Abstract: A microelectromechanical resonator device is provided having two-dimensional resonant rods. The resonator device has a piezoelectric layer formed with a plurality of alternating rods and trenches. A bottom electrode is in contact with a bottom surface of the piezoelectric layer. A top electrode metal grating of conductive strips is aligned in contact with corresponding rods of the piezoelectric layer.

Abstract: An on-chip acoustic delay line (ADL) for operation in the radio frequency (RF) range uses a two-dimensional array of resonant rods and a piezoelectric layer having corrugated structure. The ADL has one or more programmable passband frequencies which are determined by the lithographically-defined artificial dispersive characteristics of acoustic metamaterials formed by forests of the locally resonant rods and selectable attached matching networks. The ADL devices offer exceptionally high fractional bandwidth and low insertion loss. The ADL can be used in self-interference cancellation networks to provide full duplex radio.

Abstract: Provided herein are acoustic material (AM) CMRs having an active region including a conductive plate suspended over a cavity in a substrate and anchored to the substrate by two y-anchors, a piezoelectric layer disposed on the conductive plate, and an interdigitated metal structure (IDT) to cause transduction for excitement of a longitudinal mode of vibration of the AM CMR; and a pair of AM reflectors (AMRs) forming lateral anchors anchored to the substrate and attached to opposite sides of the conductive plate along the direction of vibration of the AM CMR, the AMRs each including a conductive anchor plate suspended over the cavity in the substrate, and a piezoelectric layer disposed on the conductive plate, and a parallel array of rods disposed on the piezoelectric layer, wherein the AMRs are configured to generate an acoustic stopband for inhibiting lateral leakage of the excited longitudinal mode of vibration.

Abstract: A microelectromechanical resonator device is provided having two-dimensional resonant rods. The resonator device has a piezoelectric layer formed with a plurality of alternating rods and trenches. A bottom electrode is in contact with a bottom surface of the piezoelectric layer. A top electrode metal grating of conductive strips is aligned in contact with corresponding rods of the piezoelectric layer.

Abstract: A microelectromechanical resonator device is provided having two-dimensional resonant rods. The resonator device has a piezoelectric layer formed with a plurality of alternating rods and trenches. A bottom electrode is in contact with a bottom surface of the piezoelectric layer. A top electrode metal grating of conductive strips is aligned in contact with corresponding rods of the piezoelectric layer.

Abstract: A microelectromechanical resonator device is provided having two-dimensional resonant rods. The resonator device has a piezoelectric layer formed with a plurality of alternating rods and trenches. A bottom electrode is in contact with a bottom surface of the piezoelectric layer. A top electrode metal grating of conductive strips is aligned in contact with corresponding rods of the piezoelectric layer.