Patents by Inventor Xu-Yang Shen

Xu-Yang Shen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9966425
    Abstract: A method for fabricating a metal-insulator-metal (MIM) capacitor includes the steps of: forming a capacitor bottom metal (CBM) layer on a material layer; forming a silicon layer on the CBM layer; forming a capacitor dielectric layer on the silicon layer; and forming a capacitor top metal (CTM) layer on the capacitor dielectric layer.
    Type: Grant
    Filed: February 28, 2017
    Date of Patent: May 8, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Jen-Po Huang, Chin-Fu Lin, Bin-Siang Tsai, Xu Yang Shen, Seng Wah Liau, Yen-Chen Chen, Ko-Wei Lin, Chun-Ling Lin, Kuo-Chih Lai, Ai-Sen Liu, Chun-Yuan Wu, Yang-Ju Lu
  • Patent number: 9691733
    Abstract: A bonded semiconductor structure includes a first substrate and a second substrate. The first substrate includes a first interconnection structure, a first dielectric layer, and a first silicon carbon nitride (SiCN) layer sequentially stacked thereon. And at least a first conductive pad is formed in the first dielectric layer and the first SiCN layer. The second substrate includes a second interconnection structure, a second dielectric layer, and a second SiCN layer sequentially stacked thereon. And at least a second conductive pad is formed in the second dielectric layer and the second SiCN layer. The first conductive pad physically contacts the second conductive pad, and the first SiCN layer physically contacts the second SiCN layer.
    Type: Grant
    Filed: July 28, 2016
    Date of Patent: June 27, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Xu Yang Shen, Sin-Shien Lin
  • Publication number: 20170092771
    Abstract: A semiconductor device and a method of fabricating the same, the semiconductor device includes a substrate, an interconnect structure, and an oxide semiconductor structure. The substrate has a first region and a second region. The interconnect structure is disposed on the substrate, in the first region. The oxide semiconductor structure is disposed over a hydrogen blocking layer, in the second region of the substrate.
    Type: Application
    Filed: November 27, 2015
    Publication date: March 30, 2017
    Inventors: Chia-Fu Hsu, Chun-Yuan Wu, Xu Yang Shen, ZHIBIAO ZHOU, Qinggang Xing
  • Patent number: 9608126
    Abstract: A semiconductor device and a method of fabricating the same, the semiconductor device includes a substrate, an interconnect structure, and an oxide semiconductor structure. The substrate has a first region and a second region. The interconnect structure is disposed on the substrate, in the first region. The oxide semiconductor structure is disposed over a hydrogen blocking layer, in the second region of the substrate.
    Type: Grant
    Filed: November 27, 2015
    Date of Patent: March 28, 2017
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chia-Fu Hsu, Chun-Yuan Wu, Xu Yang Shen, Zhibiao Zhou, Qinggang Xing
  • Patent number: 8779484
    Abstract: An image sensor includes a plurality of color filters and an anti-reflective layer. The color filters are located on a substrate. The anti-reflective layer is located between the substrate and the color filters, and parts of the anti-reflective layer corresponding to at least two of the color filters have different thicknesses. Moreover, an image sensing process including the following steps is also provided. An anti-reflective layer is formed on a substrate. A plurality of color filters is formed on the anti-reflective layer, wherein parts of the anti-reflective layer right below at least two of the color filters have different thicknesses.
    Type: Grant
    Filed: November 29, 2012
    Date of Patent: July 15, 2014
    Assignee: United Microelectronics Corp.
    Inventors: Xu Yang Shen, Seng Wah Liau, Yuheng Liu, Qin Li, Kiet Houng Chow
  • Publication number: 20140145282
    Abstract: An image sensor includes a plurality of color filters and an anti-reflective layer. The color filters are located on a substrate. The anti-reflective layer is located between the substrate and the color filters, and parts of the anti-reflective layer corresponding to at least two of the color filters have different thicknesses. Moreover, an image sensing process including the following steps is also provided. An anti-reflective layer is formed on a substrate. A plurality of color filters is formed on the anti-reflective layer, wherein parts of the anti-reflective layer right below at least two of the color filters have different thicknesses.
    Type: Application
    Filed: November 29, 2012
    Publication date: May 29, 2014
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Xu Yang Shen, Seng Wah Liau, Yuheng Liu, Qin Li, Kiet Houng Chow
  • Publication number: 20140087559
    Abstract: A method for forming a semiconductor structure and a method for patterning a dielectric layer are provided. The method comprises following steps. An upper cap layer is formed on and physically contacted with a dielectric layer. The dielectric layer has a dielectric thickness having a range of 1000 ?˜5000 ?. A patterned mask layer is formed on and physically contacted with the upper cap layer. A part of the upper cap layer is removed to form a patterned upper cap layer by using the patterned mask layer as an etching mask. A part of the dielectric layer is removed to form a dielectric opening in the dielectric layer by using the patterned upper cap layer as an etching mask.
    Type: Application
    Filed: September 27, 2012
    Publication date: March 27, 2014
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Xu-Yang Shen, Seng-Wah Liau, Jian-Jun Zhang, Han-Chuan Fang