Patents by Inventor Xiaowei Shu

Xiaowei Shu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of Forming Interlayer Dielectrics
    Publication number: 20140057439
    Abstract: A method of forming interlayer dielectric comprising the steps of forming a first undoped layer, forming in-situ and sequentially a doped layer and a second undoped layer on the first undoped layer, and planarizing the second undoped layer.
    Type: Application
    Filed: August 21, 2012
    Publication date: February 27, 2014
    Inventors: JIANDONG ZHANG, Han Chuan Fang, jianjun Zhang, Xiaowei Shu, MIAO ZHANG