Abstract: A large-scale fabrication technique for PIM-1 asymmetric membranes doped with low-molecular-weight polyethylene glycol for gas separation. Based on the membrane fabrication technique of dry/wet phase inversion, firstly, the coagulation process of casting solution is regulated by low-molecular-weight polyethylene glycol to thin the dense functional layer, to improve the hydrophilicity of the membrane structure, and to form mass transfer channels for the diffusion of polyethylene glycol into the dense functional layer. Then, directional migration and enrichment of polyethylene glycol are realized through capillary action induced by directional water evaporation for large-scale fabrication of PIM-1 asymmetric membranes doped with low-molecular-weight polyethylene glycol in the dense functional layer for gas separation, and thereafter high permeation ability and high selectivity are achieved simultaneously.

Abstract: The present invention provides a high-efficient magnesium ion removal system for salt lake brine based on in situ alkali production using bipolar membrane electrochemical process, it is constructed with cathode, cathode cell, anode, anode cell, and anion exchange membranes, bipolar membranes, acid cells, alkali cells, mesh materials for precipitate aggregation, acid-washing cells.

Abstract: The present invention belongs to the field of alkaline polymer electrolyte membranes, and relates to a comb-shaped structure polybenzimidazole anion exchange membrane with high conductivity and preparation method thereof. In the invention, firstly, polybenzimidazole is grafted with the non-cationic side chains to the max grafting rate to synthesize the de-protonated comb-shaped polybenzimidazole material, avoiding the N—H in benzimidazole forms ionic binding with cationic functional groups, which will reduce the reactivity and mobility of cationic groups; then react de-protonated comb-shaped polybenzimidazole with quaternization reagent to attach the pendent side chain with cationic functional groups, making it easy to aggregate to form ion clusters and hydrophilic/hydrophobic microphase separation. The anion exchange membrane prepared in this invention has excellent conductivity, mechanical properties and alkaline stability.

Abstract: A sensor package, a sensor system, and a method for fabricating the sensor package are described that include a sensing chip having dispense chemistry disposed over an array of conductive elements. In an implementation, the sensor package may include a sensing chip that may include at least one conductive element, wherein the at least one conductive element may be part of an array of conductive elements defining a M by N matrix, where M is a number of rows of the at least one conductive element and N is a number of columns of the at least one conductive element. The sensing chip may further include dispense chemistry that may be disposed on the at least one conductive element and at least one contact pad. The sensor package may further include a microfluidic cap that may be positioned over at least a portion of the sensing chip, wherein the microfluidic cap and the sensing chip may define a cavity that may be configured to receive a fluid sample.

Abstract: A sensor system includes an assay chamber configured to receive a fluid sample. Dispense chemistry disposed within the assay chamber. A first electrode structure includes at least one conductive element and a second electrode structure proximate to the first electrode structure is configured to transmit an electrical signal through the fluid sample. The first electrode structure is configured to receive the electrical signal transmitted through the fluid sample and responsively generate a sense signal. The sense signal being indicative of an interaction of the fluid sample with the dispense chemistry. A controller is electrically coupled to the first electrode structure and configured to identify at least one analyte in the fluid sample based on at least the sense signal generated by the first electrode structure. The first electrode structure is embedded within a base substrate and the second electrode structure is embedded within a microfluidic cap that is coupled to the base substrate.

Abstract: The present invention belongs to the field of alkaline polymer electrolyte membranes, and relates to a comb-shaped structure polybenzimidazole anion exchange membrane with high conductivity and preparation method thereof. In the invention, firstly, polybenzimidazole is grafted with the non-cationic side chains to the max grafting rate to synthesize the de-protonated comb-shaped polybenzimidazole material, avoiding the N—H in benzimidazole forms ionic binding with cationic functional groups, which will reduce the reactivity and mobility of cationic groups; then react de-protonated comb-shaped polybenzimidazole with quaternization reagent to attach the pendent side chain with cationic functional groups, making it easy to aggregate to form ion clusters and hydrophilic/hydrophobic microphase separation. The anion exchange membrane prepared in this invention has excellent conductivity, mechanical properties and alkaline stability.

Abstract: A sensor package, a sensor system, and a method for fabricating the sensor package are described that include a sensing chip having dispense chemistry disposed over an array of conductive elements. In an implementation, the sensor package may include a sensing chip that may include at least one conductive element, wherein the at least one conductive element may be part of an array of conductive elements defining a M by N matrix, where M is a number of rows of the at least one conductive element and N is a number of columns of the at least one conductive element. The sensing chip may further include dispense chemistry that may be disposed on the at least one conductive element and at least one contact pad. The sensor package may further include a microfluidic cap that may be positioned over at least a portion of the sensing chip, wherein the microfluidic cap and the sensing chip may define a cavity that may be configured to receive a fluid sample.

Abstract: The present invention provides a surface modification method based on the polymerization and cross-linking solidification of dopamine and/or its derivatives, which belongs to the technical field about composite material fabrication. The principle of dopamine polymerization and the formation process of polydopamine coating layer are the foundation of the present invention. This innovative method is established after deeply analyzing the failure mechanism of polydopamine coating layer in severe environments, such as organic solvents and acidic/alkalic environments. The critical work is finding out an eligible cross-linking agent which could react with the active functional groups in polydopamine. After cross-linking reaction, the soluble low-molecular-weight dopamine oligomers could be transformed into the insoluble three-dimensional stereographic networks.

Abstract: The present invention provides a surface modification method based on the polymerization and cross-linking solidification of dopamine and/or its derivatives, which belongs to the technical field about composite material fabrication. The principle of dopamine polymerization and the formation process of polydopamine coating layer are the foundation of the present invention. This innovative method is established after deeply analyzing the failure mechanism of polydopamine coating layer in severe environments, such as organic solvents and acidic/alkalic environments. The critical work is finding out an eligible cross-linking agent which could react with the active functional groups in polydopamine. After cross-linking reaction, the soluble low-molecular-weight dopamine oligomers could be transformed into the insoluble three-dimensional stereographic networks.

Abstract: A sensor system includes an assay chamber configured to receive a fluid sample. Dispense chemistry disposed within the assay chamber. A first electrode structure includes at least one conductive element and a second electrode structure proximate to the first electrode structure is configured to transmit an electrical signal through the fluid sample. The first electrode structure is configured to receive the electrical signal transmitted through the fluid sample and responsively generate a sense signal. The sense signal being indicative of an interaction of the fluid sample with the dispense chemistry. A controller is electrically coupled to the first electrode structure and configured to identify at least one analyte in the fluid sample based on at least the sense signal generated by the first electrode structure. The first electrode structure is embedded within a base substrate and the second electrode structure is embedded within a microfluidic cap that is coupled to the base substrate.

Abstract: According to various embodiments of this disclosure, an electrochemical sensor/cell includes a substrate with a cavity formed on a first side of the substrate, an ionic conductor is disposed within the cavity, and a lid assembly positioned over the cavity. The lid assembly may include a plurality of electrodes attached to a glass or ceramic panel. The glass or ceramic panel may have one or more apertures allowing gas to flow therethrough. The plurality of electrodes include a working electrode configured to react a molecular species (e.g., gas or aerosolized substance) that diffuses through the one or more apertures, wherein said reaction produces ions mobile in the ionic conductor between two or more of the plurality of electrodes. The lid assembly may further include a three-phase interface positioned over at least a portion of the plurality of electrodes.

Abstract: Methods of fabricating an electromechanical systems device that mitigate permanent adhesion, or stiction, of the moveable components of the device are provided. The methods provide an amorphous silicon sacrificial layer with improved and reproducible surface roughness. The amorphous silicon sacrificial layers further exhibit excellent adhesion to common materials used in electromechanical systems devices.

Abstract: The efficiency of an etching process may be increased in various ways, and the cost of an etching process may be decreased. Unused etchant may be isolated and recirculated during the etching process. Etching byproducts may be collected and removed from the etching system during the etching process. Components of the etchant may be isolated and used to general additional etchant. Either or both of the etchant or the layers being etched may also be optimized for a particular etching process.

Abstract: The efficiency of an etching process may be increased in various ways, and the cost of an etching process may be decreased. Unused etchant may be isolated and recirculated during the etching process. Etching byproducts may be collected and removed from the etching system during the etching process. Components of the etchant may be isolated and used to general additional etchant. Either or both of the etchant or the layers being etched may also be optimized for a particular etching process.

Abstract: This disclosure provides systems, methods, and apparatus for encapsulated electromechanical systems. In one aspect, a release path includes a release hole through an encapsulation layer. The release path exposes a portion of a first sacrificial layer that extends beyond a second sacrificial layer in a horizontal direction. This allows the first sacrificial layer and the second sacrificial layer to later be etched through the release path. The corresponding electromechanical system device includes a shell layer encapsulating a mechanical layer. A conformal layer seals a release hole that extends through a shell layer. A portion of the conformal layer blocks the opening of the release passage within the release hole. The release passage has substantially the same vertical height as a gap that defines the spacing between the mechanical layer and a substrate.

Abstract: A MEMS comprising a sacrificial structure, which comprises a faster etching portion and a slower etching portion, exhibits reduced damage to structural features when in forming a cavity in the MEMS by etching away the sacrificial structure. The differential etching rates mechanically decouple structural layers, thereby reducing stresses in the device during the etching process. Methods and systems are also provided.

Abstract: Methods of fabricating an electromechanical systems device that mitigate permanent adhesion, or stiction, of the moveable components of the device are provided. The methods provide an amorphous silicon sacrificial layer with improved and reproducible surface roughness. The amorphous silicon sacrificial layers further exhibit excellent adhesion to common materials used in electromechanical systems devices.

Abstract: Methods of fabricating an electromechanical systems device that mitigate permanent adhesion, or stiction, of the moveable components of the device are provided. The methods provide an amorphous silicon sacrificial layer with improved and reproducible surface roughness. The amorphous silicon sacrificial layers further exhibit excellent adhesion to common materials used in electromechanical systems devices.

Abstract: Methods of fabricating an electromechanical systems device that mitigate permanent adhesion, or stiction, of the moveable components of the device are provided. The methods provide an amorphous silicon sacrificial layer with improved and reproducible surface roughness. The amorphous silicon sacrificial layers further exhibit excellent adhesion to common materials used in electromechanical systems devices.

Abstract: A method for etching a target material in the presence of a structural material with improved selectivity uses a vapor phase etchant and a co-etchant. Embodiments of the method exhibit improved selectivities of from at least about 2-times to at least about 100-times compared with a similar etching process not using a co-etchant. In some embodiments, the target material comprises a metal etchable by the vapor phase etchant. Embodiments of the method are particularly useful in the manufacture of MEMS devices, for example, interferometric modulators. In some embodiments, the target material comprises a metal etchable by the vapor phase etchant, for example, molybdenum and the structural material comprises a dielectric, for example silicon dioxide.