Patent number: 11965070
    Abstract: The disclosure relates to the field of electronic materials, and in particular to a composite film of fluorinated polybenzoxazole (6FPBO) and triple-shelled mesoporous silica hollow spheres, and to its preparation and use. The composite film comprises fluorinated polybenzoxazole as a matrix and amino-functionalized triple-shelled mesoporous silica hollow spheres which are dispersed in the fluorinated polybenzoxazole matrix. A mass ratio of (amino-functionalized triple-shelled mesoporous silica hollow spheres)/(fluorinated polybenzoxazole) is 1/100 to 5/100. The composite film has excellent thermal stability and a lower dielectric constant.
    Type: Grant
    Filed: November 1, 2021
    Date of Patent: April 23, 2024
    Assignee: East China University of Science and Technology
    Inventors: Qixin Zhuang, Zhe Zhang, Xiaoyun Liu, Jian Xu, Wentao Wang, Zeyang Wu, Xiaohan Wu, Lihui Li
  • Publication number: 20240061327
    Abstract: A system for mask design repair may develop a simulation-based model of a layer thickness after one or more process steps for fabricating features on a sample, develop a transformed model of the fabrication process that emulates the simulation-based model and has a faster evaluation speed than the simulation-based model, and where the inputs to the transformed model include the input mask design, and where the outputs of the transformed model include one or more output parameters associated with fabrication of the input mask design as well as one or more sensitivity metrics describing sensitivities of the one or more output parameters to variations of the input mask design. The system may further receive a candidate mask design and generate a repaired mask design based on the transformed model and the candidate mask design.
    Type: Application
    Filed: August 8, 2023
    Publication date: February 22, 2024
    Inventors: Pradeep Vukkadala, Guy Parsey, Kunlun Bai, Xiaohan Li, Anatoly Burov, Cao Zhang, John S. Graves, John Biafore
  • Publication number: 20240048545
    Abstract: According to examples, an apparatus includes a processor that is to cause an application to be provided through which information pertaining to a first user is to be displayed, receive authentication information of a second user, in which the authentication information includes an identifier of the second user and information that the second user uses for authentication to access a web-based application, determine whether the identifier of the second user is linked to an identifier of the first user, determine whether the authentication information authenticates the second user to access the web-based application, and based on a determination that the identifier of the second user is linked to the identifier of the first user and the authentication information authenticates the second user to access the web-based application, perm it the second user to access the information pertaining to the first user through the application.
    Type: Application
    Filed: June 29, 2023
    Publication date: February 8, 2024
    Inventors: Jessie M. KAWATA, Adam KELLY, Anuradha PADTE, Nelson Michael ROZO, Hyunsun KIM, Cory Alexander FERRO, Savyasachi C. NAFREY, Xiaohan LI, Lionel COLING, Xuewei WANG, Julian Harvery Morgan DICKS, Kristofer CASTRO, Hannah WILKINSON, William Christopher SLUSS, Sara A. SCHLAGEL, Gregory Henri Regis MIALON, Wen QIU, Casey Shea Dickson
  • Publication number: 20220129775
    Abstract: A mask pattern for a semiconductor device can be used as an input to determine a photoresist thickness probability distribution using a machine learning module. For example, the machine learning module can determine a probability map of Z-height. This can be used to determine stochastic variation in photoresist thickness for a semiconductor device. The Z-height may be calculated at a coordinate in the X-direction and Y-direction.
    Type: Application
    Filed: June 2, 2021
    Publication date: April 28, 2022
    Inventors: Anatoly Burov, Guy Parsey, Kunlun Bai, Pradeep Vukkadala, Cao Zhang, John S. Graves, Xiaohan Li, Craig Higgins
  • Patent number: 9939380
    Abstract: A detection device for simultaneous in-situ measurement of dissolved oxygen at different submerged plant leaf-water interface levels. The detection device includes a dissolved oxygen micro-optrode host. A plurality of detection probes are externally connected to the dissolved oxygen micro-optrode host and can extend out probes. The detection device includes a leaf clamp having an upper clamping head, a lower clamping head, a hinged shaft and a clamping handle. Each of the upper and lower clamping head includes a plurality of water passing cavities penetrating through the back and the front thereof. Each of the upper and lower clamping head includes a plurality of slots horizontally extending inwardly of the corresponding clamping head. The detection device includes a plurality of insertion pieces having a probe groove. The detection probe is locatable in the respective probe groove for fixation. The insertion pieces are insertable and fixable in the slots.
    Type: Grant
    Filed: October 21, 2016
    Date of Patent: April 10, 2018
    Assignees: Nanjing Institute of Environmental Sciences, Ministry of Environmental Protection, P.R.C., Chongqing University of Arts and Sciences
    Inventors: Wenlin Wang, Weixin Li, Qiang Li, Bo Liu, Yinjing Wan, Ruiming Han, Xiaoyan Tang, Wenjing Li, Fei He, Wei Zhuang, Changxin Zou, Aiping Liu, Shoujing Yin, Xiaohan Li, Guoquan Pan, Weimin Wang
  • Patent number: 9921159
    Abstract: A spliced detection apparatus for simultaneous wide-range in-situ detection of dissolved oxygen in a sludge-water interface of the present invention comprises a dissolved oxygen shimmer host, several detection probes, a casing and detection kits, several vertically through seat chambers being disposed in the casing, the detection kits can be placed and fixed in the seat chambers, the detection kits may be placed on the sludge-water interface, and each detection kit is provided with a vertically through water passage chamber, while the front side face and the back side face of the detection kit are respectively provided with several front slots and rear slots horizontally extending into the detection kit respectively, the detection apparatus further comprises tabs, with probe grooves being provided on the tabs, each detection probe can be put into the probe groove of the corresponding tab and fixed therein, the tabs may be inserted either into the front slots or the rear slots and can enable the probe tips of
    Type: Grant
    Filed: October 21, 2016
    Date of Patent: March 20, 2018
    Assignees: Nanjing Institute of Enviormental Sciences, Ministry of Environmental Protection, P.R.C., Chongqing University of Arts and Sciences
    Inventors: Weixin Li, Wenlin Wang, Qiang Li, Bo Liu, Yinjing Wan, Ruiming Han, Xiaoyan Tang, Wenjing Li, Fei He, Wei Zhuang, Changxin Zou, Aiping Liu, Shoujing Yin, Xiaohan Li, Guoquan Pan
  • Publication number: 20170219491
    Abstract: A spliced detection apparatus for simultaneous wide-range in-situ detection of dissolved oxygen in a sludge-water interface of the present invention comprises a dissolved oxygen shimmer host, several detection probes, a casing and detection kits, several vertically through seat chambers being disposed in the casing, the detection kits can be placed and fixed in the seat chambers, the detection kits may be placed on the sludge-water interface, and each detection kit is provided with a vertically through water passage chamber, while the front side face and the back side face of the detection kit are respectively provided with several front slots and rear slots horizontally extending into the detection kit respectively, the detection apparatus further comprises tabs, with probe grooves being provided on the tabs, each detection probe can be put into the probe groove of the corresponding tab and fixed therein, the tabs may be inserted either into the front slots or the rear slots and can enable the probe tips of
    Type: Application
    Filed: October 21, 2016
    Publication date: August 3, 2017
    Inventors: Weixin LI, Wenlin WANG, Qiang LI, Bo LIU, Yinjing WAN, Ruiming HAN, Xiaoyan TANG, Wenjing LI, Fei HE, Wei ZHUANG, Changxin ZOU, Aiping LIU, Shoujing YIN, Xiaohan LI, Guoquan PAN
  • Publication number: 20170219490
    Abstract: A detection device for simultaneous in-situ measurement of dissolved oxygen at different submerged plant leaf-water interface levels. The detection device includes a dissolved oxygen micro-optrode host. A plurality of detection probes are externally connected to the dissolved oxygen micro-optrode host and can extend out probes. The detection device includes a leaf clamp having an upper clamping head, a lower clamping head, a hinged shaft and a clamping handle. Each of the upper and lower clamping head includes a plurality of water passing cavities penetrating through the back and the front thereof. Each of the upper and lower clamping head includes a plurality of slots horizontally extending inwardly of the corresponding clamping head. The detection device includes a plurality of insertion pieces having a probe groove. The detection probe is locatable in the respective probe groove for fixation. The insertion pieces are insertable and fixable in the slots.
    Type: Application
    Filed: October 21, 2016
    Publication date: August 3, 2017
    Inventors: Wenlin WANG, Weixin LI, Qiang LI, Bo LIU, Yinjing WAN, Ruiming HAN, Xiaoyan TANG, Wenjing LI, Fei HE, Wei ZHUANG, Changxin ZOU, Aiping LIU, Shoujing YIN, Xiaohan LI, Guoquan PAN, Weimin WANG