Abstract: The embodiments of the present disclosure disclose a scroll type micro-compressor, and a method for machining a fixed scroll plate and an orbit scroll plate thereof. The scroll type micro-compressor comprises a fixed scroll plate and an orbit scroll plate each integrally made with a monocrystalline silicon substrate; the compressor device has an Oldham ring structure, and reduces a mass of the orbit scroll plate by optimizing a design of a substrate of the orbit scroll plate; a cross-sectional shape of a plurality of micropores provided on a lower surface of the fixed scroll plate is set as of a fan ring, in which an electrode material is accommodated to maintain an electric field uniformity and reduce an electric field loss; and hydrophilia of inner surfaces is changed to prevent a top leakage and facilitate capillary filling of a compression chamber.

Abstract: The embodiments of the present disclosure disclose a scroll type micro-compressor, and a method for machining a fixed scroll plate and an orbit scroll plate thereof. The scroll type micro-compressor comprises a fixed scroll plate and an orbit scroll plate each integrally made with a monocrystalline silicon substrate; the compressor device has an Oldham ring structure, and reduces a mass of the orbit scroll plate by optimizing a design of a substrate of the orbit scroll plate; a cross-sectional shape of a plurality of micropores provided on a lower surface of the fixed scroll plate is set as of a fan ring, in which an electrode material is accommodated to maintain an electric field uniformity and reduce an electric field loss; and hydrophilia of inner surfaces is changed to prevent a top leakage and facilitate capillary filling of a compression chamber.