Patents by Inventor Xiaoxue CHEN
Xiaoxue CHEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20250107043Abstract: Disclosed are a vapor chamber, a radiator and an electronic device. The vapor chamber includes: a bottom plate, a top plate, a side plate and a backflow piece. The bottom plate includes a first heat dissipation area and a second heat dissipation area provided at a peripheral side of the first heat dissipation area. The first heat dissipation area is provided with at least a first capillary structure layer on the side near the top plate, and the second heat dissipation area is provided with at least a second capillary structure layer on the side near the top plate. The capillary force of the first capillary structure layer is greater than that of the second capillary structure layer, and the flow resistance of the fluid medium in the second capillary structure layer is smaller than that in the first capillary structure layer.Type: ApplicationFiled: February 13, 2023Publication date: March 27, 2025Inventors: Zhen SUN, Xiaoxue CHEN, Zhiwei DUAN, Qingsong XU
-
Publication number: 20250062098Abstract: A method for dynamic aberration correction includes generating a primary electron beam with an electron beam source. The method includes directing the primary electron beams to a sample with an electron-optical column and deflecting the primary electron beam to an objective lens of the electron-optical column using a first Wien filter to correct for coma blur in the primary electron beam. The method includes generating off-axis chromatic aberration in the primary electron beam using the objective lens. The method includes adjusting one of a strength or orientation of the Wien filter to correct the off-axis chromatic aberration in the primary electron beam generated by the objective lens. The method includes detecting one or more secondary electrons emanating from the sample.Type: ApplicationFiled: January 26, 2024Publication date: February 20, 2025Inventors: Xiaoxue Chen, Youfei Jiang, Balaji Srinivasan, Arjun Hegde
-
Publication number: 20250037967Abstract: Systems and methods of imaging a sample using a charged-particle beam apparatus are disclosed. The charged-particle beam apparatus may include a compound objective lens comprising a magnetic lens and an electrostatic lens, the magnetic lens comprising a cavity, and an electron detector located immediately upstream from a polepiece of the magnetic lens and inside the cavity of the magnetic lens. In some embodiments, deflectors may be located between the electron detector and the opening of the polepiece adjacent to the sample to achieve a large field of view. Electron distributions among the detectors can be manipulated without changing the landing energy by changing the potential of the control electrode(s) in the electrostatic objective lens. The electron source can be operated with several discrete potentials to cover different landing energies, while the potential difference between electron source and the extractor is fixed.Type: ApplicationFiled: October 10, 2024Publication date: January 30, 2025Inventors: Xuedong LIU, Weimin ZHOU, Xiaoxue CHEN, Xiaoyu JI, Heng LI, Shahedul HOQUE, Zongyao LI, Shuhao LIU, Weiming REN
-
Patent number: 12196692Abstract: Systems and methods of providing a probe spot in multiple modes of operation of a charged-particle beam apparatus are disclosed. The method may comprise activating a charged-particle source to generate a primary charged-particle beam and selecting between a first mode and a second mode of operation of the charged-particle beam apparatus. In the flooding mode, the condenser lens may focus at least a first portion of the primary charged-particle beam passing through an aperture of the aperture plate to form a second portion of the primary charged-particle beam, and substantially all of the second portion is used to flood a surface of a sample. In the inspection mode, the condenser lens may focus a first portion of the primary charged-particle beam such that the aperture of the aperture plate blocks off peripheral charged-particles to form the second portion of the primary charged-particle beam used to inspect the sample surface.Type: GrantFiled: September 30, 2020Date of Patent: January 14, 2025Assignee: ASML Netherlands B.V.Inventors: Weiming Ren, Xuedong Liu, Zhong-wei Chen, Xiaoyu Ji, Xiaoxue Chen, Weimin Zhou, Frank Nan Zhang
-
Patent number: 12142455Abstract: Systems and methods of imaging a sample using a charged-particle beam apparatus are disclosed. The charged-particle beam apparatus may include a compound objective lens comprising a magnetic lens and an electrostatic lens, the magnetic lens comprising a cavity, and an electron detector located immediately upstream from a polepiece of the magnetic lens and inside the cavity of the magnetic lens. In some embodiments, deflectors may be located between the electron detector and the opening of the polepiece adjacent to the sample to achieve a large field of view. Electron distributions among the detectors can be manipulated without changing the landing energy by changing the potential of the control electrode(s) in the electrostatic objective lens. The electron source can be operated with several discrete potentials to cover different landing energies, while the potential difference between electron source and the extractor is fixed.Type: GrantFiled: April 8, 2021Date of Patent: November 12, 2024Assignee: ASML Netherlands B.V.Inventors: Xuedong Liu, Weimin Zhou, Xiaoxue Chen, Xiaoyu Ji, Heng Li, Shahedul Hoque, Zongyao Li, Shuhao Liu, Weiming Ren
-
Patent number: 11513087Abstract: Systems and methods of providing a probe spot in multiple modes of operation of a charged-particle beam apparatus are disclosed. The method may comprise activating a charged-particle source to generate a primary charged-particle beam and selecting between a first mode and a second mode of operation of the charged-particle beam apparatus. In the flooding mode, the condenser lens may focus at least a first portion of the primary charged-particle beam passing through an aperture of the aperture plate to form a second portion of the primary charged-particle beam, and substantially all of the second portion is used to flood a surface of a sample. In the inspection mode, the condenser lens may focus a first portion of the primary charged-particle beam such that the aperture of the aperture plate blocks off peripheral charged-particles to form the second portion of the primary charged-particle beam used to inspect the sample surface.Type: GrantFiled: October 16, 2020Date of Patent: November 29, 2022Assignee: ASML Netherlands B.V.Inventors: Weiming Ren, Xuedong Liu, Zhong-wei Chen, Xiaoyu Ji, Xiaoxue Chen, Weimin Zhou, Frank Nan Zhang
-
Publication number: 20220375712Abstract: Systems and methods of providing a probe spot in multiple modes of operation of a charged-particle beam apparatus are disclosed. The method may comprise activating a charged-particle source to generate a primary charged-particle beam and selecting between a first mode and a second mode of operation of the charged-particle beam apparatus. In the flooding mode, the condenser lens may focus at least a first portion of the primary charged-particle beam passing through an aperture of the aperture plate to form a second portion of the primary charged-particle beam, and substantially all of the second portion is used to flood a surface of a sample. In the inspection mode, the condenser lens may focus a first portion of the primary charged-particle beam such that the aperture of the aperture plate blocks off peripheral charged-particles to form the second portion of the primary charged-particle beam used to inspect the sample surface.Type: ApplicationFiled: September 30, 2020Publication date: November 24, 2022Applicant: ASML NETHERLANDS B.V.Inventors: Weiming REN, Xuedong LIU, Zhong-wei CHEN, Xiaoyu JI, Xiaoxue CHEN, Weimin ZHOU, Frank Nan ZHANG
-
Publication number: 20210319977Abstract: Systems and methods of imaging a sample using a charged-particle beam apparatus are disclosed. The charged-particle beam apparatus may include a compound objective lens comprising a magnetic lens and an electrostatic lens, the magnetic lens comprising a cavity, and an electron detector located immediately upstream from a polepiece of the magnetic lens and inside the cavity of the magnetic lens. In some embodiments, deflectors may be located between the electron detector and the opening of the polepiece adjacent to the sample to achieve a large field of view. Electron distributions among the detectors can be manipulated without changing the landing energy by changing the potential of the control electrode(s) in the electrostatic objective lens. The electron source can be operated with several discrete potentials to cover different landing energies, while the potential difference between electron source and the extractor is fixed.Type: ApplicationFiled: April 8, 2021Publication date: October 14, 2021Inventors: Xuedong LIU, Weimin ZHOU, Xiaoxue CHEN, Xiaoyu JI, Heng LI, Shahedul HOQUE, Zongyao LI, Shuhao LIU, Weiming REN
-
Publication number: 20210116398Abstract: Systems and methods of providing a probe spot in multiple modes of operation of a charged-particle beam apparatus are disclosed. The method may comprise activating a charged-particle source to generate a primary charged-particle beam and selecting between a first mode and a second mode of operation of the charged-particle beam apparatus. In the flooding mode, the condenser lens may focus at least a first portion of the primary charged-particle beam passing through an aperture of the aperture plate to form a second portion of the primary charged-particle beam, and substantially all of the second portion is used to flood a surface of a sample. In the inspection mode, the condenser lens may focus a first portion of the primary charged-particle beam such that the aperture of the aperture plate blocks off peripheral charged-particles to form the second portion of the primary charged-particle beam used to inspect the sample surface.Type: ApplicationFiled: October 16, 2020Publication date: April 22, 2021Inventors: Weiming REN, Xuedong LIU, Zhong-wei CHEN, Xiaoyu JI, Xiaoxue CHEN, Weimin ZHOU, Frank Nan ZHANG
-
Patent number: 10718597Abstract: The present disclosure is directed to significantly improving the adiabatic shear banding susceptibility of pure refractory metals as well as overcoming the physical dimension limitations when making kinetic energy penetrators. These improvements may be achieved by arranging interlayers between plasticly deformed refractory metal material layers. Disclosed herein are methods of making material for kinetic energy penetrator applications, the methods comprising: severely plasticly deforming a refractory metal material until the grain size of the refractory metal material is within one of ultrafine grain and nanocrystalline regimes; arranging an interlayer material adjacent the refractory metal material; and diffusion bonding the interlayer material to the refractory metal material.Type: GrantFiled: July 23, 2018Date of Patent: July 21, 2020Assignee: The University of North Carolina at CharlotteInventors: Qiuming Wei, Xiaoxue Chen
-
Publication number: 20190063889Abstract: The present disclosure is directed to significantly improving the adiabatic shear banding susceptibility of pure refractory metals as well as overcoming the physical dimension limitations when making kinetic energy penetrators. These improvements may be achieved by arranging interlayers between plasticly deformed refractory metal material layers. Disclosed herein are methods of making material for kinetic energy penetrator applications, the methods comprising: severely plasticly deforming a refractory metal material until the grain size of the refractory metal material is within one of ultrafine grain and nanocrystalline regimes; arranging an interlayer material adjacent the refractory metal material; and diffusion bonding the interlayer material to the refractory metal material.Type: ApplicationFiled: July 23, 2018Publication date: February 28, 2019Inventors: Qiuming WEI, Xiaoxue CHEN