Abstract: The present disclosure provides a magnetron sputtering equipment, including: a mesh shielding plate disposed in a vacuum chamber of the magnetron sputtering equipment; the vacuum chamber includes one or more coating chambers, and the mesh shielding plate is disposed on a sidewall within the coating chamber, which facilitates the smooth operation of the magnetron sputtering target, and avoids the gas pollution of the vacuum chamber, and the installation and disassembly are simple and fast. The present disclosure provides an important solution and approach for a production line of the magnetic sputtering equipment.

Abstract: Disclosed herein is a method for preparing coal-based, briquetted activated carbon. The method includes subjecting raw coal to a briquetting process, pulverizing the briquettes into particles, and performing carbonization and activation to obtain activated carbon. The briquetting process includes pulverizing raw coal to produce a feed, feeding the feed into a feed bin for degassing, adjusting the temperature and the water content of the feed in the feed bin, and feeding the feed in the feed bin into a briquetting apparatus for briquetting to form coal briquettes. The raw coal briquetting process of the preparation method is suited to a wide variety of coal, including non-caking coal. The preparation method yields a coal briquette product with a strength greater than 89% without any binder, which is beneficial to improve the strength and the like of activated carbon.

Abstract: Disclosed herein is a method for preparing coal-based, briquetted activated carbon. The method includes subjecting raw coal to a briquetting process, pulverizing the briquettes into particles, and performing carbonization and activation to obtain activated carbon. The briquetting process includes pulverizing raw coal to produce a feed, feeding the feed into a feed bin for degassing, adjusting the temperature and the water content of the feed in the feed bin, and feeding the feed in the feed bin into a briquetting apparatus for briquetting to form coal briquettes. The raw coal briquetting process of the preparation method is suited to a wide variety of coal, including non-caking coal. The preparation method yields a coal briquette product with a strength greater than 89% without any binder, which is beneficial to improve the strength and the like of activated carbon.

Abstract: The present invention provides a method of wet etching a silicon slice including a silicon substrate and a metal film layer thereon comprising steps of: performing lithographic process to the silicon slice forming a masked silicon slice comprising the silicon substrate and a partially masked metal film thereon; immersing the masked silicon slice into an etchant; rotating the masked silicon slice in the etchant; injecting high-purity nitrogen gas into the etchant for agitating the etchant; removing the masked silicon slice out of the etchant, upon completion of etching; and rinsing the masked silicon slice with deionized water.

Abstract: The present invention provides a method of wet etching a silicon slice including a silicon substrate and a metal film layer thereon comprising steps of: performing lithographic process to the silicon slice forming a masked silicon slice comprising the silicon substrate and a partially masked metal film thereon; immersing the masked silicon slice into an etchant; rotating the masked silicon slice in the etchant; injecting high-purity nitrogen gas into the etchant for agitating the etchant; removing the masked silicon slice out of the etchant, upon completion of etching; and rinsing the masked silicon slice with deionized water.