Abstract: A method for cleaning semiconductor substrate without damaging patterned structure on the semiconductor substrate using ultra/mega sonic device comprises applying liquid into a space between a substrate and an ultra/mega sonic device; setting an ultra/mega sonic power supply at frequency f1 and power P1 to drive the ultra/mega sonic device; before bubble cavitation in the liquid damaging patterned structure on the substrate, setting the ultra/mega sonic power supply at zero output; after temperature inside bubble cooling down to a set temperature, setting the ultra/mega sonic power supply at frequency f1 and power P1 again; detecting power on time at power P1 and frequency f1 and power off time separately or detecting amplitude of each waveform output by the ultra/mega sonic power supply; comparing the detected power on time with a preset time ?1, or comparing the detected power off time with a preset time ?2, or comparing detected amplitude of each waveform with a preset value, if the detected power on time

Abstract: A system for controlling damages in cleaning a semiconductor wafer comprising features of patterned structures, the system comprising: a wafer holder for temporary restraining a semiconductor wafer during a cleaning process; an inlet for delivering a cleaning liquid over a surface of the semiconductor wafer; a sonic generator configured to alternately operate at a first frequency and a first power level for a first predetermined period of time and at a second frequency and a second power level for a second predetermined period of time, to impart sonic energy to the cleaning liquid, the first predetermined period of time and the second predetermined period of time consecutively following one another; and a controller programmed to provide the cleaning parameters, wherein at least one of the cleaning parameters is determined such that a percentage of damaged features as a result of the imparting sonic energy is lower than a predetermined threshold.

Abstract: An unlocking structure of workbench ladder includes a platform and two ladders hinged to the two ends of the platform; wherein, the ladder includes an unlocking structure relative to the hinged joint of the platform, and the unlocking structure includes an operating button, rotating lock tongue and a first elastic element; the rotating lock tongue is arranged in the column and the upper end is a locking hook which is locked and located in the locking plate at the bottom of the platform; the first elastic element acts between the rotating lock tongue and the column driving and positioning the locking hook toward the locking plate to lock the ladder and the platform; the operating button acts on the rotating lock tongue to overcome the first elastic element and drive the locking hook to move in a direction opposite to the locking plate, unlocking the ladder and the platform.

Abstract: A display method and system for ultrasound-guided intervention. The method comprises: obtaining, via a probe, a data, wherein the data comprises at least a real-time ultrasound data and a real-time spatial orientation information of the probe; obtaining, by a processor, an ablation needle plan, wherein, the ablation needle plan comprises at least a probe marker for planning, a needle insertion path and a predicted ablation area corresponding to the needle insertion path, and the probe marker for planning is generated in a form that is able to indicate one side or multiple sides of the probe such that an orientation of the probe marker for planning represents a planned orientation of the probe; generating, by the processor, a guiding image for ultrasound-guided intervention according to the obtained data and the ablation needle plan; and displaying, by a display device, the guiding image.

Abstract: An unlocking structure of workbench ladder includes a platform and two ladders hinged to the two ends of the platform; wherein, the ladder includes an unlocking structure relative to the hinged joint of the platform, and the unlocking structure includes an operating button, rotating lock tongue and a first elastic element; the rotating lock tongue is arranged in the column and the upper end is a locking hook which is locked and located in the locking plate at the bottom of the platform; the first elastic element acts between the rotating lock tongue and the column driving and positioning the locking hook toward the locking plate to lock the ladder and the platform; the operating button acts on the rotating lock tongue to overcome the first elastic element and drive the locking hook to move in a direction opposite to the locking plate, unlocking the ladder and the platform.

Abstract: Assembled and combined pallet constitutes of supporting beams and skids wherein: the supporting beams are made of the hollow metal section bar and the supporting beams are equipped with the grooves along its length direction on the top; the skids are set with inserting blocks at the bottom in relation to the grooves on the top of the supporting beams and inserting blocks are inserted into the grooves along the length direction of the grooves; the supporting beam is set with a locating lever in relation to the inserting block of each skid, and the inserting block of each skid is set with a locking hole in relation to the locating lever and the locating level passes through the corresponding locking hole of the inserting block to lock the skid. The skid connection and supporting beam is reliable and the disassembly and assembly during the use is convenient and fast.

Abstract: Assembled and combined pallet constitutes of supporting beams and skids wherein: the supporting beams are made of the hollow metal section bar and the supporting beams are equipped with the grooves along its length direction on the top; the skids are set with inserting blocks at the bottom in relation to the grooves on the top of the supporting beams and inserting blocks are inserted into the grooves along the length direction of the grooves; the supporting beam is set with a locating lever in relation to the inserting block of each skid, and the inserting block of each skid is set with a locking hole in relation to the locating lever and the locating level passes through the corresponding locking hole of the inserting block to lock the skid. The skid connection and supporting beam is reliable and the disassembly and assembly during the use is convenient and fast.