Patents by Inventor XUAN PAN

XUAN PAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12154784
    Abstract: Semiconductor devices and methods of manufacturing the semiconductor devices are described herein. A method includes forming a first opening through a dielectric layer, the first opening exposing a conductive region. A wet cleaning is used after the forming the first opening, and the first opening is treated after the wet cleaning the first opening, the treating the first opening comprising turning a sidewall treatment precursor and a bottom treatment precursor into a first plasma mixture, the sidewall treatment precursor being different from the bottom treatment precursor. The first opening is filled with a conductive material after the treating the first opening.
    Type: Grant
    Filed: April 13, 2022
    Date of Patent: November 26, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Yang Hung, Huan-Just Lin, Sheng-Liang Pan, Yungtzu Chen, Po-Chuan Wang, Guan-Xuan Chen
  • Publication number: 20240387698
    Abstract: A semiconductor device includes a semiconductor substrate, a gate structure, a silicon oxycarbonitride spacer, a silicon oxycarbide spacer, a silicon nitride spacer, and a source/drain structure. The gate structure is on the semiconductor substrate. The silicon oxycarbonitride spacer is on a sidewall of the gate structure. The silicon oxycarbide spacer is on a sidewall of the silicon oxycarbonitride spacer. The silicon nitride spacer is on a sidewall of the silicon oxycarbide spacer, in which an upper portion of the silicon nitride spacer has a lower density than a lower portion of the silicon nitride spacer. The source/drain structure is on the semiconductor substrate and adjacent to the gate structure.
    Type: Application
    Filed: July 29, 2024
    Publication date: November 21, 2024
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Sheng-Liang PAN, Yung-Tzu CHEN, Chung-Chieh LEE, Yung-Chang HSU, Chia-Yang HUNG, Po-Chuan WANG, Guan-Xuan CHEN, Huan-Just LIN
  • Publication number: 20240387517
    Abstract: Semiconductor devices and methods of manufacturing the semiconductor devices are described herein. A method includes forming a gate electrode, a gate electrode contact layer over the gate electrode, forming a dielectric layer over the gate electrode contact layer, and performing an etch through the dielectric layer, the etch forming an opening that exposes the gate electrode contact layer. The method further includes performing a post-etch treatment on the opening formed by the etch process by exposing the opening to a plasma. The method further includes forming gate electrode contacts in the openings after the post-etch treatment by a bottom-up deposition process.
    Type: Application
    Filed: July 28, 2024
    Publication date: November 21, 2024
    Inventors: Po-Chuan Wang, Guan-Xuan Chen, Chia-Yang Hung, Sheng-Liang Pan, Huan-Just Lin
  • Publication number: 20240379344
    Abstract: A method of forming a semiconductor device includes: forming a first conductive feature in a first dielectric layer disposed over a substrate; forming a second dielectric layer over the first dielectric layer; etching the second dielectric layer using a patterned mask layer to form an opening in the second dielectric layer, where the opening exposes the first conductive feature; performing an ashing process to remove the patterned mask layer after the etching; wet cleaning the opening after the ashing process, where the wet cleaning enlarges a bottom portion of the opening; and filling the opening with a first electrically conductive material.
    Type: Application
    Filed: July 24, 2024
    Publication date: November 14, 2024
    Inventors: Po-Chuan Wang, Guan-Xuan Chen, Chia-Yang Hung, Sheng-Liang Pan, Huan-Just Lin
  • Publication number: 20240364478
    Abstract: This patent application discloses methods, apparatus, and systems that relate to positioning for low power consumption user equipment. In one example aspect, a method for wireless communication includes receiving, by a wireless device from a network node, configuration information; and transmitting, by a wireless device, a report comprising at least one parameter.
    Type: Application
    Filed: July 10, 2024
    Publication date: October 31, 2024
    Inventors: Cong WANG, Chuangxin JIANG, Yu PAN, Xuan MA, Focai PENG, Mengzhen LI
  • Patent number: 12125898
    Abstract: A method includes forming a gate structure on a semiconductor substrate; depositing a carbon-containing seal layer over the gate structure; depositing a nitrogen-containing seal layer over the carbon-containing seal layer; introducing an oxygen-containing precursor on the nitrogen-containing seal layer; heating the substrate to dissociate the oxygen-containing precursor into an oxygen radical to dope into the nitrogen-containing seal layer; after heating the substrate, etching the nitrogen-containing seal layer and the carbon-containing seal layer, such that a remainder of the nitrogen-containing seal layer and the carbon-containing seal layer remains on a sidewall of the gate structure as a gate spacer.
    Type: Grant
    Filed: June 25, 2021
    Date of Patent: October 22, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Sheng-Liang Pan, Yung-Tzu Chen, Chung-Chieh Lee, Yung-Chang Hsu, Chia-Yang Hung, Po-Chuan Wang, Guan-Xuan Chen, Huan-Just Lin
  • Publication number: 20240321582
    Abstract: A method for making a semiconductor device includes patterning at least one dielectric layer disposed over a conductive cap layer to form a via opening penetrating through the at least one dielectric layer to expose the conductive cap layer and to form a top portion of the conductive cap layer into a metal oxide layer; converting the metal oxide layer to a metal oxynitride layer by a soft ashing process using a processing gas containing nitrogen gas; removing the metal oxynitride layer from a remaining portion of the conductive cap layer; and forming a via contact in the via opening to electrically connect the remaining portion of the conductive cap layer.
    Type: Application
    Filed: May 31, 2024
    Publication date: September 26, 2024
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Guan-Xuan CHEN, Sheng-Liang PAN, Chia-Yang HUNG, Po-Chuan WANG, Huan-Just LIN
  • Publication number: 20240283526
    Abstract: The application belongs to the technical field of public safety, in particular to a field disaster monitoring system and method based on an aircraft relay communication, including a sensing communication terminal, an aircraft relay station and a data center server; the sensing communication terminal is used for collecting information in the field area in real time, and is connected with an airborne aircraft relay station through wireless signals transmitting the collected information; the aircraft relay station is in communication connection with a data center server through a wireless network for sending the information to the data center server; the data center server is used for receiving and analyzing the information.
    Type: Application
    Filed: April 30, 2024
    Publication date: August 22, 2024
    Inventors: Weijun PAN, Zonghuan WU, Xinping ZHU, Yuanfei LENG, Xuan WANG, Rundong WANG, Qinghai ZUO, Tian LUAN, Yuanjing HUANG
  • Patent number: 12051440
    Abstract: Disclosed are a self-attention-based speech quality measuring method and system for real-time air traffic control, including following steps: acquiring real-time air traffic control speech data and generating speech information frames; detecting the speech information frames, discarding unvoiced information frames of the speech information frames, generating a voiced long speech information frame; performing mel spectrogram conversion, attention extraction and feature fusion on the long speech information frame to obtain a predicted mos value.
    Type: Grant
    Filed: February 29, 2024
    Date of Patent: July 30, 2024
    Assignee: Civil Aviation Flight University of China
    Inventors: Weijun Pan, Yidi Wang, Qinghai Zuo, Xuan Wang, Rundong Wang, Tian Luan, Jian Zhang, Zixuan Wang, Peiyuan Jiang, Qianlan Jiang
  • Publication number: 20240250150
    Abstract: A method for manufacturing a semiconductor device includes forming a first dielectric layer over a semiconductor fin. The method includes forming a second dielectric layer over the first dielectric layer. The method includes exposing a portion of the first dielectric layer. The method includes oxidizing a surface of the second dielectric layer while limiting oxidation on the exposed portion of the first dielectric layer.
    Type: Application
    Filed: February 16, 2024
    Publication date: July 25, 2024
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Sheng-Liang Pan, Chen Yung Tzu, Chung-Chieh Lee, Yung-Chang Hsu, Hung Chia-Yang, Po-Chuan Wang, Guan-Xuan Chen, Huan-Just Lin
  • Patent number: 9817873
    Abstract: The present disclosure discloses a method and apparatus for mining community users, belonging to the field of Internet communications. The method includes: acquiring original community data of a community user; calculating intimacy scores of the community user with respect to other community users according to the original community data of the community user, the intimacy scores being used for indicating degrees of intimacy of the community user with respect to the other community users; clustering the community users according to the intimacy scores of the community user with respect to the other community users, and forming a community user circle; and displaying the community user circle to community users in the community user circle, so that the community users in the community user circle communicate with each other. The apparatus includes: a first acquiring module, a calculation module, a clustering module, and a display module.
    Type: Grant
    Filed: November 18, 2013
    Date of Patent: November 14, 2017
    Assignee: TENCENT TECHNOLOGY (SHENZHEN) COMPANY LIMITED
    Inventors: Gang Cheng, Xuan Pan, Ziming Zhuang, Jing Zhou, He Li
  • Patent number: 9664836
    Abstract: An illumination system defined a primary optical axis is provided. The illumination system comprises a light source, a first lens group, an integrator rod, and a second lens group successively located on the primary optical axis. The light source is configured to output a light. The first lens group is configured to reduce an aperture angle of the light to about 27 degrees. The integrator rod is configured to make the light uniformly. The second lens group is configured to amplify an illumination field of the light and reduce the aperture angle of the light to about 3 degrees.
    Type: Grant
    Filed: November 12, 2014
    Date of Patent: May 30, 2017
    Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Jun Zhu, Xuan Pan, Guo-Fan Jin, Shou-Shan Fan
  • Patent number: 9241242
    Abstract: An information recommendation method is provided for a terminal. The method includes obtaining at least one keyword, obtaining geographical location information corresponding to the keyword, and searching, within a range of a map interface display area, recommendation information relevant to geographical locations adjacent to the geographical location corresponding to the geographical location information. The method also includes displaying, according to the range of the map interface display area, geographical location information corresponding to the keyword, as well as the map interface having the recommendation information.
    Type: Grant
    Filed: May 18, 2014
    Date of Patent: January 19, 2016
    Assignee: TENCENT TECHNOLOGY (SHENZHEN) COMPANY LIMITED
    Inventors: Gang Cheng, Xuan Pan, Ziming Zhuang, He Li, Fang Lu, Gudan Wang, Yiyang Liu, Junjie Zhai, Boyu Qiu, Jianqun Chen
  • Publication number: 20150302062
    Abstract: The present disclosure discloses a method and apparatus for mining community users, belonging to the field of Internet communications. The method includes: acquiring original community data of a community user; calculating intimacy scores of the community user with respect to other community users according to the original community data of the community user, the intimacy scores being used for indicating degrees of intimacy of the community user with respect to the other community users; clustering the community users according to the intimacy scores of the community user with respect to the other community users, and forming a community user circle; and displaying the community user circle to community users in the community user circle, so that the community users in the community user circle communicate with each other. The apparatus includes: a first acquiring module, a calculation module, a clustering module, and a display module.
    Type: Application
    Filed: November 18, 2013
    Publication date: October 22, 2015
    Inventors: Gang Cheng, Xuan Pan, Ziming Zhuang, Jing Zhou, He Li
  • Publication number: 20150131258
    Abstract: An illumination system defined a primary optical axis is provided. The illumination system comprises a light source, a first lens group, an integrator rod, and a second lens group successively located on the primary optical axis. The light source is configured to output a light. The first lens group is configured to reduce an aperture angle of the light to about 27 degrees. The integrator rod is configured to make the light uniformly. The second lens group is configured to amplify an illumination field of the light and reduce the aperture angle of the light to about 3 degrees.
    Type: Application
    Filed: November 12, 2014
    Publication date: May 14, 2015
    Inventors: JUN ZHU, XUAN PAN, GUO-FAN JIN, SHOU-SHAN FAN
  • Publication number: 20140315584
    Abstract: An information recommendation method is provided for a terminal. The method includes obtaining at least one keyword, obtaining geographical location information corresponding to the keyword, and searching, within a range of a map interface display area, recommendation information relevant to geographical locations adjacent to the geographical location corresponding to the geographical location information. The method also includes displaying, according to the range of the map interface display area, geographical location information corresponding to the keyword, as well as the map interface having the recommendation information.
    Type: Application
    Filed: May 18, 2014
    Publication date: October 23, 2014
    Applicant: TENCENT TECHNOLOGY (SHENZHEN) COMPANY LIMITED
    Inventors: GANG CHENG, XUAN PAN, ZIMING ZHUANG, HE LI, FANG LU, GUDAN WANG, YIYANG LIU, JUNJIE ZHAI, BOYU QIU, JIANQUN CHEN