Abstract: A method and apparatus for separating real DVC via defects from nuisance based on Net Tracing Classification of eBeam VC die comparison inspection results are provided. Embodiments include performing an eBeam VC die comparison inspection on each via of a plurality of dies; determining DVC vias based on the comparison; performing a Net Tracing Classification on the DVC vias; determining S/D DVC vias based on the Net Tracing Classification; and performing a die repeater analysis on the S/D DVC vias to determine systematic design-related DVC via defects.

Abstract: A method and apparatus for separating real DVC via defects from nuisance based on Net Tracing Classification of eBeam VC die comparison inspection results are provided. Embodiments include performing an eBeam VC die comparison inspection on each via of a plurality of dies; determining DVC vias based on the comparison; performing a Net Tracing Classification on the DVC vias; determining S/D DVC vias based on the Net Tracing Classification; and performing a die repeater analysis on the S/D DVC vias to determine systematic design-related DVC via defects.

Abstract: An endoscope is provided for observing an object. The endoscope includes a microfluidic device defining a well therein and a lens disposed in the well of the microfluidic device. The lens has a tunable focal length. A tuning structure is provided for tuning the focal length of the lens in response to a predetermined stimulus and an illumination fiber may be positioned adjacent to the lens for illuminating the object. An activation fiber bundle is adjacent to the tuning structure for providing the predetermined stimulus to the tuning structure. The image acquisition fiber bundle is in alignment with the lens for receiving an image therefrom.