Abstract: A backside illuminated (BSI) image sensor substrate and a method of manufacturing a BSI image sensor are disclosed. A first nitride layer (9) is formed on a metal material layer (70), and a first dry etching process is then performed on both the first nitride layer (9) and the metal material layer (70). In this way, during the etching of the metal material layer (70), the first nitride layer (9) is bombarded so that nitrogen atoms or nitrogen ions escape from the first nitride layer (9), during the formation of a metal grid layer (7), the escaping nitrogen atoms or nitrogen ions react with the metal on sidewalls of second openings (7a), forming a metal nitride layer which protects the metal grid at the sidewalls of the second openings (7a) from being damaged. As such, the resulting metal grid layer (7) has smooth sidewalls and good morphology.

Abstract: A method for manufacturing a semiconductor device is provided. A substrate is provided, where a cover layer is formed on the substrate, a wiring layer is formed in the cover layer, a layer to be etched is formed on the cover layer, and the layer to be etched includes an adhesive layer. An exposure patterned film layer is formed on the layer to be etched. A first etching hole pattern is formed in the exposure patterned film layer. The layer to be etched is etched to form a blind hole by using the exposure patterned film layer as a mask. The exposure patterned film layer is trimmed to form a second etching hole pattern. The layer to be etched is further etched to form a bonding hole by using the trimmed exposure patterned film layer as a mask. A bonding pad is formed in the bonding hole.

Abstract: A method for manufacturing a semiconductor device is provided. A substrate is provided, where a cover layer is formed on the substrate, a wiring layer is formed in the cover layer, a layer to be etched is formed on the cover layer, and the layer to be etched includes an adhesive layer. An exposure patterned film layer is formed on the layer to be etched. A first etching hole pattern is formed in the exposure patterned film layer. The layer to be etched is etched to form a blind hole by using the exposure patterned film layer as a mask. The exposure patterned film layer is trimmed to form a second etching hole pattern. The layer to be etched is further etched to form a bonding hole by using the trimmed exposure patterned film layer as a mask. A bonding pad is formed in the bonding hole.