Abstract: A method for synchronously inhibiting subcritical vibrations of magnetic levitation molecular pump rotor, by use of synchronously sampling signals of subcritical vibrations of the rotor generated after the rotor of the magnetic levitation molecular pump touches down so as to obtain the amplitude and the phase of subcritical vibrations of the rotor, based on which a compensation force is output for inhibiting subcritical vibrations of the rotor. Through using the present method, an accurate synchronous for signals of subcritical vibrations and fast inhibition for subcritical vibrations of the rotor is achieved.

Abstract: A method of rotor dynamic balancing for magnetic levitation molecular pump, including the steps of: activating an force free control module after activating a motor of the magnetic levitation molecular pump; if the maximum radial vibration amplitude does not exceed ½ of a protective clearance during the acceleration of the rotor under the control of the force free control module, indicating that the force free control module is able to inhibit the co-frequency vibration of the rotor, so as to allow the rotational speed of said rotor to exceed its rigid critical rotational speed; performing rotor dynamic balancing operation at a high speed by an influence coefficient method. The method of rotor dynamic balancing can directly perform rotor dynamic balancing operation with respect to the rotor at a high-speed, which facilitates the rotor dynamic balancing operation so as to perform the rotor dynamic balancing operation more quickly and efficiently.

Abstract: A rotor dynamic balancing method for a magnetic levitation molecular pump, which includes the steps of activating an open loop feed forward control module after activating a motor of the magnetic levitation molecular pump; if the maximum radial vibration amplitude does not exceed ½ of a protective clearance during the acceleration of the rotor under the control of the open loop feed forward control module, indicating that the open loop feed forward control module is able to inhibit the co-frequency vibration of the rotor, so as to allow the rotational speed of the rotor to exceed its rigid critical rotational speed; and performing a rotor dynamic balancing operation at a high speed by an influence coefficient method. This method directly performs the rotor dynamic balancing operation with respect to the rotor at a high-speed, which facilitates the rotor dynamic balancing operation so as to perform the rotor dynamic balancing operation more quickly and efficiently.

Abstract: A rotor dynamic balancing method for magnetic levitation molecular pump, includes the steps of: activating a force free control module after activating a motor of the magnetic levitation molecular pump; if the maximum radial vibration amplitude does not exceed ½ of a protective clearance during the acceleration of the rotor under the control of the force free control module, indicating that the force free control module is able to inhibit the co-frequency vibration of the rotor, so as to allow the rotational speed of the rotor to exceed its rigid critical rotational speed. Performing rotor dynamic balancing operation occurs at a high speed by an influence coefficient method. The method of rotor dynamic balancing can directly perform a rotor dynamic balancing operation with respect to the rotor at a high-speed, which facilitates the rotor dynamic balancing operation so as to perform the rotor dynamic balancing operation more quickly and efficiently.

Abstract: It is provided in the present invention a method for synchronously inhibiting subcritical vibrations of magnetic levitation molecular pump rotor, by means of synchronously sampling signals of subcritical vibrations of the rotor generated after the rotor of the magnetic levitation molecular pump touches down so as to obtain the amplitude and the phase of subcritical vibrations of the rotor, based on which outputting a compensation force for inhibiting subcritical vibrations of the rotor. Through using the present method, it is achieved of accurate synchronous for signals of subcritical vibrations and fast inhibition for subcritical vibrations of the rotor.

Abstract: A rotor dynamic balancing method for magnetic levitation molecular pump, includes activating an open loop feed forward control module after activating a motor of the magnetic levitation molecular pump; if the maximum radial vibration amplitude does not exceed ½ of a protective clearance during the acceleration of the rotor under the control of the open loop feed forward control module, indicating that the open loop feed forward control module is able to inhibit the co-frequency vibration of the rotor, so as to allow the rotational speed of the rotor to exceed its rigid critical rotational speed; and performing rotor dynamic balancing operation at a high speed by means of influence coefficient method. This method can directly perform rotor dynamic balancing operation with respect to the rotor at a high-speed, which facilitates the rotor dynamic balancing operation so as to perform the rotor dynamic balancing operation more quickly and efficiently.