Patents by Inventor Xuewen Shi

Xuewen Shi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PRESSURE SENSOR BASED ON ZINC OXIDE NANOWIRES AND METHOD OF MANUFACTURING PRESSURE SENSOR
    Publication number: 20230371384
    Abstract: A pressure sensor based on zinc oxide nanowires and a method of manufacturing a pressure sensor based on zinc oxide nanowires are provided. The manufacturing method includes: manufacturing a bottom electrode on a substrate; manufacturing a seed layer on the bottom electrode; manufacturing a zinc oxide nanowire layer on the seed layer; manufacturing a support layer on the zinc oxide nanowire layer; and manufacturing a top electrode on the support layer.
    Type: Application
    Filed: October 26, 2020
    Publication date: November 16, 2023
    Inventors: Ling Li, Xuewen Shi, Nianduan Lu, Congyan Lu, Di Geng, Xinlv Duan, Ming Liu