Patents by Inventor Xiaokang Shi

Xiaokang Shi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8495523
    Abstract: A mechanism is provided for optimizing a photolithograph mask. A given target pattern is received. An initial fictitious mask is generated from the given target pattern and an initial value of ?2 is selected where the initial value of ?2 is used to determine a light intensity and a wafer image. The light intensity for each pixel in the initial fictitious mask and the wafer image for each pixel in the initial fictitious mask are then determined. A determination is then made as to whether a convergence has been achieved by comparing the wafer image generated from the fictitious mask to the given target pattern. Responsive to a convergence of the wafer image generated from the fictitious mask to the given target pattern, a final mask is generated to use to transfer an image to a wafer.
    Type: Grant
    Filed: June 25, 2012
    Date of Patent: July 23, 2013
    Assignee: International Business Machines Corporation
    Inventors: Ying Liu, Sani R. Nassif, Xiaokang Shi
  • Patent number: 8495524
    Abstract: A mechanism is provided for optimizing a photolithograph mask. A given target pattern is received. An initial fictitious mask is generated from the given target pattern and an initial value of ?2 is selected where the initial value of ?2 is used to determine a light intensity and a wafer image. The light intensity for each pixel in the initial fictitious mask and the wafer image for each pixel in the initial fictitious mask are then determined. A determination is then made as to whether a convergence has been achieved by comparing the wafer image generated from the fictitious mask to the given target pattern. Responsive to a convergence of the wafer image generated from the fictitious mask to the given target pattern, a final mask is generated to use to transfer an image to a wafer.
    Type: Grant
    Filed: June 25, 2012
    Date of Patent: July 23, 2013
    Assignee: International Business Machines Corporation
    Inventors: Ying Liu, Sani R. Nassif, Xiaokang Shi
  • Patent number: 8473872
    Abstract: A mechanism is provided for optimizing a photolithograph mask. A given target pattern is received. An initial fictitious mask is generated from the given target pattern and an initial value of ?2 is selected where the initial value of ?2 is used to determine a light intensity and a wafer image. The light intensity for each pixel in the initial fictitious mask and the wafer image for each pixel in the initial fictitious mask are then determined. A determination is then made as to whether a convergence has been achieved by comparing the wafer image generated from the fictitious mask to the given target pattern. Responsive to a convergence of the wafer image generated from the fictitious mask to the given target pattern, a final mask is generated to use to transfer an image to a wafer.
    Type: Grant
    Filed: June 25, 2012
    Date of Patent: June 25, 2013
    Assignee: International Business Machines Corporation
    Inventors: Ying Liu, Sani R. Nassif, Xiaokang Shi
  • Patent number: 8458620
    Abstract: A mechanism is provided for optimizing a photolithograph mask. A given target pattern is received. An initial fictitious mask is generated from the given target pattern and an initial value of ?2 is selected where the initial value of ?2 is used to determine a light intensity and a wafer image. The light intensity for each pixel in the initial fictitious mask and the wafer image for each pixel in the initial fictitious mask are then determined. A determination is then made as to whether a convergence has been achieved by comparing the wafer image generated from the fictitious mask to the given target pattern. Responsive to a convergence of the wafer image generated from the fictitious mask to the given target pattern, a final mask is generated to use to transfer an image to a wafer.
    Type: Grant
    Filed: June 25, 2012
    Date of Patent: June 4, 2013
    Assignee: International Business Machines Corporation
    Inventors: Ying Liu, Sani R. Nassif, Xiaokang Shi
  • Patent number: 8453074
    Abstract: A mechanism is provided for optimizing a photolithograph mask. A given target pattern is received. An initial fictitious mask is generated from the given target pattern and an initial value of ?2 is selected where the initial value of ?2 is used to determine a light intensity and a wafer image. The light intensity for each pixel in the initial fictitious mask and the wafer image for each pixel in the initial fictitious mask are then determined. A determination is then made as to whether a convergence has been achieved by comparing the wafer image generated from the fictitious mask to the given target pattern. Responsive to a convergence of the wafer image generated from the fictitious mask to the given target pattern, a final mask is generated to use to transfer an image to a wafer.
    Type: Grant
    Filed: June 25, 2012
    Date of Patent: May 28, 2013
    Assignee: International Business Machines Corporation
    Inventors: Ying Liu, Sani R. Nassif, Xiaokang Shi
  • Publication number: 20120278769
    Abstract: A mechanism is provided for optimizing a photolithograph mask. A given target pattern is received. An initial fictitious mask is generated from the given target pattern and an initial value of ?2 is selected where the initial value of ?2 is used to determine a light intensity and a wafer image. The light intensity for each pixel in the initial fictitious mask and the wafer image for each pixel in the initial fictitious mask are then determined. A determination is then made as to whether a convergence has been achieved by comparing the wafer image generated from the fictitious mask to the given target pattern. Responsive to a convergence of the wafer image generated from the fictitious mask to the given target pattern, a final mask is generated to use to transfer an image to a wafer.
    Type: Application
    Filed: June 25, 2012
    Publication date: November 1, 2012
    Applicant: International Business Machines Corporation
    Inventors: Ying Liu, Sani R. Nassif, Xiaokang Shi
  • Publication number: 20120266113
    Abstract: A mechanism is provided for optimizing a photolithograph mask. A given target pattern is received. An initial fictitious mask is generated from the given target pattern and an initial value of ?2 is selected where the initial value of ?2 is used to determine a light intensity and a wafer image. The light intensity for each pixel in the initial fictitious mask and the wafer image for each pixel in the initial fictitious mask are then determined. A determination is then made as to whether a convergence has been achieved by comparing the wafer image generated from the fictitious mask to the given target pattern. Responsive to a convergence of the wafer image generated from the fictitious mask to the given target pattern, a final mask is generated to use to transfer an image to a wafer.
    Type: Application
    Filed: June 25, 2012
    Publication date: October 18, 2012
    Applicant: International Business Machines Corporation
    Inventors: Ying Liu, Sani R. Nassif, Xiaokang Shi
  • Publication number: 20120266112
    Abstract: A mechanism is provided for optimizing a photolithograph mask. A given target pattern is received. An initial fictitious mask is generated from the given target pattern and an initial value of ?2 is selected where the initial value of ?2 is used to determine a light intensity and a wafer image. The light intensity for each pixel in the initial fictitious mask and the wafer image for each pixel in the initial fictitious mask are then determined. A determination is then made as to whether a convergence has been achieved by comparing the wafer image generated from the fictitious mask to the given target pattern. Responsive to a convergence of the wafer image generated from the fictitious mask to the given target pattern, a final mask is generated to use to transfer an image to a wafer.
    Type: Application
    Filed: June 25, 2012
    Publication date: October 18, 2012
    Applicant: International Business Machines Corporation
    Inventors: Ying Liu, Sani R. Nassif, Xiaokang Shi
  • Publication number: 20120266114
    Abstract: A mechanism is provided for optimizing a photolithograph mask. A given target pattern is received. An initial fictitious mask is generated from the given target pattern and an initial value of ?2 is selected where the initial value of ?2 is used to determine a light intensity and a wafer image. The light intensity for each pixel in the initial fictitious mask and the wafer image for each pixel in the initial fictitious mask are then determined. A determination is then made as to whether a convergence has been achieved by comparing the wafer image generated from the fictitious mask to the given target pattern. Responsive to a convergence of the wafer image generated from the fictitious mask to the given target pattern, a final mask is generated to use to transfer an image to a wafer.
    Type: Application
    Filed: June 25, 2012
    Publication date: October 18, 2012
    Applicant: International Business Machines Corporation
    Inventors: Ying Liu, Sani R. Nassif, Xiaokang Shi
  • Publication number: 20120266111
    Abstract: A mechanism is provided for optimizing a photolithograph mask. A given target pattern is received. An initial fictitious mask is generated from the given target pattern and an initial value of ?2 is selected where the initial value of ?2 is used to determine a light intensity and a wafer image. The light intensity for each pixel in the initial fictitious mask and the wafer image for each pixel in the initial fictitious mask are then determined. A determination is then made as to whether a convergence has been achieved by comparing the wafer image generated from the fictitious mask to the given target pattern. Responsive to a convergence of the wafer image generated from the fictitious mask to the given target pattern, a final mask is generated to use to transfer an image to a wafer.
    Type: Application
    Filed: June 25, 2012
    Publication date: October 18, 2012
    Applicant: International Business Machines Corporation
    Inventors: Ying Liu, Sani R. Nassif, Xiaokang Shi
  • Publication number: 20120260221
    Abstract: A mechanism is provided for optimizing a photolithograph mask. A given target pattern is received. An initial fictitious mask is generated from the given target pattern and an initial value of ?2 is selected where the initial value of ?2 is used to determine a light intensity and a wafer image. The light intensity for each pixel in the initial fictitious mask and the wafer image for each pixel in the initial fictitious mask are then determined. A determination is then made as to whether a convergence has been achieved by comparing the wafer image generated from the fictitious mask to the given target pattern. Responsive to a convergence of the wafer image generated from the fictitious mask to the given target pattern, a final mask is generated to use to transfer an image to a wafer.
    Type: Application
    Filed: June 25, 2012
    Publication date: October 11, 2012
    Applicant: International Business Machines Corporation
    Inventors: Ying Liu, Sani R. Nassif, Xiaokang Shi
  • Patent number: 8245159
    Abstract: A mechanism is provided for optimizing a photolithograph mask. A given target pattern is received. An initial fictitious mask is generated from the given target pattern and an initial value of ?2 is selected where the initial value of ?2 is used to determine a light intensity and a wafer image. The light intensity for each pixel in the initial fictitious mask and the wafer image for each pixel in the initial fictitious mask are then determined. A determination is then made as to whether a convergence has been achieved by comparing the wafer image generated from the fictitious mask to the given target pattern. Responsive to a convergence of the wafer image generated from the fictitious mask to the given target pattern, a final mask is generated to use to transfer an image to a wafer.
    Type: Grant
    Filed: August 5, 2009
    Date of Patent: August 14, 2012
    Assignee: International Business Machines Corporation
    Inventors: Ying Liu, Sani R. Nassif, Xiaokang Shi
  • Publication number: 20110035709
    Abstract: A mechanism is provided for optimizing a photolithograph mask. A given target pattern is received. An initial fictitious mask is generated from the given target pattern and an initial value of ?2 is selected where the initial value of ?2 is used to determine a light intensity and a wafer image. The light intensity for each pixel in the initial fictitious mask and the wafer image for each pixel in the initial fictitious mask are then determined. A determination is then made as to whether a convergence has been achieved by comparing the wafer image generated from the fictitious mask to the given target pattern. Responsive to a convergence of the wafer image generated from the fictitious mask to the given target pattern, a final mask is generated to use to transfer an image to a wafer.
    Type: Application
    Filed: August 5, 2009
    Publication date: February 10, 2011
    Applicant: International Business Machines Corporation
    Inventors: Ying Liu, Sani R. Nassif, Xiaokang Shi