Patents by Inventor Xin-Kai HUANG

Xin-Kai HUANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ROUNDED VERTICAL WAFER VESSEL RODS
    Publication number: 20240203770
    Abstract: In an embodiment, a system includes: a base; and a rod set comprising multiple rods connected to the base, wherein each rod of the rod set comprises multiple fingers disposed in a vertically-stacked relationship to each other and separated respectively from each other by respective slots, wherein each slot is configured to receive a bevel of a wafer, and wherein each of the multiple fingers comprises a rounded end at a furthest extension.
    Type: Application
    Filed: January 19, 2024
    Publication date: June 20, 2024
    Inventors: Ching-Wen CHENG, Xin-Kai HUANG, Kuei-Hsiung CHO
  • Rounded vertical wafer vessel rods
    Patent number: 11908719
    Abstract: In an embodiment, a system includes: a base; and a rod set comprising multiple rods connected to the base, wherein each rod of the rod set comprises multiple fingers disposed in a vertically-stacked relationship to each other and separated respectively from each other by respective slots, wherein each slot is configured to receive a bevel of a wafer, and wherein each of the multiple fingers comprises a rounded end at a furthest extension.
    Type: Grant
    Filed: August 8, 2022
    Date of Patent: February 20, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ching-Wen Cheng, Xin-Kai Huang, Kuei-Hsiung Cho
  • ROUNDED VERTICAL WAFER VESSEL RODS
    Publication number: 20220384224
    Abstract: In an embodiment, a system includes: a base; and a rod set comprising multiple rods connected to the base, wherein each rod of the rod set comprises multiple fingers disposed in a vertically-stacked relationship to each other and separated respectively from each other by respective slots, wherein each slot is configured to receive a bevel of a wafer, and wherein each of the multiple fingers comprises a rounded end at a furthest extension.
    Type: Application
    Filed: August 8, 2022
    Publication date: December 1, 2022
    Inventors: Ching-Wen CHENG, Xin-Kai HUANG, Kuei-Hsiung CHO
  • Rounded vertical wafer vessel rods
    Patent number: 11450542
    Abstract: In an embodiment, a system includes: a base; and a rod set comprising multiple rods connected to the base, wherein each rod of the rod set comprises multiple fingers disposed in a vertically-stacked relationship to each other and separated respectively from each other by respective slots, wherein each slot is configured to receive a bevel of a wafer, and wherein each of the multiple fingers comprises a rounded end at a furthest extension.
    Type: Grant
    Filed: January 17, 2020
    Date of Patent: September 20, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ching-Wen Cheng, Xin-Kai Huang, Kuei-Hsiung Cho
  • ROUNDED VERTICAL WAFER VESSEL RODS
    Publication number: 20210225675
    Abstract: In an embodiment, a system includes: a base; and a rod set comprising multiple rods connected to the base, wherein each rod of the rod set comprises multiple fingers disposed in a vertically-stacked relationship to each other and separated respectively from each other by respective slots, wherein each slot is configured to receive a bevel of a wafer, and wherein each of the multiple fingers comprises a rounded end at a furthest extension.
    Type: Application
    Filed: January 17, 2020
    Publication date: July 22, 2021
    Inventors: Ching-Wen CHENG, Xin-Kai HUANG, Kuei-Hsiung CHO