Patents by Inventor Xingjun Jiang

Xingjun Jiang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11454664
    Abstract: A testing system includes: an inspection module including a plurality of levels of inspection chambers in each of which a tester part having a tester configured to perform an electrical inspection of an inspection object and a probe card is accommodated; an aligner module configured to align the inspection object with the tester part; an alignment area in which the aligner module is accommodated; and a loader part configured to load the inspection object into the alignment area and unload the inspection object out of the aligner module, wherein the inspection module is located adjacent to the alignment area.
    Type: Grant
    Filed: April 16, 2018
    Date of Patent: September 27, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Kentaro Konishi, Jun Fujihara, Hiroki Shikagawa, Hiroshi Yamada, Yukinori Murata, Katsuaki Sugiyama, Shin Uchida, Tetsuya Kagami, Hiroaki Hayashi, Rika Ozawa, Takanori Hyakudomi, Xingjun Jiang, Kenichi Narikawa, Tomoya Endo
  • Patent number: 11360115
    Abstract: An inspection system configured to inspect a device within a substrate is provided. The inspection system includes an inspection module, an alignment module, a supporting device and a fixing device. The inspection module has multiple testers and multiple inspection chambers. The multiple testers are allowed to be accommodated in the multiple inspection chambers, respectively. The alignment module has an aligner. The aligner is placed in an alignment space. The aligner is configured to adjust a position of the substrate to be inspected with respect to one tester of the multiple testers, which is accommodated in the alignment space. The supporting device is configured to support the tester accommodated in the alignment space from below. The fixing device is configured to fix the tester accommodated in the alignment space in cooperation with the supporting device.
    Type: Grant
    Filed: February 26, 2019
    Date of Patent: June 14, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Takanori Hyakudomi, Jun Fujihara, Hiroaki Sakamoto, Tomoya Endo, Xingjun Jiang
  • Publication number: 20210333319
    Abstract: A testing system includes: an inspection module including a plurality of levels of inspection chambers in each of which a tester part having a tester configured to perform an electrical inspection of an inspection object and a probe card is accommodated; an aligner module configured to align the inspection object with the tester part; an alignment area in which the aligner module is accommodated; and a loader part configured to load the inspection object into the alignment area and unload the inspection object out of the aligner module, wherein the inspection module is located adjacent to the alignment area.
    Type: Application
    Filed: April 16, 2018
    Publication date: October 28, 2021
    Inventors: Kentaro KONISHI, Jun FUJIHARA, Hiroki SHIKAGAWA, Hiroshi YAMADA, Yukinori MURATA, Katsuaki SUGIYAMA, Shin UCHIDA, Tetsuya KAGAMI, Hiroaki HAYASHI, Rika OZAWA, Takanori HYAKUDOMI, Xingjun JIANG, Kenichi NARIKAWA, Tomoya ENDO
  • Publication number: 20190265272
    Abstract: An inspection system configured to inspect a device within a substrate is provided. The inspection system includes an inspection module, an alignment module, a supporting device and a fixing device. The inspection module has multiple testers and multiple inspection chambers. The multiple testers are allowed to be accommodated in the multiple inspection chambers, respectively. The alignment module has an aligner. The aligner is placed in an alignment space. The aligner is configured to adjust a position of the substrate to be inspected with respect to one tester of the multiple testers, which is accommodated in the alignment space. The supporting device is configured to support the tester accommodated in the alignment space from below. The fixing device is configured to fix the tester accommodated in the alignment space in cooperation with the supporting device.
    Type: Application
    Filed: February 26, 2019
    Publication date: August 29, 2019
    Inventors: Takanori Hyakudomi, Jun Fujihara, Hiroaki Sakamoto, Tomoya Endo, Xingjun Jiang