Patents by Inventor Xinshu CAI

Xinshu CAI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210313512
    Abstract: A resistive random access memory (RRAM) device may be provided, including: a base layer, a vertical electrode stack arranged over the base layer, where the vertical electrode stack may include alternating mask elements and first electrodes, and each first electrode may include an extended portion extending beyond at least one side surface of at least one mask element adjoining the first electrode, a switching layer arranged along the extended portion of each first electrode and along the at least one side surface of the at least one mask element adjoining the first electrode, and a second electrode including a surface in contact with the switching layer. The RRAM device may have a 3D structure.
    Type: Application
    Filed: April 6, 2020
    Publication date: October 7, 2021
    Inventors: Xinshu CAI, Shyue Seng TAN, Eng Huat TOH
  • Patent number: 11119917
    Abstract: The present disclosure relates to split gate flash MLC based neuromorphic processing and method of making the same. Embodiments include MLC split-gate flash memory formed over a substrate, the MLC split-gate flash memory embedded with artificial neuromorphic processing to dynamically program and erase each cell of the MLC split-gate flash memory; and sense visual imagery by the artificial neuromorphic processing.
    Type: Grant
    Filed: July 12, 2018
    Date of Patent: September 14, 2021
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Danny Pak-Chum Shum, Shyue Seng Tan, Xinshu Cai, Fan Zhang, Soh Yun Siah, Tze Ho Simon Chan
  • Patent number: 11088156
    Abstract: A flash memory device is provided. The device comprises a substrate and a source region in the substrate. A first gate stack is positioned above the substrate and adjacent to the source region. A dual function gate structure having an upper portion and a lower portion is positioned above the source region. The upper portion of the dual function gate structure overlaps the first gate stack and the lower portion is adjacent to the first gate stack. A second gate is positioned above the substrate on an opposite side of the first gate stack from the dual function gate. A drain region is in the substrate adjacent to the second gate.
    Type: Grant
    Filed: August 28, 2019
    Date of Patent: August 10, 2021
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Xinshu Cai, Shyue Seng Tan, Kiok Boone Elgin Quek, Eng Huat Toh
  • Publication number: 20210217865
    Abstract: A memory device is provided. The device comprises a semiconductor fin with a first gate and a second gate disposed over the semiconductor fin. A third gate is positioned over the semiconductor fin and a lower portion of the third gate is disposed between the first and second gates.
    Type: Application
    Filed: January 14, 2020
    Publication date: July 15, 2021
    Inventors: XINSHU CAI, SHYUE SENG TAN, ENG HUAT TOH
  • Patent number: 11054387
    Abstract: The present disclosure generally relates to semiconductor devices, and more particularly to semiconductor devices integrated with an ion-sensitive field-effect transistor (ISFET) and methods of forming the same. The semiconductor device may include a substrate, a reference gate structure disposed above the substrate, a floating gate structure disposed above the substrate and adjacent to the reference gate structure, where the reference gate structure is electrically coupled to the floating gate structure, and a dielectric layer disposed between the reference gate structure and the floating gate structure.
    Type: Grant
    Filed: August 22, 2019
    Date of Patent: July 6, 2021
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Xinshu Cai, Shyue Seng Tan, Eng Huat Toh
  • Publication number: 20210159234
    Abstract: Structures for a non-volatile memory bit cell and methods of forming a structure for a non-volatile memory bit cell. A field-effect transistor has a channel region and a first gate electrode positioned over the channel region. A capacitor includes a second gate electrode that is coupled to the first gate electrode to define a floating gate. The first gate electrode has a non-rectangular shape.
    Type: Application
    Filed: November 26, 2019
    Publication date: May 27, 2021
    Inventors: Lanxiang Wang, Shyue Seng Tan, Kiok Boone Elgin Quek, Xinshu Cai, Eng Huat Toh
  • Patent number: 10991704
    Abstract: A memory device may include a substrate, a first gate structure, a mask and a second gate structure. The substrate may include a source region and a drain region at least partially arranged within the substrate, and a channel region arranged between the source region and the drain region. The first gate structure may be at least partially arranged over the channel region, and may include a top surface that may be substantially flat. The mask may be at least partially arranged over the top surface of the first gate structure. The second gate structure may be at least partially arranged over the mask and at least partially arranged adjacent to the first gate structure.
    Type: Grant
    Filed: December 27, 2018
    Date of Patent: April 27, 2021
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Xinshu Cai, Shyue Seng Tan, Khee Yong Lim, Kiok Boone Elgin Quek
  • Publication number: 20210066324
    Abstract: A flash memory device is provided. The device comprises a substrate and a source region in the substrate. A first gate stack is positioned above the substrate and adjacent to the source region. A dual function gate structure having an upper portion and a lower portion is positioned above the source region. The upper portion of the dual function gate structure overlaps the first gate stack and the lower portion is adjacent to the first gate stack. A second gate is positioned above the substrate on an opposite side of the first gate stack from the dual function gate. A drain region is in the substrate adjacent to the second gate.
    Type: Application
    Filed: August 28, 2019
    Publication date: March 4, 2021
    Inventors: XINSHU CAI, SHYUE SENG TAN, KIOK BOONE ELGIN QUEK, ENG HUAT TOH
  • Publication number: 20210055256
    Abstract: The present disclosure generally relates to semiconductor devices, and more particularly to semiconductor devices integrated with an ion-sensitive field-effect transistor (ISFET) and methods of forming the same. The semiconductor device may include a substrate, a reference gate structure disposed above the substrate, a floating gate structure disposed above the substrate and adjacent to the reference gate structure, where the reference gate structure is electrically coupled to the floating gate structure, and a dielectric layer disposed between the reference gate structure and the floating gate structure.
    Type: Application
    Filed: August 22, 2019
    Publication date: February 25, 2021
    Inventors: XINSHU CAI, SHYUE SENG TAN, ENG HUAT TOH
  • Patent number: 10903217
    Abstract: An anti-fuse memory cell may include a substrate including first and second conductivity regions and an isolation region at least partially within the substrate, a program gate over the substrate, a program gate oxide layer over the isolation region and between the program gate and the substrate, a first channel region arranged laterally between the first conductivity region and the isolation region, a second channel region arranged laterally between the second conductivity region and the isolation region, a first select gate arranged over the substrate and over the first channel region and a second select gate arranged over the substrate and over the second channel region. The program gate oxide layer may be configured to break down to allow conduction between the program gate and at least one of the channel regions upon providing a program voltage difference between the program gate and at least one of the channel regions.
    Type: Grant
    Filed: January 18, 2019
    Date of Patent: January 26, 2021
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Xinshu Cai, Shyue Seng Tan, Eng Huat Toh
  • Publication number: 20210010997
    Abstract: In a non-limiting embodiment, a device may include a substrate having conducting lines thereon. One or more fin structures may be arranged over the substrate. Each fin structure may include a sensor arranged over the substrate and around the fin structure. The sensor may include a self-aligned first sensing electrode and a self-aligned second sensing electrode arranged around the fin structure. The first sensing electrode and the second sensing electrode each may include a first portion lining a sidewall of the fin structure and a second portion arranged laterally from the first portion. At least the first portion of the first sensing electrode and the first portion of the second sensing electrode may define a sensing cavity of the sensor. The second portion of the first sensing electrode and the second portion of the second sensing electrode may be electrically coupled to the conducting lines.
    Type: Application
    Filed: July 9, 2019
    Publication date: January 14, 2021
    Inventors: Xinshu CAI, Shyue Seng TAN, Eng Huat TOH, Kiok Boone Elgin QUEK
  • Patent number: 10830731
    Abstract: A sensor device may include a substrate, and first and second semiconductor structures arranged over the substrate. The first semiconductor structure may be an ion-sensitive field effect transistor and may include a floating gate, and a sensing element electrically coupled to the floating gate. The second semiconductor structure may be capacitively coupled to the first semiconductor structure, and may include a first diffusion region and a second diffusion region having opposite polarity type dopants, and a channel region arranged therebetween. The second semiconductor structure may be configured to receive a bias voltage to tune an electrical characteristic of the first semiconductor structure through the first diffusion region and the second diffusion region and the channel region. In some embodiments, the substrate may be a crystalline-on-insulator substrate which may be coupled to a back gate bias to reduce an effective total capacitance of the ISFET and further improve the coupling ratio.
    Type: Grant
    Filed: September 17, 2019
    Date of Patent: November 10, 2020
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Xinshu Cai, Shyue Seng Tan, Eng Huat Toh
  • Patent number: 10762966
    Abstract: A device having at least one memory cell over a substrate is provided. The at least one memory cell includes a source region and a drain region in the substrate, and a first gate and a second gate over the substrate. The first and second gates are arranged between the source region and the drain region. The first and second gate are separated by an intergate dielectric. The first gate is configured as a select gate and erase gate of the at least one memory cell, and the second gate is configured as a storage gate of the at least one memory cell. The second gate comprises a floating gate and a control gate over the floating gate. The device further includes source/drain (S/D) contacts extending from the source region and the drain region. The source region and the drain region are coupled to either one of a source line (SL) or a bit line (BL) through the S/D contacts.
    Type: Grant
    Filed: October 30, 2018
    Date of Patent: September 1, 2020
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Xinshu Cai, Shyue Seng Tan, Kiok Boone Elgin Quek
  • Publication number: 20200235106
    Abstract: An anti-fuse memory cell may include a substrate including first and second conductivity regions and an isolation region at least partially within the substrate, a program gate over the substrate, a program gate oxide layer over the isolation region and between the program gate and the substrate, a first channel region arranged laterally between the first conductivity region and the isolation region, a second channel region arranged laterally between the second conductivity region and the isolation region, a first select gate arranged over the substrate and over the first channel region and a second select gate arranged over the substrate and over the second channel region. The program gate oxide layer may be configured to break down to allow conduction between the program gate and at least one of the channel regions upon providing a program voltage difference between the program gate and at least one of the channel regions.
    Type: Application
    Filed: January 18, 2019
    Publication date: July 23, 2020
    Inventors: Xinshu CAI, Shyue Seng TAN, Eng Huat TOH
  • Publication number: 20200212056
    Abstract: A memory device may include a substrate, a first gate structure, a mask and a second gate structure. The substrate may include a source region and a drain region at least partially arranged within the substrate, and a channel region arranged between the source region and the drain region. The first gate structure may be at least partially arranged over the channel region, and may include a top surface that may be substantially flat. The mask may be at least partially arranged over the top surface of the first gate structure. The second gate structure may be at least partially arranged over the mask and at least partially arranged adjacent to the first gate structure.
    Type: Application
    Filed: December 27, 2018
    Publication date: July 2, 2020
    Inventors: Xinshu CAI, Shyue Seng TAN, Khee Yong LIM, Kiok Boone Elgin QUEK
  • Publication number: 20200135275
    Abstract: A device having at least one memory cell over a substrate is provided. The at least one memory cell includes a source region and a drain region in the substrate, and a first gate and a second gate over the substrate. The first and second gates are arranged between the source region and the drain region. The first and second gate are separated by an intergate dielectric. The first gate is configured as a select gate and erase gate of the at least one memory cell, and the second gate is configured as a storage gate of the at least one memory cell. The second gate comprises a floating gate and a control gate over the floating gate. The device further includes source/drain (S/D) contacts extending from the source region and the drain region. The source region and the drain region are coupled to either one of a source line (SL) or a bit line (BL) through the S/D contacts.
    Type: Application
    Filed: October 30, 2018
    Publication date: April 30, 2020
    Inventors: Xinshu Cai, Shyue Seng Tan, Kiok Boone Elgin Quek
  • Patent number: 10636867
    Abstract: A method of forming an integrated circuit with a metal-insulator-poly (MIP) capacitor formed in a high-k metal gate (HKMG) process and the resulting device are provided. Embodiments include a device including a metal gate; a high-k dielectric layer formed around side walls of the metal gate, and a dummy polysilicon gate adjacent to at least one portion of the high-k dielectric layer. The device also includes a capacitor including the HK layer as an insulator, wherein the insulator is between a dummy as one electrode and the metal gate as another electrode.
    Type: Grant
    Filed: July 11, 2018
    Date of Patent: April 28, 2020
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Xinshu Cai, Shyue Seng Tan, Juan Boon Tan, Danny Pak-Chum Shum
  • Publication number: 20200083237
    Abstract: In a non-limiting embodiment, a memory array is provided having a transistor device. The transistor device includes transistor device first, second and third doped regions in a substrate. The transistor device further includes a first transistor device select gate over a region between the transistor device first doped region and the transistor device second doped region, and a second transistor device select gate over a region between the transistor device first doped region and the transistor device third doped region. The transistor device further includes a transistor device dielectric barrier extending between the first transistor device select gate and the second transistor device select gate. A width of the dielectric barrier compared to a width of the first transistor device select gate and/or the second transistor device select gate may have a ratio ranging from 0.33:1 to 5:1.
    Type: Application
    Filed: September 11, 2018
    Publication date: March 12, 2020
    Inventors: Xinshu Cai, Shyue Seng Tan, Danny Pak-Chum Shum
  • Publication number: 20200020761
    Abstract: A method of forming an integrated circuit with a metal-insulator-poly (MIP) capacitor formed in a high-k metal gate (HKMG) process and the resulting device are provided. Embodiments include a device including a metal gate; a high-k dielectric layer formed around side walls of the metal gate, and a dummy polysilicon gate adjacent to at least one portion of the high-k dielectric layer. The device also includes a capacitor including the HK layer as an insulator, wherein the insulator is between a dummy as one electrode and the metal gate as another electrode.
    Type: Application
    Filed: July 11, 2018
    Publication date: January 16, 2020
    Inventors: Xinshu CAI, Shyue Seng TAN, Juan Boon TAN, Danny Pak-Chum SHUM
  • Publication number: 20200019500
    Abstract: The present disclosure relates to split gate flash MLC based neuromorphic processing and method of making the same. Embodiments include MLC split-gate flash memory formed over a substrate, the MLC split-gate flash memory embedded with artificial neuromorphic processing to dynamically program and erase each cell of the MLC split-gate flash memory; and sense visual imagery by the artificial neuromorphic processing.
    Type: Application
    Filed: July 12, 2018
    Publication date: January 16, 2020
    Inventors: Danny Pak-Chum SHUM, Shyue Seng TAN, Xinshu CAI, Fan ZHANG, Soh Yun SIAH, Tze Ho Simon CHAN