Abstract: The present invention is related to micro-motion machine and micro-element fabricating machine using a 3-degree-of-freedom parallel mechanism. A micro-motion machine achieves a 3-degree-of-freedom micro movement by connecting two arms connected to prismatic flexible joints respectively, adapted to conduct vertical movements, by revolute flexible joints, and one arm connected to another prismatic flexible joint, adapted to conduct vertical movements by universal joint, to a platform by universal joint. This micro-motion machine has a relatively simple and inexpensive construction, high stiffness, and high accuracy, while exhibiting reduced inertia.

Abstract: This invention relates to the parallel structure of a spatial 3-axis machine tool with three degrees of freedom (3 DOF), which have two translational DOF and one rotational DOF. The machine tool includes a base, a mobile platform to which a tool may be attached, and three kinematic legs. Two of the three legs are in a same plane, and each have one 3-DOF spherical joint and two 1-DOF joints. The third leg has one 1-DOF joint and two universal joints. Compared with traditional machine tools, this invention possesses several advantages such as simple structure, high stiffness, low inertia, low cost, and high speed.

Abstract: This invention relates to the parallel structure of a spatial 3-axis machine tool with three degrees of freedom (3 DOF), which have two translational DOF and one rotational DOF. The machine tool includes a base, a mobile platform to which a tool may be attached, and three kinematic legs. Two of the three legs are in a same plane, and each have one 3-DOF spherical joint and two 1-DOF joints. The third leg has one 1-DOF joint and two universal joints. Compared with traditional machine tools, this invention possesses several advantages such as simple structure, high stiffness, low inertia, low cost, and high speed.