Abstract: A substrate support includes at least three pockets defined along a perimeter of the substrate support, an edge gas groove located on a top surface of the substrate support, and a first clamping groove located radially inward from the edge gas groove on the top surface of the substrate support. Each pocket comprises a narrow portion and a wide portion located radially outward from the narrow portion. The edge gas groove is concentric with the substrate support. The edge gas groove intersects the narrow portion of each pocket. At least thirty through holes are within the edge gas groove and at least one through hole is within the narrow portion of each pocket.

Abstract: A surge protection circuit and a terminal are provided. The surge protection circuit is configured to be coupled to a charge management unit. The surge protection circuit includes a voltage stabilizing circuit and a connecting circuit. The voltage stabilizing circuit is configured to be coupled with a system power supply end of the charge management unit. The voltage stabilizing circuit is configured to stable the voltage at the system power supply end of the charge management unit. The connecting circuit has an input end configured to be coupled with the power supply unit-connection end of the charge management unit. The connecting circuit has an output end configured to be coupled with the system power supply end of the charge management unit. The connecting circuit is configured to be turned on when the voltage at the power supply unit-connection end exceeds a voltage threshold.